[Scan]
initial_time=2016-01-18T19:10:48
final_time=2016-01-18T19:11:08
ip_count=19
run=1024
dataset=4
scan=317
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.85047E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-7.18915E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=1.38479E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.27194E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.58855E-8
mult1=-1.90478E-8
mult2=-2.58687E-9
rf_tmon=-5.28749E-3
rf_agc=3.25165E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.74958E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64852E0
bslens_imon=2.21055E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=2.01589E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53971E1
cs_ef1b_imon=2.84359E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04776E1
cs_ea1_imon=2.55813E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02888E0
lens1_imon=1.85661E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03926E1
cs_ea2_imon=1.46197E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.93657E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.35319E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.24949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14739E1
os_ea1_imon=2.34753E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.06703E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25977E0
cs_ionrep_imon=1.18838E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.9845E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=4.03284E-8
tplens_vset=1.4E-1
tplens_vmon=1.62315E0
tplens_imon=-1.78547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26032E1
iondef3_imon=1.51754E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.56178E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03E2
lens6_imon=2.97861E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=9.36317E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26567E0
ionrepsh_imon=1.7876E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48983E0
os_ea2_imon=-8.15641E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.15965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11135E1
os_restr2_imon=3.43572E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.2529E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.10308E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68376E1
iondef4_imon=1.10359E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.32156E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.9124E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.85186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.34762E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82697E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.24359E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.66667E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=6.90381E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32583E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33346E1
os_fil1_imon=9.41453E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07389E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66458E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30745E1
cs_fil1_imon=9.9654E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67885E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48385E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61291E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.71925E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22493E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.08546E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.177E3	4.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80033E1	-5.48363E-4	-8.8001E1	4.29153E-4	4.31538E-3	9.55105E-2	2.73328E1	-3.26225E1	-3.26219E1	2.68395E1	1.19965E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00563E-1
2.0E0	1.11582E5	9.9E1	3.16E2	1.6E2	-7.40967E-2	-8.80034E1	-3.8147E-4	-8.80014E1	5.48363E-4	4.22001E-3	9.56774E-2	2.73302E1	-3.26474E1	-3.26327E1	2.68194E1	1.20092E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.03891E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80033E1	-5.96046E-4	-8.80013E1	3.09944E-4	4.33922E-3	9.52244E-2	2.73393E1	-3.26579E1	-3.2626E1	2.68123E1	1.20031E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.0201E-1
4.0E0	2.4397E4	1.0E1	6.55E2	3.98E2	-7.201E-2	-8.80031E1	-8.58307E-4	-8.8001E1	6.4373E-4	4.62532E-3	9.54151E-2	2.73424E1	-3.2638E1	-3.26783E1	2.68178E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80033E1	-6.4373E-4	-8.80008E1	3.57628E-4	4.64916E-3	9.53197E-2	2.73098E1	-3.26691E1	-3.2649E1	2.68304E1	1.20174E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80033E1	-6.4373E-4	-8.80009E1	1.66893E-4	5.05447E-3	9.52721E-2	2.73375E1	-3.26915E1	-3.25972E1	2.68268E1	1.19965E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80033E1	-6.19888E-4	-8.80009E1	1.90735E-4	4.72069E-3	9.51052E-2	2.73183E1	-3.26308E1	-3.2623E1	2.6813E1	1.20278E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80033E1	-7.39098E-4	-8.8001E1	4.29153E-4	4.98295E-3	9.51767E-2	2.72986E1	-3.26726E1	-3.26107E1	2.68516E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9892E-1
1.2E1	1.08E2	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80032E1	-8.82149E-4	-8.80012E1	7.86781E-4	4.88758E-3	9.55582E-2	2.73273E1	-3.26639E1	-3.26002E1	2.6825E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99686E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80031E1	-5.00679E-4	-8.80012E1	2.38419E-4	5.29289E-3	9.55105E-2	2.73311E1	-3.26632E1	-3.26124E1	2.68226E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9926E-1
1.4E1	3.49E3	1.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80033E1	-5.48363E-4	-8.80012E1	7.15256E-4	4.62532E-3	9.50813E-2	2.73135E1	-3.26939E1	-3.26428E1	2.68376E1	1.19861E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00824E-1
1.5E1	8.4E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80033E1	-6.91414E-4	-8.80011E1	9.53674E-5	4.95911E-3	9.52482E-2	2.73273E1	-3.26921E1	-3.26002E1	2.68268E1	1.19953E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.03286E-1
1.6E1	5.25E2	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80033E1	-1.00136E-3	-8.8001E1	4.05312E-4	4.55379E-3	9.53197E-2	2.72815E1	-3.26537E1	-3.26284E1	2.68244E1	1.20137E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.01209E-1
1.7E1	1.128E3	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80032E1	-6.91414E-4	-8.80009E1	-4.76837E-5	4.72069E-3	9.53913E-2	2.73069E1	-3.265E1	-3.26122E1	2.68806E1	1.1969E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.98592E-1
1.8E1	4.698E3	1.0E0	7.27E2	5.0E2	-7.17007E-2	-8.80031E1	-6.67572E-4	-8.80009E1	3.09944E-4	4.69685E-3	9.52482E-2	2.73381E1	-3.26434E1	-3.2623E1	2.68157E1	1.20137E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.0041E-1
1.9E1	2.302E3	2.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80033E1	-5.24521E-4	-8.8001E1	1.66893E-4	4.88758E-3	9.50813E-2	2.72967E1	-3.26819E1	-3.26056E1	2.68346E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
2.0E1	2.6862E4	6.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80032E1	-1.43051E-4	-8.8001E1	1.19209E-4	4.93526E-3	9.52005E-2	2.73429E1	-3.26494E1	-3.26494E1	2.68436E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1
2.1E1	5.1E1	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80033E1	-2.86102E-4	-8.80008E1	6.4373E-4	4.52995E-3	9.55582E-2	2.72874E1	-3.26927E1	-3.25936E1	2.68214E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.03185E-1
2.2E1	1.908E3	1.0E0	8.89E2	6.17E2	-7.17007E-2	-8.80032E1	-1.90735E-4	-8.8001E1	7.15256E-5	4.45843E-3	9.53436E-2	2.73151E1	-3.26272E1	-3.2649E1	2.68366E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.01223E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.8003E1	-3.33786E-4	-8.80009E1	7.15256E-5	4.57764E-3	9.51767E-2	2.73099E1	-3.26518E1	-3.26032E1	2.68376E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01223E-1