[Scan]
initial_time=2016-01-18T19:03:38
final_time=2016-01-18T19:03:58
ip_count=19
run=1024
dataset=4
scan=301
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.78757E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-6.87027E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=1.36937E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.33562E-9
ql4_vset=
ql4_vmon=9.05991E-4
ql4_imon=1.58998E-8
mult1=-1.52802E-8
mult2=-2.70758E-9
rf_tmon=-3.70131E-3
rf_agc=3.29316E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.71954E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66674E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19496E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05133E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54145E1
cs_ef1b_imon=2.83097E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02078E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04772E1
cs_ea1_imon=2.53463E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98969E0
lens1_imon=1.29404E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03504E1
cs_ea2_imon=1.49893E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=2.92432E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.33874E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.25562E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14711E1
os_ea1_imon=2.37205E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=1.19935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93575E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.98666E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=4.02074E-8
tplens_vset=1.4E-1
tplens_vmon=1.66787E0
tplens_imon=-4.111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26331E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.55949E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03E2
lens6_imon=2.98061E-4
ql6_vset=1.0E-1
ql6_vmon=9.53674E-2
ql6_imon=9.41217E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.80066E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.16728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48402E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.16722E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15444E-1
os_ef2bup_imon=-5.1639E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11165E1
os_restr2_imon=3.4368E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.28703E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.09914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.30348E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.82348E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13975E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.64099E-6
window_vset=0.0E0
window_vmon=2.47376E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82678E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.3792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.40947E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.58469E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=5.92641E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.42624E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06566E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6593E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30693E1
cs_fil1_imon=9.95356E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61759E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67427E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72625E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22299E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.03741E-1
res40_imon=-2.59788E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.088E3	1.0E0	1.47E2	4.1E1	-7.25507E-2	-8.8003E1	-5.72205E-4	-8.80008E1	9.53674E-5	4.673E-3	9.55105E-2	2.7357E1	-3.26649E1	-3.26337E1	2.68142E1	1.2212E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02659E-1
2.0E0	1.10755E5	1.09E2	3.16E2	1.6E2	-7.20871E-2	-8.80031E1	-6.4373E-4	-8.80009E1	3.09944E-4	4.95911E-3	9.55343E-2	2.73173E1	-3.26432E1	-3.26242E1	2.68424E1	1.2212E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.99175E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80031E1	-5.24521E-4	-8.80009E1	3.33786E-4	4.57764E-3	9.54866E-2	2.73381E1	-3.26775E1	-3.26305E1	2.68328E1	1.21426E-7	2.52096E-3	2.52096E-3	6.33144E-3	3.004E-1
4.0E0	2.4031E4	1.4E1	6.55E2	3.98E2	-7.17007E-2	-8.8003E1	-5.00679E-4	-8.80006E1	2.38419E-4	4.45843E-3	9.5439E-2	2.73229E1	-3.26623E1	-3.26425E1	2.683E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80031E1	-4.76837E-4	-8.8001E1	6.19888E-4	4.29153E-3	9.57251E-2	2.73111E1	-3.26759E1	-3.2617E1	2.6828E1	1.201E-7	2.51725E-3	2.51725E-3	6.31879E-3	2.9917E-1
6.0E0	0.0E0	2.0E0	9.93E2	6.35E2	-7.26282E-2	-8.8003E1	-6.19888E-4	-8.80012E1	5.24521E-4	4.17233E-3	9.55343E-2	2.73147E1	-3.26561E1	-3.26374E1	2.68855E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.8003E1	-4.76837E-4	-8.80009E1	5.00679E-4	4.57764E-3	9.54866E-2	2.73576E1	-3.26325E1	-3.26296E1	2.6814E1	1.19925E-7	2.52027E-3	2.52027E-3	6.34099E-3	3.02277E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.8003E1	-9.53674E-4	-8.80008E1	8.10623E-4	4.3869E-3	9.55582E-2	2.73189E1	-3.26518E1	-3.26122E1	2.6962E1	1.20517E-7	2.52169E-3	2.52169E-3	6.34518E-3	3.02769E-1
1.2E1	1.3E2	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80031E1	-5.24521E-4	-8.8001E1	4.29153E-4	4.98295E-3	9.54628E-2	2.73016E1	-3.26679E1	-3.25971E1	2.67968E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01609E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.8003E1	-4.76837E-4	-8.80007E1	5.72205E-4	4.64916E-3	9.52721E-2	2.7358E1	-3.27233E1	-3.25587E1	2.6774E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.9943E-1
1.4E1	3.598E3	2.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80027E1	-4.05312E-4	-8.8001E1	5.72205E-4	4.33922E-3	9.52244E-2	2.72925E1	-3.26777E1	-3.26446E1	2.69286E1	1.2033E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.98481E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80031E1	-6.67572E-4	-8.80007E1	6.67572E-4	4.60148E-3	9.54628E-2	2.72985E1	-3.2608E1	-3.26188E1	2.67511E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
1.6E1	4.78E2	1.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80028E1	-7.62939E-4	-8.80011E1	4.52995E-4	4.45843E-3	9.54628E-2	2.73253E1	-3.26897E1	-3.26285E1	2.68827E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
1.7E1	1.102E3	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.8003E1	-7.39098E-4	-8.80006E1	9.53674E-4	4.05312E-3	9.50575E-2	2.73057E1	-3.26461E1	-3.26207E1	2.6817E1	1.19809E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.01871E-1
1.8E1	4.704E3	2.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80032E1	-8.82149E-4	-8.80008E1	8.34465E-4	4.02927E-3	9.51052E-2	2.72992E1	-3.26366E1	-3.26431E1	2.68117E1	1.20174E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.01609E-1
1.9E1	2.318E3	3.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80033E1	-8.10623E-4	-8.80006E1	3.33786E-4	4.12464E-3	9.48906E-2	2.73411E1	-3.26627E1	-3.26212E1	2.68028E1	1.20004E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.0071E-1
2.0E1	2.6701E4	2.1E1	8.08E2	5.58E2	-7.13915E-2	-8.8003E1	-1.09673E-3	-8.80009E1	4.05312E-4	4.14848E-3	9.52005E-2	2.73405E1	-3.26561E1	-3.2584E1	2.6849E1	1.20017E-7	2.52099E-3	2.52099E-3	6.36244E-3	3.01347E-1
2.1E1	4.4E1	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80031E1	-7.86781E-4	-8.80009E1	1.90735E-4	4.62532E-3	9.52721E-2	2.73293E1	-3.26661E1	-3.26573E1	2.68442E1	1.20017E-7	2.52209E-3	2.52209E-3	6.34588E-3	3.00824E-1
2.2E1	1.885E3	3.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80031E1	-1.07288E-3	-8.80007E1	5.24521E-4	4.88758E-3	9.53436E-2	2.73057E1	-3.26122E1	-3.2614E1	2.68401E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00966E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80029E1	-6.4373E-4	-8.80007E1	9.05991E-4	4.64916E-3	9.53674E-2	2.73016E1	-3.26661E1	-3.26331E1	2.68142E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0071E-1