[Scan]
initial_time=2016-01-18T19:09:28
final_time=2016-01-18T19:09:47
ip_count=19
run=1024
dataset=4
scan=314
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.87624E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-7.08032E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.36921E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.23821E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.59365E-8
mult1=-1.69218E-8
mult2=-2.64871E-9
rf_tmon=-3.80538E-3
rf_agc=3.44425E-2
counter1=1
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.58269E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6786E0
bslens_imon=2.17516E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=2.00102E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53806E1
cs_ef1b_imon=2.84247E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0487E1
cs_ea1_imon=2.53795E-5
lens1_vset=-2.7E0
lens1_vmon=-2.987E0
lens1_imon=1.3611E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.98009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03425E1
cs_ea2_imon=1.4825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=2.93178E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.35662E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.24925E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15052E1
os_ea1_imon=2.35744E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.07149E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.258E0
cs_ionrep_imon=1.20607E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.98287E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=4.04268E-8
tplens_vset=1.4E-1
tplens_vmon=1.65854E0
tplens_imon=-9.0062E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26805E1
iondef3_imon=1.50798E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26566E1
iondef2_imon=1.55117E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02993E2
lens6_imon=2.98056E-4
ql6_vset=1.0E-1
ql6_vmon=9.53674E-2
ql6_imon=9.00972E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3335E0
ionrepsh_imon=1.79432E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.1518E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.12535E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51224E0
os_ea2_imon=-6.56367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71136E1
cs_ef2a_imon=3.16219E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05514E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18082E-1
os_ef2bup_imon=-5.38606E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11251E1
os_restr2_imon=3.43083E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.30282E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01705E1
cs_anode2_imon=2.24611E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.08786E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68352E1
iondef4_imon=1.09129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.25824E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.88644E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15389E0
cs_ionaccel_imon=-1.75442E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56179E1
einzel_imon=7.66699E-6
window_vset=0.0E0
window_vmon=2.51859E-1
window_imon=-8.1958E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82688E2
mask1_imon=2.39154E-4
mask2_vset=0.0E0
mask2_vmon=-1.86361E1
mask2_imon=-6.9447E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.42764E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.56403E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.31438E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37603E0
defgridb_imon=6.06851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.41453E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06883E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66173E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30673E1
cs_fil1_imon=9.94375E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62088E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6795E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.5345E-2
os_fil2_imon=-2.78503E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0282E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64708E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-2.16527E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.85968E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22564E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.23498E-1
res40_imon=-2.41472E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.226E3	0.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80031E1	-3.8147E-4	-8.8001E1	6.19888E-4	4.48227E-3	9.48191E-2	2.73075E1	-3.26708E1	-3.2606E1	2.68673E1	1.20042E-7	2.52236E-3	2.52236E-3	6.31798E-3	3.01356E-1
2.0E0	1.11024E5	8.9E1	3.16E2	1.6E2	-7.30918E-2	-8.80032E1	-6.19888E-4	-8.8001E1	2.38419E-4	4.41074E-3	9.49621E-2	2.73136E1	-3.2663E1	-3.26192E1	2.68285E1	1.20023E-7	2.52469E-3	2.52469E-3	6.30474E-3	3.00146E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80033E1	-1.09673E-3	-8.8001E1	2.38419E-4	4.24385E-3	9.52721E-2	2.73261E1	-3.26488E1	-3.26428E1	2.68274E1					
4.0E0	2.4079E4	9.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80033E1	-9.53674E-4	-8.80008E1	4.52995E-4	4.57764E-3	9.5129E-2	2.73225E1	-3.26272E1	-3.2593E1	2.68136E1	1.20174E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80028E1	-7.86781E-4	-8.80009E1	5.00679E-4	4.48227E-3	9.51052E-2	2.73195E1	-3.2611E1	-3.26206E1	2.68352E1	1.19757E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80032E1	-7.39098E-4	-8.80007E1	5.24521E-4	4.673E-3	9.53436E-2	2.73231E1	-3.26718E1	-3.26272E1	2.68551E1	1.20122E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80031E1	-8.82149E-4	-8.80009E1	2.86102E-4	4.86374E-3	9.52482E-2	2.73575E1	-3.26379E1	-3.25767E1	2.68157E1	1.20325E-7	2.51575E-3	2.51575E-3	6.3074E-3	3.0E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80031E1	-7.39098E-4	-8.80009E1	8.58307E-4	4.64916E-3	9.50575E-2	2.73357E1	-3.26368E1	-3.26236E1	2.68112E1	1.20316E-7	2.51611E-3	2.51611E-3	6.31879E-3	3.00251E-1
1.2E1	9.1E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80034E1	-7.39098E-4	-8.80008E1	4.52995E-4	4.62532E-3	9.50813E-2	2.73252E1	-3.26832E1	-3.25912E1	2.68514E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80034E1	-8.34465E-4	-8.80007E1	5.24521E-4	4.62532E-3	9.53197E-2	2.73255E1	-3.26717E1	-3.26332E1	2.68304E1	1.20017E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00563E-1
1.4E1	3.589E3	3.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80033E1	-5.24521E-4	-8.80006E1	3.33786E-4	4.60148E-3	9.52244E-2	2.73357E1	-3.26634E1	-3.26327E1	2.68448E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01085E-1
1.5E1	1.12E2	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80032E1	-7.86781E-4	-8.80007E1	3.33786E-4	4.673E-3	9.54151E-2	2.73092E1	-3.2682E1	-3.26124E1	2.68157E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
1.6E1	4.94E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80033E1	-5.96046E-4	-8.80008E1	3.57628E-4	4.57764E-3	9.52721E-2	2.73297E1	-3.26741E1	-3.26338E1	2.685E1	1.19861E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.00563E-1
1.7E1	1.159E3	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80033E1	-3.57628E-4	-8.80007E1	3.09944E-4	5.07832E-3	9.54628E-2	2.73207E1	-3.26735E1	-3.26639E1	2.68563E1	1.19913E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01871E-1
1.8E1	4.644E3	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80032E1	-3.57628E-4	-8.80009E1	4.05312E-4	4.98295E-3	9.4986E-2	2.73237E1	-3.26699E1	-3.26176E1	2.68388E1	1.19965E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00041E-1
1.9E1	2.301E3	1.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80034E1	-6.4373E-4	-8.80009E1	9.53674E-5	4.69685E-3	9.51767E-2	2.73027E1	-3.26573E1	-3.26119E1	2.68166E1	1.20069E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00302E-1
2.0E1	2.6842E4	2.3E1	8.08E2	5.58E2	-7.31692E-2	-8.80031E1	-6.91414E-4	-8.80006E1	2.14577E-4	4.74453E-3	9.53913E-2	2.73287E1	-3.26484E1	-3.26307E1	2.68316E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.8003E1	-3.8147E-4	-8.80009E1	-1.19209E-4	4.673E-3	9.53674E-2	2.73388E1	-3.26413E1	-3.26064E1	2.68701E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
2.2E1	1.841E3	1.0E0	8.89E2	6.17E2	-7.286E-2	-8.8003E1	-7.39098E-4	-8.80009E1	0.0E0	4.74453E-3	9.53674E-2	2.73097E1	-3.26347E1	-3.26428E1	2.68331E1	1.20011E-7	2.52134E-3	2.52134E-3	6.31827E-3	2.99991E-1
2.3E1	1.0E0	1.0E0	9.3E2	6.47E2	-7.286E-2	-8.80031E1	-6.19888E-4	-8.80007E1	-4.76837E-5	4.55379E-3	9.53674E-2	2.73051E1	-3.26566E1	-3.26805E1	2.68352E1