[Scan]
initial_time=2016-01-18T19:02:17
final_time=2016-01-18T19:02:36
ip_count=19
run=1024
dataset=4
scan=298
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.76605E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-7.2242E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.35827E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.24714E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.59214E-8
mult1=-1.58358E-8
mult2=-2.43712E-9
rf_tmon=-6.7629E-3
rf_agc=3.14568E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.84686E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66385E0
bslens_imon=2.32028E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19276E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.82377E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04634E1
cs_ea1_imon=2.53264E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99467E0
lens1_imon=1.46374E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.48498E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.92468E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.34738E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11748E1
os_restr1_imon=4.25959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14421E1
os_ea1_imon=2.33904E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63377E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2285E0
cs_ionrep_imon=1.18448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93728E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02175E1
cs_anode1_imon=2.97765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=4.02535E-8
tplens_vset=1.4E-1
tplens_vmon=1.65618E0
tplens_imon=-4.22766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26083E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26496E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03023E2
lens6_imon=2.98215E-4
ql6_vset=1.0E-1
ql6_vmon=9.56297E-2
ql6_imon=9.01866E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=1.79892E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.17446E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48511E0
os_ea2_imon=-8.33338E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.14992E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.39606E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11239E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.43824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.27805E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7288E1
iondef1_imon=1.10378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.10107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.34078E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.8557E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08809E0
cs_ionaccel_imon=-1.97439E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-6.98589E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82666E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.8662E1
mask2_imon=-8.49956E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.78158E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=6.79409E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3967E0
defgridb_imon=6.10744E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33328E1
os_fil1_imon=9.43057E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07041E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65737E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3069E1
cs_fil1_imon=9.95122E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62558E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67007E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4332E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90145E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.84617E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.69483E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22425E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.03185E-1
chamber_ion_pmon=1.2033E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.37068E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.239E3	1.0E0	1.47E2	4.1E1	-7.14689E-2	-8.80031E1	-9.05991E-4	-8.80009E1	5.72205E-4	4.50611E-3	9.5582E-2	2.73145E1	-3.26555E1	-3.2616E1	2.67905E1	1.20004E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.9841E-1
2.0E0	1.10426E5	1.17E2	3.16E2	1.6E2	-7.11597E-2	-8.80029E1	-6.4373E-4	-8.80007E1	3.33786E-4	4.41074E-3	9.53674E-2	2.73429E1	-3.26957E1	-3.26146E1	2.66803E1	1.20158E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.98665E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80028E1	-3.57628E-4	-8.8001E1	4.52995E-4	4.62532E-3	9.53674E-2	2.73169E1	-3.26384E1	-3.2662E1	2.7019E1	1.19757E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9874E-1
4.0E0	2.3866E4	9.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80027E1	-4.29153E-4	-8.80011E1	-2.38419E-5	4.60148E-3	9.52005E-2	2.73201E1	-3.26699E1	-3.26122E1	2.70959E1	1.20004E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.8003E1	-6.91414E-4	-8.80009E1	1.90735E-4	4.50611E-3	9.5129E-2	2.73281E1	-3.26384E1	-3.26372E1	2.69275E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02396E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80031E1	-2.14577E-4	-8.80008E1	8.10623E-4	4.55379E-3	9.53436E-2	2.7376E1	-3.26825E1	-3.26338E1	2.67953E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.8003E1	-3.8147E-4	-8.8001E1	5.48363E-4	4.74453E-3	9.53436E-2	2.73075E1	-3.26529E1	-3.26003E1	2.68688E1	1.20435E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.8003E1	-5.00679E-4	-8.80009E1	3.8147E-4	4.64916E-3	9.5439E-2	2.72957E1	-3.26384E1	-3.25977E1	2.68623E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9978E-1
1.2E1	1.12E2	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80027E1	-5.00679E-4	-8.80008E1	2.38419E-4	4.64916E-3	9.53436E-2	2.73153E1	-3.26488E1	-3.26633E1	2.67752E1	1.20069E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.00302E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80031E1	-2.14577E-4	-8.80008E1	4.05312E-4	4.93526E-3	9.51052E-2	2.73538E1	-3.26585E1	-3.25797E1	2.68809E1	1.20017E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00563E-1
1.4E1	3.519E3	3.0E0	5.66E2	3.82E2	-7.201E-2	-8.80027E1	-2.6226E-4	-8.80009E1	5.00679E-4	4.74453E-3	9.5439E-2	2.73255E1	-3.26356E1	-3.26236E1	2.68632E1	1.19757E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00563E-1
1.5E1	8.7E1	0.0E0	6.06E2	4.11E2	-7.10825E-2	-8.8003E1	-3.8147E-4	-8.80006E1	2.38419E-4	4.50611E-3	9.5129E-2	2.73281E1	-3.26655E1	-3.26201E1	2.68448E1	1.20174E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00041E-1
1.6E1	5.45E2	1.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80029E1	-7.39098E-4	-8.80008E1	3.09944E-4	4.41074E-3	9.53197E-2	2.73135E1	-3.26603E1	-3.26422E1	2.68785E1	1.19851E-7	2.51954E-3	2.51954E-3	6.28592E-3	3.00453E-1
1.7E1	1.143E3	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80031E1	-5.96046E-4	-8.80007E1	4.76837E-4	4.45843E-3	9.53197E-2	2.73405E1	-3.26723E1	-3.2599E1	2.67992E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1
1.8E1	4.674E3	5.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80031E1	-6.67572E-4	-8.80011E1	3.8147E-4	4.52995E-3	9.52721E-2	2.73147E1	-3.26404E1	-3.26332E1	2.68538E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01871E-1
1.9E1	2.312E3	2.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80031E1	-4.76837E-4	-8.80007E1	5.24521E-4	4.17233E-3	9.52482E-2	2.73622E1	-3.26639E1	-3.26008E1	2.681E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00302E-1
2.0E1	2.6784E4	1.3E1	8.08E2	5.58E2	-7.286E-2	-8.80029E1	-5.72205E-4	-8.8001E1	3.09944E-4	4.74453E-3	9.52005E-2	2.73141E1	-3.26867E1	-3.26284E1	2.68935E1	1.20174E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9952E-1
2.1E1	4.0E1	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80032E1	-5.24521E-4	-8.80009E1	4.76837E-5	4.36306E-3	9.56059E-2	2.7337E1	-3.2682E1	-3.259E1	2.68065E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
2.2E1	1.831E3	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80033E1	-4.05312E-4	-8.80009E1	9.53674E-5	4.64916E-3	9.54628E-2	2.73333E1	-3.26452E1	-3.26458E1	2.68058E1	1.20042E-7	2.51498E-3	2.51498E-3	6.29684E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80029E1	-5.00679E-4	-8.80008E1	3.57628E-4	4.55379E-3	9.56297E-2	2.7288E1	-3.26496E1	-3.26083E1	2.68022E1	1.2033E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.03185E-1