[Scan]
initial_time=2016-01-18T19:00:54
final_time=2016-01-18T19:01:15
ip_count=19
run=1024
dataset=4
scan=295
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.43285E-2
qbias_imon=-3.83505E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-7.41708E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.43694E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.30463E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.58561E-8
mult1=-2.07816E-8
mult2=-3.57893E-9
rf_tmon=3.71889E-3
rf_agc=4.23099E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=6.0339E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63141E0
bslens_imon=2.36629E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=1.9989E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.04852E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=2.82521E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04923E1
cs_ea1_imon=2.54291E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98051E0
lens1_imon=1.40003E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64945E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.49666E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.93369E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.3462E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.25094E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14757E1
os_ea1_imon=2.36877E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.1996E0
cs_ionrep_imon=1.17953E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91951E2
cs_nozzle_imon=1.93671E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.97765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20394E0
olens4_imon=4.02267E-8
tplens_vset=1.4E-1
tplens_vmon=1.69039E0
tplens_imon=-1.6439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26098E1
iondef3_imon=1.49277E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.279E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03005E2
lens6_imon=2.98052E-4
ql6_vset=1.0E-1
ql6_vmon=9.57727E-2
ql6_imon=9.04667E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2462E0
ionrepsh_imon=1.76176E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33811E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74453E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51401E0
os_ea2_imon=-7.66089E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1244E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11081E1
os_restr2_imon=3.43824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.25722E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73976E1
iondef1_imon=1.1236E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67595E1
iondef4_imon=1.10792E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.30516E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.84469E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56543E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.72603E-1
window_imon=-8.42748E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82691E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.31438E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.43307E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.14449E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39374E0
defgridb_imon=5.68625E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.42871E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07305E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65906E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30729E1
cs_fil1_imon=9.94672E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63657E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67459E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69644E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.41272E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.221E3	3.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80032E1	-4.29153E-4	-8.80009E1	5.00679E-4	4.14848E-3	9.52244E-2	2.73339E1	-3.26933E1	-3.25776E1	2.68635E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
2.0E0	1.10888E5	1.07E2	3.16E2	1.6E2	-7.286E-2	-8.80033E1	-6.67572E-4	-8.80009E1	6.4373E-4	4.79221E-3	9.56535E-2	2.73502E1	-3.26272E1	-3.2644E1	2.70352E1	1.20137E-7	2.52473E-3	2.52473E-3	6.29067E-3	3.00942E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80031E1	-7.15256E-4	-8.80009E1	5.00679E-4	4.52995E-3	9.56535E-2	2.73331E1	-3.26674E1	-3.26126E1	2.70185E1	1.2035E-7	2.51359E-3	2.51359E-3	6.33538E-3	3.00676E-1
4.0E0	2.4069E4	1.2E1	6.55E2	3.98E2	-7.201E-2	-8.8003E1	-5.24521E-4	-8.80007E1	4.52995E-4	4.69685E-3	9.54151E-2	2.73153E1	-3.26723E1	-3.26086E1	2.70401E1	1.19956E-7	2.51723E-3	2.51723E-3	6.3275E-3	2.99816E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80031E1	-4.05312E-4	-8.80007E1	5.96046E-4	4.36306E-3	9.56774E-2	2.73381E1	-3.26176E1	-3.26296E1	2.69734E1	1.20122E-7	2.51007E-3	2.51007E-3	6.32386E-3	2.98222E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.8003E1	-4.29153E-4	-8.80008E1	5.24521E-4	4.62532E-3	9.52959E-2	2.72949E1	-3.26536E1	-3.25954E1	2.67998E1	1.20191E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80031E1	-5.24521E-4	-8.8001E1	3.09944E-4	4.673E-3	9.57727E-2	2.7285E1	-3.26856E1	-3.26219E1	2.67001E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80029E1	-5.00679E-4	-8.80008E1	1.90735E-4	4.72069E-3	9.52959E-2	2.73192E1	-3.26578E1	-3.26346E1	2.69199E1	1.20055E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.03286E-1
1.2E1	1.02E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80028E1	-5.96046E-4	-8.8001E1	2.38419E-5	4.76837E-3	9.56774E-2	2.72925E1	-3.26711E1	-3.26554E1	2.68358E1	1.2035E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.02813E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.8003E1	-6.91414E-4	-8.80012E1	3.57628E-4	4.98295E-3	9.52244E-2	2.73622E1	-3.26675E1	-3.26524E1	2.68178E1	1.20174E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9926E-1
1.4E1	3.52E3	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80032E1	-1.07288E-3	-8.80011E1	4.52995E-4	4.8399E-3	9.52959E-2	2.73267E1	-3.26783E1	-3.26464E1	2.69421E1	1.20069E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.98222E-1
1.5E1	1.22E2	1.0E0	6.06E2	4.11E2	-7.22418E-2	-8.8003E1	-5.24521E-4	-8.80011E1	4.52995E-4	4.33922E-3	9.54151E-2	2.73616E1	-3.26747E1	-3.26188E1	2.68364E1	1.20069E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.00041E-1
1.6E1	5.08E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.8003E1	-4.76837E-4	-8.80012E1	4.76837E-4	4.57764E-3	9.56059E-2	2.73248E1	-3.26753E1	-3.25994E1	2.68094E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02133E-1
1.7E1	1.104E3	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80032E1	-8.10623E-4	-8.80012E1	5.24521E-4	4.62532E-3	9.53436E-2	2.73228E1	-3.26493E1	-3.26144E1	2.70864E1	1.19841E-7	2.51919E-3	2.51919E-3	6.29157E-3	2.99594E-1
1.8E1	4.668E3	1.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80031E1	-5.48363E-4	-8.80011E1	2.86102E-4	4.81606E-3	9.57012E-2	2.7332E1	-3.26021E1	-3.26138E1	2.69181E1	1.20084E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00676E-1
1.9E1	2.356E3	1.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80029E1	-9.29832E-4	-8.80009E1	5.00679E-4	4.57764E-3	9.57489E-2	2.73452E1	-3.26691E1	-3.258E1	2.69217E1	1.20084E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.00144E-1
2.0E1	2.6617E4	9.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80028E1	-1.12057E-3	-8.80007E1	7.86781E-4	4.31538E-3	9.53436E-2	2.73075E1	-3.26703E1	-3.26431E1	2.68809E1	1.20106E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01223E-1
2.1E1	4.2E1	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80028E1	-8.58307E-4	-8.80009E1	3.33786E-4	4.45843E-3	9.55343E-2	2.73294E1	-3.26666E1	-3.26189E1	2.6719E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.99941E-1
2.2E1	1.985E3	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80031E1	-1.14441E-3	-8.80011E1	9.53674E-5	4.31538E-3	9.55582E-2	2.73122E1	-3.26496E1	-3.26437E1	2.67624E1	1.19859E-7	2.51774E-3	2.51774E-3	6.31203E-3	2.99626E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.43285E-2	-8.80031E1	-7.15256E-4	-8.80009E1	1.90735E-4	4.43459E-3	9.57727E-2	2.73976E1	-3.279E1	-3.26098E1	2.67595E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1