[Scan]
initial_time=2016-01-18T19:06:20
final_time=2016-01-18T19:06:40
ip_count=19
run=1024
dataset=4
scan=307
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.81551E-6
ql1_vset=
ql1_vmon=-8.80037E1
ql1_imon=-6.99604E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.37398E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.26721E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.58927E-8
mult1=-1.55402E-8
mult2=-2.77813E-9
rf_tmon=-5.61259E-3
rf_agc=3.25717E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.79476E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67329E0
bslens_imon=2.58573E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19647E1
lens5a_imon=2.0074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=2.84287E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04665E2
lens23_imon=1.0244E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04274E1
cs_ea1_imon=2.54999E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04481E0
lens1_imon=1.06379E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04203E1
cs_ea2_imon=1.4825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84953E1
cs_ef1a_imon=2.93152E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.34652E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.2704E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14562E1
os_ea1_imon=2.35886E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19842E0
cs_ionrep_imon=1.20183E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91986E2
cs_nozzle_imon=1.93763E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02224E1
cs_anode1_imon=2.99207E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=4.0312E-8
tplens_vset=1.4E-1
tplens_vmon=1.67447E0
tplens_imon=-3.30742E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26178E1
iondef3_imon=1.48356E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26608E1
iondef2_imon=1.55718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03031E2
lens6_imon=2.98275E-4
ql6_vset=1.0E-1
ql6_vmon=9.54151E-2
ql6_imon=9.24063E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=1.78016E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.18578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74207E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49101E0
os_ea2_imon=-6.4221E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.0035E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71498E1
cs_ef2a_imon=3.15173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.39966E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04031E-1
os_ef2bup_imon=-5.48105E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11147E1
os_restr2_imon=3.42274E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.27309E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01551E1
cs_anode2_imon=2.25938E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7278E1
iondef1_imon=1.11476E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.2953E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.88047E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-1.72212E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02117E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.64795E-1
window_imon=-8.60768E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82716E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-4.28292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92566E3
multa_neg_imon=8.93543E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.2384E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.49962E3
multb_neg_imon=7.88069E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.72151E0
defgridb_imon=5.74642E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33319E1
os_fil1_imon=9.42168E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06098E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65856E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30736E1
cs_fil1_imon=9.95308E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63159E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67434E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33189E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05523E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69264E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70684E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22461E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13351E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.166E3	1.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80034E1	-5.96046E-4	-8.80007E1	5.48363E-4	4.3869E-3	9.58681E-2	2.73442E1	-3.26494E1	-3.26506E1	2.68304E1	1.20106E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.02511E-1
2.0E0	1.09725E5	1.1E2	3.16E2	1.6E2	-7.18554E-2	-8.80031E1	-6.67572E-4	-8.80009E1	5.72205E-4	4.74453E-3	9.58681E-2	2.72871E1	-3.26404E1	-3.2641E1	2.68839E1	1.20226E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.8003E1	-5.72205E-4	-8.80008E1	5.24521E-4	4.79221E-3	9.54151E-2	2.73746E1	-3.26538E1	-3.26486E1	2.67955E1	1.20069E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.98481E-1
4.0E0	2.422E4	1.6E1	6.55E2	3.98E2	-7.24736E-2	-8.80032E1	-3.8147E-4	-8.8001E1	6.4373E-4	4.48227E-3	9.56297E-2	2.73446E1	-3.26974E1	-3.26183E1	2.68569E1	1.20092E-7	2.51603E-3	2.51603E-3	6.29157E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80031E1	-3.8147E-4	-8.80009E1	5.24521E-4	4.60148E-3	9.53197E-2	2.72709E1	-3.26476E1	-3.2617E1	2.68188E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80031E1	-4.05312E-4	-8.80007E1	9.29832E-4	4.45843E-3	9.53674E-2	2.72961E1	-3.2605E1	-3.26609E1	2.68442E1	1.20031E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.01475E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.8003E1	-4.76837E-4	-8.80009E1	6.91414E-4	4.86374E-3	9.56774E-2	2.73075E1	-3.26343E1	-3.26331E1	2.68175E1	1.20004E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.8003E1	-5.00679E-4	-8.80008E1	5.48363E-4	4.88758E-3	9.54866E-2	2.73222E1	-3.26658E1	-3.26199E1	2.68154E1	1.2026E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99175E-1
1.2E1	1.17E2	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80033E1	-5.96046E-4	-8.80007E1	4.52995E-4	4.86374E-3	9.54866E-2	2.73345E1	-3.26518E1	-3.25671E1	2.68538E1	1.20084E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.01475E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80033E1	-5.48363E-4	-8.80011E1	5.48363E-4	4.36306E-3	9.53197E-2	2.73706E1	-3.27408E1	-3.25912E1	2.68376E1	1.19809E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00302E-1
1.4E1	3.53E3	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80032E1	-2.14577E-4	-8.80011E1	4.52995E-4	4.52995E-3	9.5439E-2	2.73111E1	-3.2641E1	-3.2626E1	2.68797E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.5E1	1.04E2	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80033E1	-3.8147E-4	-8.80011E1	3.09944E-4	4.79221E-3	9.52959E-2	2.73538E1	-3.26639E1	-3.26014E1	2.68094E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.6E1	5.35E2	1.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80029E1	-3.57628E-4	-8.80011E1	3.57628E-4	4.93526E-3	9.5129E-2	2.73399E1	-3.26446E1	-3.25966E1	2.68412E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
1.7E1	1.107E3	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80033E1	-3.33786E-4	-8.80012E1	5.24521E-4	4.76837E-3	9.52244E-2	2.7397E1	-3.26903E1	-3.26092E1	2.68226E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00563E-1
1.8E1	4.831E3	7.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80032E1	-9.53674E-5	-8.80012E1	5.96046E-4	4.43459E-3	9.5129E-2	2.73069E1	-3.26797E1	-3.26602E1	2.67932E1	1.2033E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
1.9E1	2.292E3	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80035E1	-4.52995E-4	-8.80013E1	4.05312E-4	5.26905E-3	9.51529E-2	2.72968E1	-3.26461E1	-3.26614E1	2.68725E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00966E-1
2.0E1	2.6419E4	1.0E1	8.08E2	5.58E2	-7.32464E-2	-8.80035E1	-7.39098E-4	-8.80013E1	2.14577E-4	5.07832E-3	9.52959E-2	2.73718E1	-3.26567E1	-3.25761E1	2.68204E1	1.19697E-7	2.52384E-3	2.52384E-3	6.29128E-3	3.01223E-1
2.1E1	5.1E1	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80034E1	-9.53674E-4	-8.8001E1	2.14577E-4	4.98295E-3	9.56059E-2	2.73741E1	-3.26526E1	-3.26343E1	2.67989E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
2.2E1	1.959E3	2.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80034E1	-5.48363E-4	-8.80015E1	-9.53674E-5	4.86374E-3	9.56774E-2	2.73535E1	-3.27233E1	-3.25881E1	2.68629E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80037E1	-5.24521E-4	-8.80013E1	2.6226E-4	4.52995E-3	9.54151E-2	2.7278E1	-3.26608E1	-3.26178E1	2.68136E1	1.20226E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00824E-1