[Scan]
initial_time=2016-01-18T19:07:14
final_time=2016-01-18T19:07:34
ip_count=19
run=1024
dataset=4
scan=309
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.11597E-2
qbias_imon=-3.81572E-6
ql1_vset=
ql1_vmon=-8.80033E1
ql1_imon=-7.11489E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.40923E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.23806E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.58938E-8
mult1=-1.8011E-8
mult2=-2.74481E-9
rf_tmon=-4.56257E-3
rf_agc=3.21057E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=5.73671E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68056E0
bslens_imon=2.62788E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19646E1
lens5a_imon=2.00362E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53971E1
cs_ef1b_imon=2.82989E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=2.51913E-5
lens1_vset=-2.7E0
lens1_vmon=-2.88274E0
lens1_imon=1.54639E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03258E1
cs_ea2_imon=1.49784E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84586E1
cs_ef1a_imon=2.93909E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.352E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14909E1
os_ea1_imon=2.36267E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20824E0
cs_ionrep_imon=1.18638E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93373E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=2.98486E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=4.02923E-8
tplens_vset=1.4E-1
tplens_vmon=1.70152E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26183E1
iondef3_imon=1.51659E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26531E1
iondef2_imon=1.56165E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0301E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.5439E-2
ql6_imon=9.12786E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=1.76713E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3409E1
lens5b_imon=2.1608E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51105E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.1492E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.42491E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73275E1
iondef1_imon=1.07931E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68337E1
iondef4_imon=1.10539E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.33298E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.88101E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.76536E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.43772E-1
window_imon=-6.91381E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8269E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92798E3
multa_neg_imon=6.16434E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93833E3
defgrida_imon=4.85934E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50189E3
multb_neg_imon=9.17808E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28728E0
defgridb_imon=5.9913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.43718E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65915E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30694E1
cs_fil1_imon=9.94594E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62732E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67432E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.51222E-2
os_fil2_imon=-2.93627E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79094E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74042E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.51793E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22629E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.50882E-3
foreline_cvt_pmon=2.50882E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42183E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.239E3	2.0E0	1.47E2	4.1E1	-7.27053E-2	-8.8003E1	-6.19888E-4	-8.80004E1	2.14577E-4	4.43459E-3	9.50336E-2	2.73464E1	-3.27009E1	-3.26242E1	2.68671E1	1.20174E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01347E-1
2.0E0	1.10788E5	9.7E1	3.16E2	1.6E2	-7.27828E-2	-8.80032E1	-4.52995E-4	-8.80007E1	6.91414E-4	4.36306E-3	9.52244E-2	2.73149E1	-3.26199E1	-3.26229E1	2.6837E1	1.20311E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.03027E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80035E1	-7.15256E-4	-8.80009E1	3.57628E-4	4.55379E-3	9.51529E-2	2.73057E1	-3.26474E1	-3.26393E1	2.68557E1	1.20191E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.02277E-1
4.0E0	2.4231E4	1.2E1	6.55E2	3.98E2	-7.30146E-2	-8.80033E1	-9.29832E-4	-8.80009E1	1.90735E-4	4.55379E-3	9.51052E-2	2.73167E1	-3.26249E1	-3.26086E1	2.67989E1	1.20596E-7	2.51287E-3	2.51287E-3	6.30212E-3	3.00852E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80034E1	-1.16825E-3	-8.80006E1	8.34465E-4	4.60148E-3	9.52482E-2	2.72901E1	-3.26142E1	-3.26347E1	2.68787E1	1.20158E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.8003E1	-1.00136E-3	-8.80008E1	3.33786E-4	4.86374E-3	9.53197E-2	2.73163E1	-3.2652E1	-3.26183E1	2.68036E1	1.20084E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.99083E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80031E1	-6.67572E-4	-8.80006E1	3.09944E-4	4.74453E-3	9.54151E-2	2.73682E1	-3.26164E1	-3.26008E1	2.68756E1	1.20055E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80028E1	-4.52995E-4	-8.80008E1	3.57628E-4	4.86374E-3	9.53674E-2	2.73454E1	-3.26897E1	-3.25773E1	2.68292E1	1.19925E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.00676E-1
1.2E1	1.01E2	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80031E1	-3.8147E-4	-8.80008E1	3.8147E-4	4.55379E-3	9.53436E-2	2.73532E1	-3.26987E1	-3.26158E1	2.6822E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00453E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80031E1	-4.52995E-4	-8.80012E1	9.53674E-5	4.52995E-3	9.51529E-2	2.73442E1	-3.26591E1	-3.25948E1	2.68566E1	1.20174E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.00563E-1
1.4E1	3.56E3	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80031E1	-5.00679E-4	-8.80007E1	2.38419E-4	4.55379E-3	9.51529E-2	2.72961E1	-3.26903E1	-3.26404E1	2.68176E1	1.19809E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.02659E-1
1.5E1	9.1E1	1.0E0	6.06E2	4.11E2	-7.43285E-2	-8.80032E1	-3.57628E-4	-8.80007E1	4.29153E-4	4.74453E-3	9.51529E-2	2.73682E1	-3.26968E1	-3.25688E1	2.68442E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01347E-1
1.6E1	4.48E2	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80032E1	-5.96046E-4	-8.80009E1	3.57628E-4	4.81606E-3	9.53197E-2	2.73448E1	-3.26422E1	-3.25888E1	2.68112E1	1.19953E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.99175E-1
1.7E1	1.2E3	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80034E1	-7.15256E-4	-8.80009E1	7.15256E-4	4.33922E-3	9.50098E-2	2.73499E1	-3.27051E1	-3.26213E1	2.68677E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
1.8E1	4.706E3	6.0E0	7.27E2	5.0E2	-7.286E-2	-8.80032E1	-7.15256E-4	-8.80006E1	2.86102E-4	4.48227E-3	9.51052E-2	2.73093E1	-3.26374E1	-3.2623E1	2.68047E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0071E-1
1.9E1	2.317E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80033E1	-5.96046E-4	-8.80006E1	6.19888E-4	4.43459E-3	9.55105E-2	2.73159E1	-3.26681E1	-3.26296E1	2.68532E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
2.0E1	2.6883E4	1.9E1	8.08E2	5.58E2	-7.19325E-2	-8.80036E1	-5.72205E-4	-8.80006E1	7.86781E-4	4.8399E-3	9.53436E-2	2.73291E1	-3.2617E1	-3.26392E1	2.68388E1	1.20278E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.13915E-2	-8.80032E1	-7.86781E-4	-8.80005E1	5.48363E-4	4.31538E-3	9.55582E-2	2.7374E1	-3.26666E1	-3.26249E1	2.68499E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
2.2E1	1.874E3	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80031E1	-4.76837E-4	-8.80008E1	8.34465E-4	4.29153E-3	9.55105E-2	2.73139E1	-3.26608E1	-3.26372E1	2.68352E1	1.19841E-7	2.52131E-3	2.52131E-3	6.32328E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.11597E-2	-8.80033E1	-7.15256E-4	-8.80005E1	2.14577E-4	4.43459E-3	9.5439E-2	2.73275E1	-3.26531E1	-3.26183E1	2.68337E1	1.19902E-7	2.50882E-3	2.50882E-3	6.28592E-3	3.0071E-1