[Scan]
initial_time=2016-01-18T19:04:05
final_time=2016-01-18T19:04:25
ip_count=19
run=1024
dataset=4
scan=302
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.79203E-6
ql1_vset=
ql1_vmon=-8.80033E1
ql1_imon=-6.85322E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.40587E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.2813E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.58699E-8
mult1=-1.73139E-8
mult2=-2.86433E-9
rf_tmon=-3.96567E-3
rf_agc=3.41387E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.97394E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62622E0
bslens_imon=2.26825E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19662E1
lens5a_imon=1.98584E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12556E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.8175E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05189E1
cs_ea1_imon=2.55115E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9483E0
lens1_imon=1.65699E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64845E1
os_ef1alow_imon=2.98941E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0371E1
cs_ea2_imon=1.48827E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84327E1
cs_ef1a_imon=2.93792E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.34367E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11569E1
os_restr1_imon=4.27508E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14456E1
os_ea1_imon=2.33819E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63723E1
os_ef1bup_imon=3.05591E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22549E0
cs_ionrep_imon=1.18965E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91941E2
cs_nozzle_imon=1.93412E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01896E1
cs_anode1_imon=2.99063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=4.0178E-8
tplens_vset=1.4E-1
tplens_vmon=1.63365E0
tplens_imon=-3.63658E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2587E1
iondef3_imon=1.51163E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26921E1
iondef2_imon=1.55757E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03012E2
lens6_imon=2.98186E-4
ql6_vset=1.0E-1
ql6_vmon=9.53436E-2
ql6_imon=9.5309E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30012E0
ionrepsh_imon=1.77755E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33561E1
lens5b_imon=2.16493E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74846E1
cs_ef2b_imon=3.12321E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48245E0
os_ea2_imon=-6.4398E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00595E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71251E1
cs_ef2a_imon=3.14794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07483E0
os_ef2alow_imon=-2.44021E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14317E-1
os_ef2bup_imon=-5.35536E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11414E1
os_restr2_imon=3.44797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.29967E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01856E1
cs_anode2_imon=2.24339E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73688E1
iondef1_imon=1.10088E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68268E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.26943E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.85834E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1592E0
cs_ionaccel_imon=-1.88474E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56263E1
einzel_imon=7.66351E-6
window_vset=0.0E0
window_vmon=2.67498E-1
window_imon=-8.14367E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82693E2
mask1_imon=2.39064E-4
mask2_vset=0.0E0
mask2_vmon=-1.8654E1
mask2_imon=-5.91371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92695E3
multa_neg_imon=6.90523E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.42245E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.52427E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.13714E0
defgridb_imon=6.03311E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33326E1
os_fil1_imon=9.4263E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07714E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65794E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30733E1
cs_fil1_imon=9.94993E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63487E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67241E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42813E-2
os_fil2_imon=-2.68849E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90656E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77389E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37663E-1
cs_fil2_imon=-2.53307E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06188E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2249E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40077E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.83919E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.06E3	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80033E1	-6.91414E-4	-8.80007E1	-7.15256E-5	4.52995E-3	9.50575E-2	2.7328E1	-3.26484E1	-3.26221E1	2.68434E1	1.20092E-7	2.51829E-3	2.51829E-3	6.33161E-3	3.00025E-1
2.0E0	1.10527E5	1.18E2	3.16E2	1.6E2	-7.31692E-2	-8.80033E1	-6.91414E-4	-8.8001E1	1.19209E-4	4.72069E-3	9.50575E-2	2.73505E1	-3.26604E1	-3.26422E1	2.68209E1	1.20016E-7	2.51956E-3	2.51956E-3	6.28194E-3	3.01365E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.8003E1	-7.86781E-4	-8.80008E1	1.43051E-4	4.673E-3	9.51529E-2	2.72856E1	-3.26384E1	-3.2649E1	2.6789E1	1.19738E-7	2.52147E-3	2.52147E-3	6.3074E-3	3.00197E-1
4.0E0	2.4258E4	1.0E1	6.55E2	3.98E2	-7.286E-2	-8.80028E1	-7.39098E-4	-8.80007E1	9.53674E-5	4.93526E-3	9.50098E-2	2.73518E1	-3.2618E1	-3.26249E1	2.68199E1	1.19749E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80035E1	-7.39098E-4	-8.80009E1	2.38419E-4	4.62532E-3	9.52959E-2	2.73163E1	-3.2656E1	-3.26135E1	2.68419E1	1.20113E-7	2.51854E-3	2.51854E-3	6.32273E-3	3.01121E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80033E1	-7.86781E-4	-8.80008E1	4.52995E-4	4.69685E-3	9.53197E-2	2.73315E1	-3.26777E1	-3.26224E1	2.67968E1	1.20337E-7	2.5118E-3	2.5118E-3	6.28423E-3	3.00639E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80034E1	-5.24521E-4	-8.80007E1	5.24521E-4	4.95911E-3	9.56774E-2	2.73159E1	-3.26657E1	-3.26615E1	2.68496E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3514E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80033E1	-6.4373E-4	-8.80008E1	1.43051E-4	4.57764E-3	9.5582E-2	2.73333E1	-3.26687E1	-3.26158E1	2.67692E1	1.20122E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02133E-1
1.2E1	9.2E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80034E1	-5.96046E-4	-8.80008E1	2.86102E-4	4.76837E-3	9.5129E-2	2.73161E1	-3.26566E1	-3.26254E1	2.6831E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.8003E1	-4.76837E-4	-8.80007E1	4.52995E-4	4.673E-3	9.52482E-2	2.73334E1	-3.26514E1	-3.26667E1	2.6843E1	1.20069E-7	2.51662E-3	2.51662E-3	6.34588E-3	2.9926E-1
1.4E1	3.623E3	2.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80031E1	-4.76837E-4	-8.80006E1	4.76837E-4	4.64916E-3	9.52244E-2	2.73472E1	-3.26879E1	-3.26152E1	2.68453E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9926E-1
1.5E1	1.09E2	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80031E1	-5.72205E-4	-8.80011E1	1.90735E-4	4.673E-3	9.54151E-2	2.73237E1	-3.26759E1	-3.26212E1	2.68466E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
1.6E1	4.59E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80029E1	-7.86781E-4	-8.80009E1	4.52995E-4	4.64916E-3	9.53436E-2	2.7324E1	-3.26608E1	-3.26001E1	2.68256E1	1.20209E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.01738E-1
1.7E1	1.097E3	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80029E1	-7.15256E-4	-8.8001E1	4.76837E-4	4.14848E-3	9.50813E-2	2.73153E1	-3.26681E1	-3.26344E1	2.67962E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02659E-1
1.8E1	4.905E3	1.0E0	7.27E2	5.0E2	-7.25507E-2	-8.8003E1	-6.91414E-4	-8.80009E1	-9.53674E-5	4.86374E-3	9.53197E-2	2.72811E1	-3.26344E1	-3.26128E1	2.68232E1	1.19965E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.01609E-1
1.9E1	2.25E3	1.0E0	7.68E2	5.29E2	-7.26282E-2	-8.8003E1	-7.15256E-4	-8.80008E1	4.29153E-4	4.48227E-3	9.53197E-2	2.73225E1	-3.26314E1	-3.25611E1	2.68412E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02922E-1
2.0E1	2.7162E4	2.4E1	8.08E2	5.58E2	-7.25507E-2	-8.80034E1	-3.57628E-4	-8.80008E1	2.38419E-4	4.72069E-3	9.51767E-2	2.7358E1	-3.26825E1	-3.26092E1	2.68268E1	1.19749E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00453E-1
2.1E1	4.8E1	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80032E1	-7.86781E-4	-8.80007E1	5.00679E-4	4.8399E-3	9.54151E-2	2.73246E1	-3.26514E1	-3.2639E1	2.68334E1	1.20084E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.99879E-1
2.2E1	1.841E3	1.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80033E1	-5.00679E-4	-8.80008E1	8.58307E-4	4.74453E-3	9.53197E-2	2.73375E1	-3.26422E1	-3.262E1	2.68615E1	1.19953E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00453E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80033E1	-6.67572E-4	-8.8001E1	7.39098E-4	4.88758E-3	9.53436E-2	2.73688E1	-3.26921E1	-3.2587E1	2.68268E1	1.19757E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.02396E-1