[Scan]
initial_time=2016-01-18T19:05:53
final_time=2016-01-18T19:06:13
ip_count=19
run=1024
dataset=4
scan=306
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.78775E-6
ql1_vset=
ql1_vmon=-8.80036E1
ql1_imon=-7.20191E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.41288E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.32226E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.59213E-8
mult1=-1.91441E-8
mult2=-2.86433E-9
rf_tmon=-3.90559E-3
rf_agc=3.44271E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.70059E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64498E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19683E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5398E1
cs_ef1b_imon=2.8376E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0431E1
cs_ea1_imon=2.51707E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00705E0
lens1_imon=1.73981E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=2.98252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.50869E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84522E1
cs_ef1a_imon=2.93734E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.34821E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11488E1
os_restr1_imon=4.25516E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14804E1
os_ea1_imon=2.34541E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.06662E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25741E0
cs_ionrep_imon=1.18554E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=2.98426E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=4.01268E-8
tplens_vset=1.4E-1
tplens_vmon=1.70278E0
tplens_imon=-8.65226E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26062E1
iondef3_imon=1.50905E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03005E2
lens6_imon=2.98017E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=9.29296E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3223E0
ionrepsh_imon=1.80069E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33398E1
lens5b_imon=2.1826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74617E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5848E0
os_ea2_imon=-7.51931E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7131E1
cs_ef2a_imon=3.17053E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06209E0
os_ef2alow_imon=-2.49118E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96652E-1
os_ef2bup_imon=-5.22968E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11361E1
os_restr2_imon=3.42283E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.26176E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.2482E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73424E1
iondef1_imon=1.09741E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69085E1
iondef4_imon=1.09198E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.28674E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.83373E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12319E0
cs_ionaccel_imon=-1.8274E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47247E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5622E1
einzel_imon=7.65656E-6
window_vset=0.0E0
window_vmon=2.46067E-1
window_imon=-7.74401E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82715E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-7.11847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=1.00857E-4
defgrida_vset=2.902E3
defgrida_vmon=2.9386E3
defgrida_imon=5.06332E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.4982E3
multb_neg_imon=1.03016E-4
defgridb_vset=0.0E0
defgridb_vmon=-1.59159E0
defgridb_imon=5.79597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.42443E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07167E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65912E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30695E1
cs_fil1_imon=9.94966E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62679E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67132E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4332E-2
os_fil2_imon=-2.62864E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64202E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-2.77924E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.45077E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2239E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.50518E-1
res40_imon=-2.46685E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.156E3	4.0E0	1.47E2	4.1E1	-7.16233E-2	-8.80034E1	-4.05312E-4	-8.8001E1	7.15256E-5	4.52995E-3	9.52244E-2	2.73134E1	-3.26844E1	-3.26183E1	2.68046E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00966E-1
2.0E0	1.10359E5	9.9E1	3.16E2	1.6E2	-7.13915E-2	-8.80032E1	-7.39098E-4	-8.8001E1	1.90735E-4	4.41074E-3	9.53674E-2	2.73375E1	-3.26474E1	-3.26358E1	2.68142E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9943E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80031E1	-4.76837E-4	-8.80008E1	5.72205E-4	4.3869E-3	9.52959E-2	2.73841E1	-3.26437E1	-3.25942E1	2.68667E1	1.20084E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.00144E-1
4.0E0	2.3906E4	1.0E1	6.55E2	3.98E2	-7.23189E-2	-8.80029E1	-5.00679E-4	-8.8001E1	4.52995E-4	4.36306E-3	9.54866E-2	2.73435E1	-3.26693E1	-3.26458E1	2.68148E1	1.20243E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80032E1	-3.33786E-4	-8.80009E1	5.24521E-4	4.50611E-3	9.52482E-2	2.72997E1	-3.26909E1	-3.26699E1	2.68611E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80031E1	-3.8147E-4	-8.80009E1	4.52995E-4	4.22001E-3	9.54151E-2	2.73181E1	-3.26455E1	-3.26402E1	2.68791E1	1.20017E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10051E-2	-8.8003E1	-4.05312E-4	-8.80011E1	1.19209E-4	4.57764E-3	9.52959E-2	2.73161E1	-3.26089E1	-3.2607E1	2.68737E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80029E1	-7.86781E-4	-8.80008E1	-2.38419E-5	4.57764E-3	9.54628E-2	2.73207E1	-3.26452E1	-3.26146E1	2.67986E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
1.2E1	1.24E2	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80033E1	-6.19888E-4	-8.8001E1	4.52995E-4	4.24385E-3	9.52721E-2	2.72829E1	-3.26464E1	-3.26296E1	2.68112E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00563E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80033E1	-9.29832E-4	-8.80009E1	5.00679E-4	4.33922E-3	9.54151E-2	2.72997E1	-3.26789E1	-3.26398E1	2.68659E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.02133E-1
1.4E1	3.57E3	2.0E0	5.66E2	3.82E2	-7.21643E-2	-8.8003E1	-7.15256E-4	-8.8001E1	2.38419E-4	4.60148E-3	9.54866E-2	2.72817E1	-3.26609E1	-3.262E1	2.68202E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.04241E-1
1.5E1	9.4E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80032E1	-5.00679E-4	-8.8001E1	6.67572E-4	4.62532E-3	9.54151E-2	2.72739E1	-3.26621E1	-3.26158E1	2.68665E1	1.19965E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.9926E-1
1.6E1	5.01E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80032E1	-7.86781E-4	-8.80009E1	6.4373E-4	4.93526E-3	9.53913E-2	2.72647E1	-3.26135E1	-3.26442E1	2.68511E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00563E-1
1.7E1	1.125E3	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80032E1	-9.77516E-4	-8.80008E1	4.52995E-4	4.72069E-3	9.52959E-2	2.74082E1	-3.26623E1	-3.26069E1	2.68151E1	1.20127E-7	2.51679E-3	2.51679E-3	6.30221E-3	3.0223E-1
1.8E1	4.762E3	1.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80037E1	-6.4373E-4	-8.80011E1	1.90735E-4	4.57764E-3	9.53197E-2	2.73213E1	-3.27245E1	-3.2626E1	2.68364E1	1.1995E-7	2.51527E-3	2.51527E-3	6.3016E-3	3.02303E-1
1.9E1	2.222E3	1.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80034E1	-6.67572E-4	-8.80011E1	1.90735E-4	4.8399E-3	9.52005E-2	2.73279E1	-3.26861E1	-3.26392E1	2.68583E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
2.0E1	2.675E4	1.5E1	8.08E2	5.58E2	-7.23964E-2	-8.80032E1	-5.24521E-4	-8.80012E1	3.33786E-4	4.55379E-3	9.53436E-2	2.73906E1	-3.26856E1	-3.25588E1	2.68599E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.99E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80032E1	-5.24521E-4	-8.80012E1	2.14577E-4	4.45843E-3	9.53436E-2	2.73694E1	-3.2648E1	-3.26052E1	2.68505E1	1.20174E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9874E-1
2.2E1	1.942E3	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80031E1	-5.24521E-4	-8.8001E1	1.19209E-4	4.12464E-3	9.53436E-2	2.74253E1	-3.26284E1	-3.26338E1	2.67764E1	1.19891E-7	2.52236E-3	2.52236E-3	6.3074E-3	2.99845E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80036E1	-5.72205E-4	-8.80008E1	9.53674E-5	4.76837E-3	9.54628E-2	2.73424E1	-3.26915E1	-3.26062E1	2.69085E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01995E-1