[Scan]
initial_time=2016-01-18T19:09:01
final_time=2016-01-18T19:09:21
ip_count=19
run=1024
dataset=4
scan=313
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.84891E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-7.26163E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.43064E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.31382E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.58994E-8
mult1=-1.86848E-8
mult2=-2.8428E-9
rf_tmon=-4.09654E-3
rf_agc=3.34802E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=5.48124E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65532E0
bslens_imon=2.38634E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=2.00434E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04873E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.84935E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04934E1
cs_ea1_imon=2.52706E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01792E0
lens1_imon=1.49592E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03816E1
cs_ea2_imon=1.49857E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84628E1
cs_ef1a_imon=2.93333E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.35425E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.25742E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14945E1
os_ea1_imon=2.34897E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.06235E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=1.18962E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91962E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.98847E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=4.04013E-8
tplens_vset=1.4E-1
tplens_vmon=1.67268E0
tplens_imon=-3.57025E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25959E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27127E1
iondef2_imon=1.56454E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03007E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=9.38642E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=1.79633E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51886E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.1629E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28658E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.4231E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.24533E-5
iondef1_vset=2.763E1
iondef1_vmon=2.736E1
iondef1_imon=1.10671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68123E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.29476E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.92874E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14996E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.62657E-6
window_vset=0.0E0
window_vmon=2.61191E-1
window_imon=-8.03104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92569E3
multa_neg_imon=7.98484E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.75194E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50023E3
multb_neg_imon=7.55945E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=5.97327E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.4245E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06614E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66336E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30688E1
cs_fil1_imon=9.94491E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63015E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67846E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62957E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.17343E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00407E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22501E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.20363E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42183E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.242E3	1.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80035E1	-5.00679E-4	-8.80008E1	3.33786E-4	4.3869E-3	9.55582E-2	2.73642E1	-3.26944E1	-3.26173E1	2.6825E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
2.0E0	1.10956E5	9.7E1	3.16E2	1.6E2	-7.24736E-2	-8.80034E1	-4.29153E-4	-8.80011E1	6.67572E-4	4.45843E-3	9.50813E-2	2.73259E1	-3.26872E1	-3.26058E1	2.6825E1	1.19749E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.01223E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80032E1	-4.05312E-4	-8.80009E1	4.29153E-4	4.36306E-3	9.52482E-2	2.73109E1	-3.26787E1	-3.26446E1	2.68532E1	1.19965E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.01085E-1
4.0E0	2.4131E4	1.3E1	6.55E2	3.98E2	-7.32464E-2	-8.8003E1	-4.29153E-4	-8.80008E1	4.52995E-4	4.36306E-3	9.55105E-2	2.73261E1	-3.2653E1	-3.262E1	2.68372E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80031E1	-5.72205E-4	-8.80008E1	7.62939E-4	4.57764E-3	9.54628E-2	2.73576E1	-3.2652E1	-3.26478E1	2.68569E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80029E1	-6.67572E-4	-8.80009E1	4.05312E-4	4.31538E-3	9.55105E-2	2.73279E1	-3.26843E1	-3.26104E1	2.6831E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.03185E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80031E1	-5.00679E-4	-8.80008E1	7.62939E-4	4.22001E-3	9.53436E-2	2.73081E1	-3.26855E1	-3.265E1	2.68508E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80029E1	-6.19888E-4	-8.80007E1	7.39098E-4	4.17233E-3	9.5439E-2	2.73139E1	-3.26714E1	-3.25877E1	2.68496E1	1.20106E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.99941E-1
1.2E1	1.1E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.8003E1	-6.19888E-4	-8.80008E1	8.34465E-4	4.43459E-3	9.52244E-2	2.73255E1	-3.26398E1	-3.2623E1	2.68198E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.97704E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80029E1	-7.15256E-4	-8.80009E1	7.15256E-4	4.76837E-3	9.52005E-2	2.73225E1	-3.26747E1	-3.25954E1	2.68274E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
1.4E1	3.506E3	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.8003E1	-6.19888E-4	-8.80011E1	5.00679E-4	4.50611E-3	9.54628E-2	2.73405E1	-3.26813E1	-3.26008E1	2.68635E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
1.5E1	1.03E2	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80033E1	-3.09944E-4	-8.8001E1	4.05312E-4	4.62532E-3	9.51052E-2	2.73303E1	-3.2653E1	-3.26254E1	2.68532E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.02253E-1
1.6E1	4.55E2	1.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80033E1	-6.19888E-4	-8.8001E1	2.6226E-4	4.93526E-3	9.54628E-2	2.73099E1	-3.26356E1	-3.26128E1	2.68136E1	1.19913E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.00824E-1
1.7E1	1.141E3	3.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80029E1	-3.09944E-4	-8.80012E1	6.19888E-4	4.45843E-3	9.53674E-2	2.73493E1	-3.26549E1	-3.26231E1	2.68394E1	1.20122E-7	2.50898E-3	2.50898E-3	6.3074E-3	2.9926E-1
1.8E1	4.793E3	2.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80029E1	-7.86781E-4	-8.8001E1	3.8147E-4	4.52995E-3	9.57489E-2	2.7301E1	-3.26632E1	-3.26437E1	2.68346E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99941E-1
1.9E1	2.268E3	2.0E0	7.68E2	5.29E2	-7.20871E-2	-8.8003E1	-8.34465E-4	-8.80009E1	6.4373E-4	4.17233E-3	9.52482E-2	2.73291E1	-3.26759E1	-3.26104E1	2.68502E1	1.20017E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00563E-1
2.0E1	2.6902E4	1.1E1	8.08E2	5.58E2	-7.26282E-2	-8.80031E1	-6.67572E-4	-8.80009E1	2.38419E-4	5.03063E-3	9.52244E-2	2.73243E1	-3.26549E1	-3.26434E1	2.68036E1	1.20226E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00302E-1
2.1E1	5.5E1	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80029E1	-5.72205E-4	-8.80008E1	2.38419E-4	4.36306E-3	9.52244E-2	2.73546E1	-3.26832E1	-3.26301E1	2.68436E1	1.20174E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.02133E-1
2.2E1	1.872E3	1.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80032E1	-8.82149E-4	-8.8001E1	1.90735E-4	4.45843E-3	9.51767E-2	2.73122E1	-3.26313E1	-3.26248E1	2.68241E1	1.20209E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.0148E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80031E1	-7.62939E-4	-8.80008E1	2.6226E-4	4.3869E-3	9.52482E-2	2.736E1	-3.27127E1	-3.25959E1	2.68123E1	1.20363E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99175E-1