[Scan]
initial_time=2016-01-18T19:10:21
final_time=2016-01-18T19:10:41
ip_count=19
run=1024
dataset=4
scan=316
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.88352E-6
ql1_vset=
ql1_vmon=-8.80037E1
ql1_imon=-7.28464E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.43039E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.30776E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.58636E-8
mult1=-2.151E-8
mult2=-2.54702E-9
rf_tmon=-5.32354E-3
rf_agc=3.22571E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.83863E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64911E0
bslens_imon=2.35213E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19718E1
lens5a_imon=1.99784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=2.83998E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.01972E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04628E1
cs_ea1_imon=2.53229E-5
lens1_vset=-2.7E0
lens1_vmon=-2.92565E0
lens1_imon=1.49205E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03342E1
cs_ea2_imon=1.5002E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.93333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.35551E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=4.25202E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.36558E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2344E0
cs_ionrep_imon=1.19545E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91948E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.99027E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=4.03912E-8
tplens_vset=1.4E-1
tplens_vmon=1.63907E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26229E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26499E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98087E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=9.16183E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28867E0
ionrepsh_imon=1.77167E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34059E1
lens5b_imon=2.18543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49927E0
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.16578E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22051E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.44076E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.29893E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73308E1
iondef1_imon=1.11688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68394E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.31149E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.92753E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.31158E-1
window_imon=-8.1752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82682E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92726E3
multa_neg_imon=6.68791E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.04727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50174E3
multb_neg_imon=7.32854E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29039E0
defgridb_imon=6.01542E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.44006E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07407E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6641E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3071E1
cs_fil1_imon=9.95717E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63435E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68216E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52184E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.41928E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22588E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.49992E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.216E3	3.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80032E1	-6.67572E-4	-8.80007E1	-2.38419E-4	4.17233E-3	9.51767E-2	2.73104E1	-3.2652E1	-3.26148E1	2.68256E1	1.20017E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.98222E-1
2.0E0	1.11667E5	8.9E1	3.16E2	1.6E2	-7.24736E-2	-8.80033E1	-6.19888E-4	-8.80008E1	2.38419E-4	4.22001E-3	9.56297E-2	2.73516E1	-3.26836E1	-3.26187E1	2.68119E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.01738E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80033E1	-4.76837E-4	-8.8001E1	3.09944E-4	4.57764E-3	9.5582E-2	2.7348E1	-3.26428E1	-3.26069E1	2.68372E1	1.19861E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00302E-1
4.0E0	2.4235E4	2.1E1	6.55E2	3.98E2	-7.32464E-2	-8.80033E1	-5.24521E-4	-8.80009E1	6.4373E-4	4.72069E-3	9.53674E-2	2.73712E1	-3.26639E1	-3.26062E1	2.68256E1	1.19891E-7	2.52236E-3	2.52236E-3	6.30212E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80033E1	-8.58307E-4	-8.80011E1	6.67572E-4	4.52995E-3	9.52482E-2	2.73369E1	-3.26567E1	-3.2635E1	2.6834E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80033E1	-7.15256E-4	-8.80006E1	5.72205E-4	4.55379E-3	9.52244E-2	2.73434E1	-3.26626E1	-3.26254E1	2.68262E1	1.20122E-7	2.52647E-3	2.52647E-3	6.32386E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80032E1	-8.34465E-4	-8.80008E1	3.57628E-4	4.69685E-3	9.52005E-2	2.73255E1	-3.26777E1	-3.26236E1	2.68689E1	1.19861E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80031E1	-6.4373E-4	-8.80011E1	4.29153E-4	4.74453E-3	9.5129E-2	2.73275E1	-3.26649E1	-3.26213E1	2.68304E1	1.20055E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99941E-1
1.2E1	1.32E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80033E1	-1.00136E-3	-8.80008E1	7.15256E-4	4.57764E-3	9.51529E-2	2.73201E1	-3.2641E1	-3.26218E1	2.68412E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9926E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80034E1	-9.53674E-4	-8.8001E1	7.62939E-4	4.98295E-3	9.54151E-2	2.73165E1	-3.26729E1	-3.26182E1	2.68575E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.98481E-1
1.4E1	3.584E3	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80035E1	-9.53674E-4	-8.80012E1	3.57628E-4	4.33922E-3	9.53436E-2	2.73129E1	-3.26711E1	-3.26074E1	2.6834E1	1.20004E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99941E-1
1.5E1	1.01E2	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80036E1	-9.29832E-4	-8.80011E1	5.96046E-4	4.55379E-3	9.52244E-2	2.73261E1	-3.26248E1	-3.2632E1	2.68196E1	1.20278E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.9952E-1
1.6E1	5.24E2	2.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80037E1	-7.86781E-4	-8.80014E1	4.52995E-4	4.31538E-3	9.54151E-2	2.73339E1	-3.26813E1	-3.26086E1	2.68605E1	1.19819E-7	2.52473E-3	2.52473E-3	6.3074E-3	2.97499E-1
1.7E1	1.16E3	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80035E1	-7.15256E-4	-8.80013E1	6.4373E-4	4.50611E-3	9.53436E-2	2.73281E1	-3.26449E1	-3.26065E1	2.68563E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.97963E-1
1.8E1	4.748E3	3.0E0	7.27E2	5.0E2	-7.201E-2	-8.80033E1	-7.15256E-4	-8.80012E1	7.39098E-4	4.45843E-3	9.54866E-2	2.73219E1	-3.26567E1	-3.26362E1	2.68506E1	1.20192E-7	2.51498E-3	2.51498E-3	6.3074E-3	2.99093E-1
1.9E1	2.283E3	2.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80035E1	-5.24521E-4	-8.80011E1	4.05312E-4	4.55379E-3	9.51529E-2	2.7346E1	-3.26663E1	-3.26296E1	2.68218E1	1.20031E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00942E-1
2.0E1	2.6815E4	1.6E1	8.08E2	5.58E2	-7.25507E-2	-8.80034E1	-3.33786E-4	-8.80009E1	3.57628E-4	4.33922E-3	9.5129E-2	2.73147E1	-3.26699E1	-3.26068E1	2.67911E1	1.20069E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00824E-1
2.1E1	6.1E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80033E1	-2.86102E-4	-8.80011E1	5.48363E-4	4.33922E-3	9.53674E-2	2.73228E1	-3.26921E1	-3.26413E1	2.68545E1	1.19861E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01347E-1
2.2E1	1.922E3	1.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80035E1	-4.29153E-4	-8.80011E1	5.96046E-4	4.55379E-3	9.52244E-2	2.73488E1	-3.2629E1	-3.2649E1	2.68454E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.99686E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80037E1	-6.91414E-4	-8.80012E1	5.48363E-4	4.55379E-3	9.5129E-2	2.73308E1	-3.26499E1	-3.26229E1	2.68394E1	1.20004E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.00453E-1