[Scan]
initial_time=2016-01-18T19:06:47
final_time=2016-01-18T19:07:07
ip_count=19
run=1024
dataset=4
scan=308
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.85729E-6
ql1_vset=
ql1_vmon=-8.80035E1
ql1_imon=-7.19094E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.38166E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.24545E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.58933E-8
mult1=-1.61941E-8
mult2=-2.76652E-9
rf_tmon=-5.09523E-3
rf_agc=3.23002E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.8434E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64911E0
bslens_imon=2.37337E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19801E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53814E1
cs_ef1b_imon=2.83782E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.0227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04699E1
cs_ea1_imon=2.51353E-5
lens1_vset=-2.7E0
lens1_vmon=-2.85191E0
lens1_imon=1.54514E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.96432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03372E1
cs_ea2_imon=1.5002E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.94125E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.3557E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1173E1
os_restr1_imon=4.26571E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.36664E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22378E0
cs_ionrep_imon=1.18873E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91965E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=2.97874E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=4.03569E-8
tplens_vset=1.4E-1
tplens_vmon=1.64792E0
tplens_imon=-3.97991E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.51188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.5586E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03024E2
lens6_imon=2.98105E-4
ql6_vset=1.0E-1
ql6_vmon=9.52959E-2
ql6_imon=9.14145E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30224E0
ionrepsh_imon=1.7607E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34071E1
lens5b_imon=2.16985E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74934E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51047E0
os_ea2_imon=-5.71422E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00485E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.17335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03053E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11394E1
os_restr2_imon=3.43968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.28265E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.24677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7349E1
iondef1_imon=1.07158E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68818E1
iondef4_imon=1.09422E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.29391E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.86836E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14456E0
cs_ionaccel_imon=-1.76176E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56657E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.72603E-1
window_imon=-8.03104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82693E2
mask1_imon=2.38861E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92846E3
multa_neg_imon=5.58007E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9383E3
defgrida_imon=5.20489E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50275E3
multb_neg_imon=7.21528E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22543E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.41135E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06831E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66091E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3072E1
cs_fil1_imon=9.94419E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63255E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67618E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48385E-2
os_fil2_imon=-2.79811E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63316E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.65395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22609E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.00738E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.219E3	1.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80033E1	-2.86102E-4	-8.80008E1	-4.76837E-5	4.24385E-3	9.54866E-2	2.73629E1	-3.26862E1	-3.26048E1	2.6847E1	1.20278E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9926E-1
2.0E0	1.09819E5	1.18E2	3.16E2	1.6E2	-7.26282E-2	-8.80032E1	-5.48363E-4	-8.8001E1	6.19888E-4	4.74453E-3	9.55582E-2	2.73247E1	-3.26878E1	-3.26327E1	2.68466E1	1.20243E-7	2.51919E-3	2.51919E-3	6.29684E-3	3.00097E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80033E1	-5.96046E-4	-8.80005E1	4.52995E-4	4.86374E-3	9.57012E-2	2.72526E1	-3.26561E1	-3.26815E1	2.68556E1	1.20084E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.00942E-1
4.0E0	2.4083E4	1.3E1	6.55E2	3.98E2	-7.34782E-2	-8.80034E1	-5.00679E-4	-8.80008E1	1.43051E-4	4.52995E-3	9.52482E-2	2.73252E1	-3.26455E1	-3.2639E1	2.68406E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80031E1	-3.57628E-4	-8.80009E1	5.24521E-4	4.57764E-3	9.54151E-2	2.73237E1	-3.26777E1	-3.2632E1	2.68401E1	1.20106E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80031E1	-4.29153E-4	-8.80009E1	2.38419E-4	4.36306E-3	9.56774E-2	2.73159E1	-3.26639E1	-3.26074E1	2.686E1	1.20017E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80031E1	-5.24521E-4	-8.80009E1	5.72205E-4	4.31538E-3	9.5439E-2	2.73417E1	-3.26573E1	-3.26104E1	2.68151E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.8003E1	-8.10623E-4	-8.8001E1	3.33786E-4	4.45843E-3	9.56774E-2	2.72901E1	-3.26386E1	-3.2617E1	2.68238E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80033E1	-5.72205E-4	-8.80007E1	6.19888E-4	4.36306E-3	9.55343E-2	2.73034E1	-3.26534E1	-3.26366E1	2.68412E1	1.2033E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00824E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80032E1	-9.29832E-4	-8.80011E1	4.52995E-4	4.12464E-3	9.55582E-2	2.73089E1	-3.2612E1	-3.26845E1	2.68127E1	1.19773E-7	2.51956E-3	2.51956E-3	6.32784E-3	3.00635E-1
1.4E1	3.445E3	2.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80033E1	-7.86781E-4	-8.80008E1	3.8147E-4	4.673E-3	9.5582E-2	2.73688E1	-3.26536E1	-3.26014E1	2.68484E1	1.20116E-7	2.51527E-3	2.51527E-3	6.3074E-3	3.00363E-1
1.5E1	1.17E2	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80033E1	-5.72205E-4	-8.80009E1	2.38419E-4	4.76837E-3	9.54628E-2	2.72845E1	-3.26756E1	-3.26413E1	2.68052E1	1.20226E-7	2.51771E-3	2.51771E-3	6.27461E-3	3.01085E-1
1.6E1	5.02E2	1.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80035E1	-2.14577E-4	-8.8001E1	1.66893E-4	4.24385E-3	9.5582E-2	2.73253E1	-3.2648E1	-3.26217E1	2.68725E1	1.20055E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00966E-1
1.7E1	1.125E3	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80036E1	-1.43051E-4	-8.80006E1	6.67572E-4	4.57764E-3	9.55105E-2	2.73529E1	-3.2688E1	-3.26178E1	2.68178E1	1.20244E-7	2.52027E-3	2.52027E-3	6.32418E-3	2.9829E-1
1.8E1	4.784E3	1.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80034E1	-4.76837E-4	-8.80008E1	3.09944E-4	4.36306E-3	9.57251E-2	2.73039E1	-3.26511E1	-3.26236E1	2.68653E1	1.19902E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.9892E-1
1.9E1	2.253E3	4.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80034E1	-4.29153E-4	-8.80007E1	5.72205E-4	4.57764E-3	9.5439E-2	2.73279E1	-3.26957E1	-3.26314E1	2.68593E1	1.20244E-7	2.51136E-3	2.51136E-3	6.32418E-3	2.98819E-1
2.0E1	2.6708E4	2.5E1	8.08E2	5.58E2	-7.23189E-2	-8.80033E1	-5.00679E-4	-8.8001E1	4.76837E-4	4.79221E-3	9.5582E-2	2.72833E1	-3.26679E1	-3.26354E1	2.68209E1	1.20069E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00563E-1
2.1E1	6.3E1	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80034E1	-4.05312E-4	-8.8001E1	5.72205E-4	4.52995E-3	9.53674E-2	2.73323E1	-3.26289E1	-3.26191E1	2.68202E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.98156E-1
2.2E1	1.905E3	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80032E1	-3.33786E-4	-8.80008E1	4.29153E-4	4.79221E-3	9.52244E-2	2.73063E1	-3.26801E1	-3.25984E1	2.6807E1	1.20192E-7	2.51182E-3	2.51182E-3	6.3074E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80035E1	-5.24521E-4	-8.80011E1	4.05312E-4	4.62532E-3	9.52959E-2	2.7349E1	-3.26705E1	-3.26254E1	2.68818E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02133E-1