[Scan]
initial_time=2016-01-18T19:05:26
final_time=2016-01-18T19:05:46
ip_count=19
run=1024
dataset=4
scan=305
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.83744E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-7.24363E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.3852E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.28531E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.59179E-8
mult1=-2.40617E-8
mult2=-2.85615E-9
rf_tmon=-4.23389E-3
rf_agc=3.40079E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=5.79441E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19833E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=2.83494E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05288E1
cs_ea1_imon=2.53932E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08642E0
lens1_imon=1.70501E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03558E1
cs_ea2_imon=1.49712E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.94378E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.34829E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.26139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=2.35366E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63365E1
os_ef1bup_imon=3.06992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21905E0
cs_ionrep_imon=1.19972E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.97982E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=4.00987E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26456E1
iondef3_imon=1.50253E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26487E1
iondef2_imon=1.5548E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03018E2
lens6_imon=2.98104E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=9.48143E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23768E0
ionrepsh_imon=1.78768E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33375E1
lens5b_imon=2.18747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53809E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00475E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71516E1
cs_ef2a_imon=3.16758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.35641E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.20249E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11454E1
os_restr2_imon=3.41986E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.2946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.22695E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72788E1
iondef1_imon=1.13699E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.30337E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.83883E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15537E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.87164E-6
window_vset=0.0E0
window_vmon=2.67197E-1
window_imon=-7.85084E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82677E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92471E3
multa_neg_imon=8.98341E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93646E3
defgrida_imon=8.24439E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50038E3
multb_neg_imon=4.76201E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55796E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.43057E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06867E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66011E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30698E1
cs_fil1_imon=9.95032E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62624E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67094E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72238E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22322E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.50883E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=184
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.194E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80027E1	-4.76837E-4	-8.8001E1	4.05312E-4	4.33922E-3	9.54866E-2	2.73718E1	-3.26703E1	-3.26172E1	2.6818E1	1.2212E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
2.0E0	1.10921E5	1.07E2	3.16E2	1.6E2	-7.29374E-2	-8.80026E1	-2.38419E-4	-8.80011E1	2.38419E-5	4.69685E-3	9.54866E-2	2.73308E1	-3.26542E1	-3.26432E1	2.68344E1	1.22068E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80027E1	-3.09944E-4	-8.8001E1	5.00679E-4	4.45843E-3	9.5582E-2	2.73271E1	-3.267E1	-3.26104E1	2.68505E1	1.21851E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.00676E-1
4.0E0	2.4165E4	5.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80028E1	-3.09944E-4	-8.80009E1	3.57628E-4	4.57764E-3	9.56297E-2	2.73381E1	-3.26524E1	-3.26452E1	2.68538E1	1.20293E-7	2.52342E-3	2.52342E-3	6.29157E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80029E1	-5.72205E-4	-8.80009E1	6.19888E-4	4.50611E-3	9.55105E-2	2.73291E1	-3.26849E1	-3.26068E1	2.68496E1	1.21697E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.8003E1	-2.6226E-4	-8.80013E1	4.29153E-4	4.60148E-3	9.56774E-2	2.73159E1	-3.26639E1	-3.25888E1	2.68821E1	1.21644E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80034E1	-1.66893E-4	-8.8001E1	3.33786E-4	4.57764E-3	9.55105E-2	2.73027E1	-3.26338E1	-3.26014E1	2.67998E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80032E1	-5.24521E-4	-8.80008E1	8.10623E-4	4.74453E-3	9.53674E-2	2.73051E1	-3.26843E1	-3.2593E1	2.68148E1	1.20278E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.00824E-1
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.80033E1	-5.72205E-4	-8.80007E1	5.48363E-4	4.57764E-3	9.55105E-2	2.73231E1	-3.26585E1	-3.26086E1	2.68322E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02922E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80033E1	-4.52995E-4	-8.80007E1	6.91414E-4	4.36306E-3	9.55582E-2	2.73622E1	-3.26765E1	-3.25821E1	2.68292E1	1.20278E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01347E-1
1.4E1	3.482E3	3.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80031E1	-3.8147E-4	-8.80011E1	5.48363E-4	4.19617E-3	9.55582E-2	2.73865E1	-3.26732E1	-3.25894E1	2.68501E1	1.2033E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
1.5E1	1.06E2	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80032E1	-7.39098E-4	-8.8001E1	4.29153E-4	4.62532E-3	9.57966E-2	2.73904E1	-3.26579E1	-3.26182E1	2.68577E1	1.198E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9943E-1
1.6E1	5.03E2	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80029E1	-4.29153E-4	-8.80011E1	6.19888E-4	4.07696E-3	9.56059E-2	2.73472E1	-3.26597E1	-3.26074E1	2.68082E1	1.19861E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.02133E-1
1.7E1	1.07E3	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.8003E1	-4.76837E-4	-8.80009E1	4.76837E-5	4.52995E-3	9.5439E-2	2.73257E1	-3.26585E1	-3.26354E1	2.6807E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
1.8E1	4.647E3	6.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80028E1	-4.76837E-4	-8.80006E1	4.05312E-4	4.52995E-3	9.5439E-2	2.73712E1	-3.26831E1	-3.25821E1	2.68448E1	1.19757E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.03185E-1
1.9E1	2.413E3	5.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80029E1	-3.8147E-4	-8.80006E1	2.6226E-4	4.72069E-3	9.52959E-2	2.73736E1	-3.26326E1	-3.25894E1	2.68605E1	1.19953E-7	2.51632E-3	2.51632E-3	6.35059E-3	2.99941E-1
2.0E1	2.6465E4	1.6E1	8.08E2	5.58E2	-7.31692E-2	-8.80028E1	-3.8147E-4	-8.80009E1	6.4373E-4	4.673E-3	9.55582E-2	2.73393E1	-3.26705E1	-3.26194E1	2.68196E1	1.20907E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00563E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80032E1	-5.72205E-4	-8.80012E1	4.29153E-4	4.3869E-3	9.55582E-2	2.73222E1	-3.26467E1	-3.2603E1	2.67995E1	1.20592E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.9952E-1
2.2E1	1.956E3	1.0E0	8.89E2	6.17E2	-7.32464E-2	-8.8003E1	-3.8147E-4	-8.80009E1	7.15256E-4	4.26769E-3	9.56297E-2	2.73381E1	-3.26472E1	-3.25853E1	2.6822E1	1.21083E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9943E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.8003E1	-5.72205E-4	-8.80007E1	2.86102E-4	4.3869E-3	9.54628E-2	2.72788E1	-3.26487E1	-3.26456E1	2.68202E1	1.20311E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99175E-1