[Scan]
initial_time=2016-01-18T19:03:11
final_time=2016-01-18T19:03:31
ip_count=19
run=1024
dataset=4
scan=300
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.82874E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.16329E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.40194E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.31047E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.59175E-8
mult1=-2.10104E-8
mult2=-2.9781E-9
rf_tmon=-4.22403E-3
rf_agc=3.44451E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=5.87642E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64144E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19559E1
lens5a_imon=1.99925E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12538E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53984E1
cs_ef1b_imon=2.82745E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05289E1
cs_ea1_imon=2.52804E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97048E0
lens1_imon=1.75397E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64829E1
os_ef1alow_imon=2.97712E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.48569E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84385E1
cs_ef1a_imon=2.93749E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=1.3526E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11507E1
os_restr1_imon=4.26865E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14633E1
os_ea1_imon=2.35213E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.07726E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22496E0
cs_ionrep_imon=1.18661E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.93636E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01945E1
cs_anode1_imon=2.98845E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=4.01504E-8
tplens_vset=1.4E-1
tplens_vmon=1.65618E0
tplens_imon=-3.44899E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26512E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.55789E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03032E2
lens6_imon=2.98222E-4
ql6_vset=1.0E-1
ql6_vmon=9.55582E-2
ql6_imon=9.22525E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26803E0
ionrepsh_imon=1.78193E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34112E1
lens5b_imon=2.16313E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12786E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49514E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71057E1
cs_ef2a_imon=3.16678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04601E0
os_ef2alow_imon=-2.47102E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04108E-1
os_ef2bup_imon=-5.16731E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11589E1
os_restr2_imon=3.43323E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.29397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01709E1
cs_anode2_imon=2.24891E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.1006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.71115E1
iondef4_imon=1.0968E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.25324E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.82853E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14724E0
cs_ionaccel_imon=-1.81995E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47311E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56553E1
einzel_imon=7.80107E-6
window_vset=0.0E0
window_vmon=2.53786E-1
window_imon=-8.89337E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82703E2
mask1_imon=2.39027E-4
mask2_vset=0.0E0
mask2_vmon=-1.86769E1
mask2_imon=-5.60262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.43118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.47908E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.75681E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49119E0
defgridb_imon=5.93401E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.4278E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07365E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65733E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30705E1
cs_fil1_imon=9.95933E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63074E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67039E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.6853E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92057E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9622E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35563E-1
cs_fil2_imon=-2.32556E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05955E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22327E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09081E-1
res40_imon=-2.56656E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.18E3	3.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80027E1	-4.76837E-4	-8.80009E1	1.90735E-4	4.45843E-3	9.53674E-2	2.73027E1	-3.2647E1	-3.26098E1	2.68304E1	1.20311E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0148E-1
2.0E0	1.10287E5	1.26E2	3.16E2	1.6E2	-7.286E-2	-8.80027E1	-8.10623E-4	-8.8001E1	6.19888E-4	4.43459E-3	9.56297E-2	2.73369E1	-3.26765E1	-3.25978E1	2.68575E1	1.19953E-7	2.52599E-3	2.52599E-3	6.31278E-3	3.03545E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80028E1	-4.05312E-4	-8.80006E1	4.76837E-4	4.31538E-3	9.54151E-2	2.7312E1	-3.26585E1	-3.2604E1	2.6807E1	1.19978E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.0041E-1
4.0E0	2.4308E4	1.0E1	6.55E2	3.98E2	-7.27053E-2	-8.80027E1	-8.10623E-4	-8.80009E1	1.66893E-4	4.3869E-3	9.5129E-2	2.73478E1	-3.26879E1	-3.26212E1	2.67812E1	1.20243E-7	2.52448E-3	2.52448E-3	6.31269E-3	3.02115E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80028E1	-4.52995E-4	-8.8001E1	4.52995E-4	4.41074E-3	9.55343E-2	2.73153E1	-3.26248E1	-3.26188E1	2.69181E1	1.20435E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80026E1	-4.76837E-4	-8.80012E1	3.33786E-4	4.69685E-3	9.51052E-2	2.73535E1	-3.26537E1	-3.26024E1	2.68142E1	1.20158E-7	2.52169E-3	2.52169E-3	6.28592E-3	2.9841E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80028E1	-6.4373E-4	-8.80011E1	6.67572E-4	4.41074E-3	9.4986E-2	2.73259E1	-3.26505E1	-3.26487E1	2.67589E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31014E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80027E1	-8.58307E-4	-8.80013E1	5.96046E-4	4.57764E-3	9.53674E-2	2.73399E1	-3.2685E1	-3.26012E1	2.70166E1					
1.2E1	1.05E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80028E1	-8.34465E-4	-8.80011E1	5.48363E-4	4.45843E-3	9.53674E-2	2.73093E1	-3.26573E1	-3.26242E1	2.7028E1	1.20069E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.01609E-1
1.3E1	2.8E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80028E1	-9.05991E-4	-8.80011E1	4.52995E-4	4.60148E-3	9.51529E-2	2.73118E1	-3.26517E1	-3.25844E1	2.68617E1	1.2033E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01609E-1
1.4E1	3.505E3	2.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80027E1	-9.53674E-4	-8.80007E1	5.72205E-4	4.52995E-3	9.5439E-2	2.73311E1	-3.26667E1	-3.2636E1	2.67613E1	1.20084E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.0041E-1
1.5E1	1.08E2	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80026E1	-1.43051E-3	-8.80011E1	3.8147E-4	4.74453E-3	9.55343E-2	2.73231E1	-3.26771E1	-3.26452E1	2.66895E1	1.20311E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.00197E-1
1.6E1	5.47E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80028E1	-1.45435E-3	-8.80009E1	2.86102E-4	4.673E-3	9.5439E-2	2.72941E1	-3.26119E1	-3.26407E1	2.66822E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
1.7E1	1.142E3	0.0E0	6.87E2	4.7E2	-7.13143E-2	-8.80028E1	-1.40667E-3	-8.80009E1	5.72205E-4	4.81606E-3	9.54151E-2	2.73257E1	-3.26661E1	-3.26231E1	2.66622E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9978E-1
1.8E1	4.683E3	9.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80028E1	-9.53674E-4	-8.80008E1	2.86102E-4	4.22001E-3	9.55582E-2	2.73404E1	-3.26706E1	-3.25988E1	2.66544E1	1.19979E-7	2.51525E-3	2.51525E-3	6.32087E-3	2.98156E-1
1.9E1	2.314E3	0.0E0	7.68E2	5.29E2	-7.201E-2	-8.80026E1	-8.34465E-4	-8.80006E1	3.33786E-4	4.72069E-3	9.5439E-2	2.73033E1	-3.26609E1	-3.26168E1	2.6658E1					
2.0E1	2.6576E4	1.4E1	8.08E2	5.58E2	-7.23189E-2	-8.80027E1	-4.76837E-4	-8.80011E1	2.38419E-5	4.64916E-3	9.51052E-2	2.73239E1	-3.26465E1	-3.26203E1	2.67931E1	1.19978E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.01209E-1
2.1E1	6.6E1	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80026E1	-5.72205E-4	-8.8001E1	-1.19209E-4	4.673E-3	9.53674E-2	2.73198E1	-3.26658E1	-3.26321E1	2.68478E1	1.20375E-7	2.51162E-3	2.51162E-3	6.3126E-3	2.99753E-1
2.2E1	1.843E3	2.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80026E1	-8.58307E-4	-8.80012E1	-1.43051E-4	4.57764E-3	9.54151E-2	2.73225E1	-3.26422E1	-3.26104E1	2.70593E1	1.20244E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.0041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80028E1	-9.05991E-4	-8.80009E1	3.09944E-4	4.31538E-3	9.55582E-2	2.73147E1	-3.26482E1	-3.26512E1	2.71115E1	1.20004E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.00453E-1