[Scan]
initial_time=2016-01-18T19:09:55
final_time=2016-01-18T19:10:14
ip_count=19
run=1024
dataset=4
scan=315
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.83052E-6
ql1_vset=
ql1_vmon=-8.80033E1
ql1_imon=-6.74093E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=1.42213E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.18021E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.58831E-8
mult1=-1.96821E-8
mult2=-2.68328E-9
rf_tmon=-6.24178E-3
rf_agc=3.22632E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.65994E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68627E0
bslens_imon=2.39106E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.98864E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.84034E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04752E1
cs_ea1_imon=2.53937E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98051E0
lens1_imon=1.39295E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03625E1
cs_ea2_imon=1.491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=2.94414E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.35262E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.25814E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15193E1
os_ea1_imon=2.34682E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.06775E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20432E0
cs_ionrep_imon=1.17032E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93576E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=2.98594E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=4.02875E-8
tplens_vset=1.4E-1
tplens_vmon=1.68863E0
tplens_imon=-1.50232E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25721E1
iondef3_imon=1.48923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26358E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03039E2
lens6_imon=2.98307E-4
ql6_vset=1.0E-1
ql6_vmon=9.53674E-2
ql6_imon=9.14407E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30873E0
ionrepsh_imon=1.77698E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33575E1
lens5b_imon=2.16313E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53053E0
os_ea2_imon=-5.60803E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.15209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.27923E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11195E1
os_restr2_imon=3.43896E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.27203E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23992E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73614E1
iondef1_imon=1.11653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68512E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.32423E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81331E-1
olens1_imon=7.92703E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56543E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.5098E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82671E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.86218E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.79928E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93752E3
defgrida_imon=5.68271E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50068E3
multb_neg_imon=8.10721E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26086E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.42072E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07119E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6593E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30716E1
cs_fil1_imon=9.95176E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62408E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67663E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42053E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65467E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22549E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33863E-3
inlet_lpb_pmon=2.99506E-1
chamber_ion_pmon=1.20028E-7
chamber_cvt_pmon=2.52197E-3
foreline_cvt_pmon=2.52197E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.78513E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.163E3	3.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80032E1	-7.86781E-4	-8.80007E1	2.38419E-5	4.31538E-3	9.57966E-2	2.73411E1	-3.26567E1	-3.26065E1	2.68522E1	1.19749E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.0071E-1
2.0E0	1.12107E5	1.26E2	3.16E2	1.6E2	-7.47923E-2	-8.80035E1	-7.39098E-4	-8.80007E1	2.86102E-4	4.33922E-3	9.55105E-2	2.73381E1	-3.26831E1	-3.26038E1	2.6837E1	1.19809E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.99E-1
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80032E1	-8.10623E-4	-8.80008E1	3.09944E-4	4.36306E-3	9.53197E-2	2.73558E1	-3.2603E1	-3.26537E1	2.68495E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.03185E-1
4.0E0	2.4673E4	1.5E1	6.55E2	3.98E2	-7.23964E-2	-8.80034E1	-8.34465E-4	-8.80007E1	9.53674E-5	4.60148E-3	9.50813E-2	2.73496E1	-3.26182E1	-3.2647E1	2.68424E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80033E1	-6.4373E-4	-8.80009E1	6.19888E-4	4.24385E-3	9.51052E-2	2.73448E1	-3.26518E1	-3.25846E1	2.68538E1	1.21135E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80033E1	-7.39098E-4	-8.80006E1	3.57628E-4	4.45843E-3	9.52959E-2	2.73207E1	-3.26452E1	-3.26404E1	2.68364E1	1.21591E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80031E1	-6.4373E-4	-8.80007E1	-1.43051E-4	4.55379E-3	9.52959E-2	2.7355E1	-3.26759E1	-3.26164E1	2.68196E1	1.20031E-7	2.51248E-3	2.51248E-3	6.31299E-3	3.01475E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80032E1	-9.05991E-4	-8.8001E1	1.19209E-4	4.24385E-3	9.54628E-2	2.73541E1	-3.2662E1	-3.26101E1	2.68198E1	1.21275E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.2E1	1.18E2	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80031E1	-8.82149E-4	-8.80009E1	7.15256E-5	4.62532E-3	9.5439E-2	2.73175E1	-3.26437E1	-3.26496E1	2.68581E1	1.20092E-7	2.51919E-3	2.51919E-3	6.33388E-3	3.01356E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80032E1	-8.34465E-4	-8.8001E1	1.43051E-4	4.45843E-3	9.56297E-2	2.72998E1	-3.26384E1	-3.2629E1	2.6837E1	1.20209E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.00966E-1
1.4E1	3.477E3	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80029E1	-9.53674E-4	-8.80009E1	0.0E0	4.43459E-3	9.56297E-2	2.73291E1	-3.2641E1	-3.26104E1	2.68377E1	1.20749E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01085E-1
1.5E1	1.33E2	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80031E1	-8.34465E-4	-8.8001E1	1.19209E-4	4.12464E-3	9.54628E-2	2.73134E1	-3.26691E1	-3.26284E1	2.68148E1	1.21433E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.03185E-1
1.6E1	5.21E2	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80031E1	-9.29832E-4	-8.80006E1	3.57628E-4	4.12464E-3	9.5439E-2	2.72937E1	-3.26801E1	-3.26182E1	2.67986E1	1.2212E-7	2.50989E-3	2.50989E-3	6.3074E-3	3.01738E-1
1.7E1	1.16E3	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80032E1	-1.07288E-3	-8.80008E1	1.43051E-4	4.50611E-3	9.52244E-2	2.72745E1	-3.26464E1	-3.2644E1	2.68442E1	1.22067E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.00302E-1
1.8E1	4.698E3	3.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80034E1	-8.34465E-4	-8.80007E1	2.38419E-5	3.98159E-3	9.54866E-2	2.73442E1	-3.26554E1	-3.262E1	2.68154E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00197E-1
1.9E1	2.366E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80033E1	-1.00136E-3	-8.80006E1	2.86102E-4	4.29153E-3	9.54151E-2	2.73434E1	-3.26874E1	-3.26337E1	2.68304E1	1.20191E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.99879E-1
2.0E1	2.6872E4	1.1E1	8.08E2	5.58E2	-7.286E-2	-8.80035E1	-7.15256E-4	-8.80007E1	4.29153E-4	4.41074E-3	9.52244E-2	2.73177E1	-3.26615E1	-3.2647E1	2.68696E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01995E-1
2.1E1	6.7E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80032E1	-7.62939E-4	-8.80008E1	2.86102E-4	4.62532E-3	9.5439E-2	2.72805E1	-3.26482E1	-3.26092E1	2.68268E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00563E-1
2.2E1	1.891E3	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80035E1	-7.86781E-4	-8.80008E1	4.52995E-4	4.48227E-3	9.54151E-2	2.73319E1	-3.26801E1	-3.26038E1	2.68325E1	1.19913E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.9978E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80033E1	-8.58307E-4	-8.80007E1	2.86102E-4	4.52995E-3	9.53674E-2	2.73614E1	-3.26358E1	-3.25721E1	2.68512E1	1.20028E-7	2.52197E-3	2.52197E-3	6.33863E-3	2.99506E-1