[Scan]
initial_time=2016-01-18T19:04:59
final_time=2016-01-18T19:05:19
ip_count=19
run=1024
dataset=4
scan=304
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.85965E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-7.06553E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.37768E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.33839E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.58731E-8
mult1=-1.77474E-8
mult2=-2.81842E-9
rf_tmon=-5.24543E-3
rf_agc=3.2919E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=5.75173E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.43321E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19454E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=2.82989E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.01984E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=2.52886E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00771E0
lens1_imon=1.50674E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.51371E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.92468E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.34392E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=4.26067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14867E1
os_ea1_imon=2.36484E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22927E0
cs_ionrep_imon=1.20404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91958E2
cs_nozzle_imon=1.93644E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.9863E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=4.02259E-8
tplens_vset=1.4E-1
tplens_vmon=1.64804E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26182E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.56418E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03007E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.53436E-2
ql6_imon=9.55665E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27613E0
ionrepsh_imon=1.79525E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33429E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51226E0
os_ea2_imon=-9.26608E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71456E1
cs_ef2a_imon=3.15605E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05816E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10038E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11568E1
os_restr2_imon=3.42743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.28486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.25362E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73309E1
iondef1_imon=1.0858E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.27006E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.83139E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47338E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.45574E-1
window_imon=-7.49045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82684E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=8.28765E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=6.2112E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50078E3
multb_neg_imon=7.57748E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48578E0
defgridb_imon=6.00932E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.4448E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07077E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65866E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30701E1
cs_fil1_imon=9.95603E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62642E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67483E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55092E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73785E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22489E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.2212E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32573E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.25E3	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80034E1	-5.72205E-4	-8.80007E1	4.52995E-4	4.19617E-3	9.54628E-2	2.73625E1	-3.26677E1	-3.26266E1	2.68364E1	1.20209E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00453E-1
2.0E0	1.10479E5	1.15E2	3.16E2	1.6E2	-7.33239E-2	-8.80033E1	-6.67572E-4	-8.80008E1	4.52995E-4	4.31538E-3	9.5439E-2	2.73063E1	-3.26747E1	-3.26597E1	2.68448E1	1.19851E-7	2.5131E-3	2.5131E-3	6.34518E-3	2.9892E-1
3.0E0	2.8E1	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80032E1	-5.24521E-4	-8.80008E1	3.09944E-4	4.31538E-3	9.57012E-2	2.73578E1	-3.26422E1	-3.26376E1	2.68383E1	1.19925E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.00942E-1
4.0E0	2.4009E4	1.2E1	6.55E2	3.98E2	-7.24736E-2	-8.80034E1	-2.86102E-4	-8.80008E1	6.4373E-4	4.36306E-3	9.54151E-2	2.7308E1	-3.26644E1	-3.26248E1	2.68671E1	1.20192E-7	2.52025E-3	2.52025E-3	6.32858E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80031E1	-7.86781E-4	-8.80009E1	5.72205E-4	4.48227E-3	9.55343E-2	2.73021E1	-3.26386E1	-3.26236E1	2.6831E1	1.19851E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.03545E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80033E1	-6.91414E-4	-8.8001E1	6.67572E-4	4.24385E-3	9.51767E-2	2.73175E1	-3.26366E1	-3.26549E1	2.6836E1	1.19601E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80031E1	-7.15256E-4	-8.8001E1	6.19888E-4	4.52995E-3	9.51767E-2	2.73267E1	-3.26512E1	-3.26494E1	2.68358E1	1.19697E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80034E1	-1.00136E-3	-8.80008E1	4.52995E-4	4.43459E-3	9.51767E-2	2.73225E1	-3.26747E1	-3.26554E1	2.68887E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9952E-1
1.2E1	1.1E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80035E1	-9.29832E-4	-8.80007E1	7.39098E-4	4.74453E-3	9.5129E-2	2.73175E1	-3.26785E1	-3.26467E1	2.68743E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01871E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.13143E-2	-8.80033E1	-6.19888E-4	-8.80008E1	7.15256E-4	4.64916E-3	9.52721E-2	2.73254E1	-3.26497E1	-3.25958E1	2.6844E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.03712E-1
1.4E1	3.367E3	1.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80032E1	-5.72205E-4	-8.80009E1	7.39098E-4	4.14848E-3	9.55582E-2	2.73271E1	-3.26407E1	-3.26236E1	2.68322E1	1.20003E-7	2.51423E-3	2.51423E-3	6.3074E-3	3.00771E-1
1.5E1	1.14E2	0.0E0	6.06E2	4.11E2	-7.13915E-2	-8.80034E1	-5.24521E-4	-8.80012E1	2.86102E-4	4.33922E-3	9.5129E-2	2.73582E1	-3.26585E1	-3.26101E1	2.68016E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
1.6E1	4.81E2	0.0E0	6.47E2	4.41E2	-7.13143E-2	-8.80035E1	-9.05991E-4	-8.80012E1	6.19888E-4	4.3869E-3	9.52482E-2	2.72812E1	-3.26444E1	-3.26542E1	2.68803E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
1.7E1	1.102E3	1.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80034E1	-8.34465E-4	-8.80011E1	1.90735E-4	4.3869E-3	9.51052E-2	2.73352E1	-3.26649E1	-3.26113E1	2.68208E1	1.19757E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.01085E-1
1.8E1	4.681E3	4.0E0	7.27E2	5.0E2	-7.10825E-2	-8.80032E1	-6.19888E-4	-8.80013E1	5.24521E-4	4.43459E-3	9.52005E-2	2.72984E1	-3.26627E1	-3.26315E1	2.6846E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01609E-1
1.9E1	2.23E3	5.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80032E1	-8.10623E-4	-8.80013E1	3.09944E-4	4.43459E-3	9.54628E-2	2.72231E1	-3.25369E1	-3.26478E1	2.68538E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.02659E-1
2.0E1	2.7148E4	1.6E1	8.08E2	5.58E2	-7.13915E-2	-8.80035E1	-6.4373E-4	-8.80013E1	9.53674E-5	4.64916E-3	9.57966E-2	2.73622E1	-3.27035E1	-3.26086E1	2.68482E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
2.1E1	6.9E1	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80035E1	-6.67572E-4	-8.80012E1	0.0E0	4.76837E-3	9.52244E-2	2.73182E1	-3.26846E1	-3.25754E1	2.68041E1	1.20774E-7	2.52492E-3	2.52492E-3	6.29128E-3	3.02253E-1
2.2E1	1.88E3	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80034E1	-5.96046E-4	-8.80009E1	7.15256E-5	4.48227E-3	9.53913E-2	2.73393E1	-3.26573E1	-3.26092E1	2.68635E1	1.2207E-7	2.51886E-3	2.51886E-3	6.323E-3	3.01981E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.8003E1	-7.39098E-4	-8.80013E1	1.90735E-4	4.22001E-3	9.53436E-2	2.73309E1	-3.26705E1	-3.26182E1	2.6819E1	1.2212E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.02396E-1