[Scan]
initial_time=2016-01-18T19:07:41
final_time=2016-01-18T19:08:00
ip_count=19
run=1024
dataset=4
scan=310
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.80083E-6
ql1_vset=
ql1_vmon=-8.80033E1
ql1_imon=-6.89411E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.38606E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.23708E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.58852E-8
mult1=-1.89274E-8
mult2=-2.53896E-9
rf_tmon=-5.44971E-3
rf_agc=3.27928E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.78392E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1928E1
lens5a_imon=1.99425E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53916E1
cs_ef1b_imon=2.83691E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04549E1
cs_ea1_imon=2.5112E-5
lens1_vset=-2.7E0
lens1_vmon=-2.87793E0
lens1_imon=1.67256E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.98078E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03522E1
cs_ea2_imon=1.48523E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=2.93456E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.34676E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.25863E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14849E1
os_ea1_imon=2.35907E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.07288E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23948E0
cs_ionrep_imon=1.19863E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91956E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=2.9853E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=4.03185E-8
tplens_vset=1.4E-1
tplens_vmon=1.65045E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.50794E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.5703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98083E-4
ql6_vset=1.0E-1
ql6_vmon=9.5582E-2
ql6_imon=9.04191E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29356E0
ionrepsh_imon=1.76497E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34168E1
lens5b_imon=2.16332E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74756E1
cs_ef2b_imon=3.12501E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45818E0
os_ea2_imon=-7.06706E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00479E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.16045E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04124E0
os_ef2alow_imon=-2.54678E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14607E-1
os_ef2bup_imon=-5.26095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11315E1
os_restr2_imon=3.42179E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.30144E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.23986E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73249E1
iondef1_imon=1.08724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.09581E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.34602E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.92243E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15157E0
cs_ionaccel_imon=-1.86563E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56446E1
einzel_imon=7.72607E-6
window_vset=0.0E0
window_vmon=2.4375E-1
window_imon=-7.5355E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82677E2
mask1_imon=2.39028E-4
mask2_vset=0.0E0
mask2_vmon=-1.86379E1
mask2_imon=-7.46599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92841E3
multa_neg_imon=5.51905E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=5.50463E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50251E3
multb_neg_imon=7.43688E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26622E0
defgridb_imon=6.23283E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33302E1
os_fil1_imon=9.44082E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07404E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65961E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30706E1
cs_fil1_imon=9.9609E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62551E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67498E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.68656E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98186E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55094E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34146E-1
cs_fil2_imon=-2.26374E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13042E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22536E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19444E-1
res40_imon=-2.52593E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.187E3	1.0E0	1.47E2	4.1E1	-7.14689E-2	-8.80032E1	-8.34465E-4	-8.80007E1	8.82149E-4	4.69685E-3	9.55343E-2	2.733E1	-3.2666E1	-3.26156E1	2.68111E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
2.0E0	1.10583E5	1.0E2	3.16E2	1.6E2	-7.20871E-2	-8.80033E1	-8.58307E-4	-8.80008E1	4.76837E-4	4.86374E-3	9.52959E-2	2.73138E1	-3.26528E1	-3.26304E1	2.68562E1	1.19941E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.00852E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80032E1	-1.12057E-3	-8.80007E1	5.96046E-4	4.81606E-3	9.52482E-2	2.73458E1	-3.26526E1	-3.26313E1	2.67872E1	1.20084E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.01475E-1
4.0E0	2.4049E4	1.1E1	6.55E2	3.98E2	-7.17779E-2	-8.80031E1	-1.00136E-3	-8.80008E1	4.05312E-4	4.81606E-3	9.52005E-2	2.73234E1	-3.26514E1	-3.25906E1	2.68522E1	1.19757E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9978E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80033E1	-7.15256E-4	-8.80007E1	1.43051E-4	4.57764E-3	9.51529E-2	2.72973E1	-3.26624E1	-3.26215E1	2.68273E1	1.198E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.03545E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80034E1	-7.39098E-4	-8.80007E1	5.24521E-4	4.57764E-3	9.51529E-2	2.73165E1	-3.26947E1	-3.26336E1	2.68475E1	1.20064E-7	2.5216E-3	2.5216E-3	6.31251E-3	3.00392E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80035E1	-3.8147E-4	-8.80008E1	4.29153E-4	4.26769E-3	9.51529E-2	2.73568E1	-3.26831E1	-3.26074E1	2.68641E1	1.1995E-7	2.51527E-3	2.51527E-3	6.29002E-3	2.99811E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80036E1	-8.34465E-4	-8.80007E1	0.0E0	4.64916E-3	9.51052E-2	2.72939E1	-3.2649E1	-3.26372E1	2.68364E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80035E1	-8.10623E-4	-8.80008E1	4.29153E-4	4.62532E-3	9.48906E-2	2.73399E1	-3.26708E1	-3.2629E1	2.68157E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0071E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80035E1	-7.62939E-4	-8.80009E1	3.33786E-4	4.50611E-3	9.50098E-2	2.73075E1	-3.26217E1	-3.26658E1	2.6831E1	1.20158E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.9892E-1
1.4E1	3.499E3	6.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80036E1	-7.86781E-4	-8.80005E1	6.19888E-4	4.64916E-3	9.48668E-2	2.73234E1	-3.26803E1	-3.26154E1	2.68226E1	1.19925E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.99879E-1
1.5E1	9.3E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80035E1	-5.00679E-4	-8.8001E1	3.09944E-4	4.43459E-3	9.53436E-2	2.73004E1	-3.26691E1	-3.26679E1	2.6855E1	1.20106E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.03545E-1
1.6E1	5.04E2	2.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80036E1	-6.4373E-4	-8.80009E1	1.19209E-4	4.43459E-3	9.52721E-2	2.73454E1	-3.26404E1	-3.26218E1	2.684E1	1.20209E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.01223E-1
1.7E1	1.152E3	1.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80036E1	-5.72205E-4	-8.80007E1	1.43051E-4	4.26769E-3	9.52482E-2	2.73308E1	-3.26817E1	-3.26419E1	2.681E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1
1.8E1	4.819E3	3.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80033E1	-5.72205E-4	-8.80006E1	8.34465E-4	4.50611E-3	9.48191E-2	2.73552E1	-3.2682E1	-3.2593E1	2.68683E1	1.19819E-7	2.52473E-3	2.52473E-3	6.3074E-3	3.00676E-1
1.9E1	2.275E3	1.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80034E1	-8.34465E-4	-8.80012E1	4.52995E-4	4.43459E-3	9.52005E-2	2.73129E1	-3.2605E1	-3.26182E1	2.6816E1	1.19851E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.01738E-1
2.0E1	2.7021E4	1.4E1	8.08E2	5.58E2	-7.18554E-2	-8.80036E1	-8.34465E-4	-8.80012E1	3.09944E-4	4.43459E-3	9.55343E-2	2.73267E1	-3.26693E1	-3.25948E1	2.68376E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00302E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.80034E1	-7.39098E-4	-8.80013E1	-4.76837E-5	4.43459E-3	9.53197E-2	2.73484E1	-3.26825E1	-3.2605E1	2.68412E1	1.20084E-7	2.52697E-3	2.52697E-3	6.32978E-3	3.02277E-1
2.2E1	1.901E3	1.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80033E1	-7.86781E-4	-8.8001E1	2.86102E-4	4.22001E-3	9.52244E-2	2.73364E1	-3.26638E1	-3.26183E1	2.68088E1	1.20311E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99686E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80033E1	-6.91414E-4	-8.80011E1	5.48363E-4	4.64916E-3	9.5582E-2	2.73249E1	-3.26543E1	-3.26332E1	2.68442E1	1.2026E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99175E-1