[Scan]
initial_time=2016-01-18T19:11:42
final_time=2016-01-18T19:12:01
ip_count=19
run=1024
dataset=4
scan=319
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.82854E-6
ql1_vset=
ql1_vmon=-8.80032E1
ql1_imon=-7.06327E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.39577E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.19634E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.586E-8
mult1=-2.1492E-8
mult2=-2.64675E-9
rf_tmon=-3.50304E-3
rf_agc=3.39224E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.63478E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68626E0
bslens_imon=2.32268E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19749E1
lens5a_imon=1.99787E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.0467E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=2.83458E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04333E1
cs_ea1_imon=2.5209E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9686E0
lens1_imon=1.47055E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03739E1
cs_ea2_imon=1.5314E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.94882E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.36812E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.26139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15532E1
os_ea1_imon=2.35231E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22945E0
cs_ionrep_imon=1.18467E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.99351E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=4.03929E-8
tplens_vset=1.4E-1
tplens_vmon=1.6598E0
tplens_imon=-3.2186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26699E1
iondef3_imon=1.50054E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26488E1
iondef2_imon=1.55784E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03018E2
lens6_imon=2.9814E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=9.08518E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28699E0
ionrepsh_imon=1.77492E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.18702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52941E0
os_ea2_imon=-7.2956E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00491E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.15317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03414E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11147E1
os_restr2_imon=3.4404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.28202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.25398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.09064E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.10251E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.30897E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.9756E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15297E0
cs_ionaccel_imon=-1.7113E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.48577E-1
window_imon=-8.28332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92603E3
multa_neg_imon=8.12597E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.30418E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50076E3
multb_neg_imon=7.72195E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34533E0
defgridb_imon=5.94056E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33257E1
os_fil1_imon=9.43063E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06662E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66598E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30714E1
cs_fil1_imon=9.95272E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62762E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68137E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31827E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.38946E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.13739E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22532E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.58691E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.138E3	6.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80032E1	-5.96046E-4	-8.8001E1	2.86102E-4	4.95911E-3	9.51529E-2	2.73092E1	-3.26092E1	-3.26277E1	2.68372E1	1.19705E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
2.0E0	1.11912E5	1.12E2	3.16E2	1.6E2	-7.37103E-2	-8.80031E1	-5.72205E-4	-8.80011E1	-9.53674E-5	4.3869E-3	9.55582E-2	2.73284E1	-3.26774E1	-3.26162E1	2.68637E1	1.19902E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.02253E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80032E1	-4.52995E-4	-8.80008E1	3.09944E-4	4.91142E-3	9.52244E-2	2.73322E1	-3.26478E1	-3.26419E1	2.68262E1	1.19861E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9926E-1
4.0E0	2.44E4	1.8E1	6.55E2	3.98E2	-7.286E-2	-8.80033E1	-7.86781E-4	-8.80011E1	5.24521E-4	4.72069E-3	9.51529E-2	2.73187E1	-3.26337E1	-3.26443E1	2.68142E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80037E1	-6.91414E-4	-8.80009E1	1.90735E-4	4.55379E-3	9.53913E-2	2.73303E1	-3.27095E1	-3.26338E1	2.6849E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.42513E-2	-8.80033E1	-6.67572E-4	-8.80013E1	3.09944E-4	4.8399E-3	9.51767E-2	2.73529E1	-3.26608E1	-3.26378E1	2.68244E1	1.20278E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80032E1	-1.00136E-3	-8.80009E1	1.19209E-4	4.69685E-3	9.5129E-2	2.73273E1	-3.26663E1	-3.2638E1	2.68637E1	1.20004E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80034E1	-7.15256E-4	-8.8001E1	1.90735E-4	4.3869E-3	9.50336E-2	2.73183E1	-3.26368E1	-3.25876E1	2.68348E1	1.19925E-7	2.5225E-3	2.5225E-3	6.33538E-3	3.00942E-1
1.2E1	1.06E2	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80033E1	-6.91414E-4	-8.80009E1	1.43051E-4	4.57764E-3	9.48191E-2	2.73177E1	-3.26278E1	-3.2608E1	2.6822E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01347E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80034E1	-5.00679E-4	-8.80007E1	6.91414E-4	4.64916E-3	9.51529E-2	2.73153E1	-3.26482E1	-3.2626E1	2.68508E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99175E-1
1.4E1	3.635E3	1.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80034E1	-5.24521E-4	-8.80009E1	5.24521E-4	4.52995E-3	9.51529E-2	2.73446E1	-3.26661E1	-3.26278E1	2.68094E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
1.5E1	1.44E2	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80032E1	-9.29832E-4	-8.80009E1	9.53674E-5	4.45843E-3	9.4986E-2	2.7329E1	-3.26768E1	-3.2615E1	2.68364E1	1.20122E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
1.6E1	5.24E2	1.0E0	6.47E2	4.41E2	-7.44831E-2	-8.80035E1	-7.39098E-4	-8.80011E1	4.52995E-4	4.50611E-3	9.50575E-2	2.73604E1	-3.26374E1	-3.26344E1	2.68202E1	1.19861E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01609E-1
1.7E1	1.147E3	0.0E0	6.87E2	4.7E2	-7.50241E-2	-8.80031E1	-6.4373E-4	-8.80006E1	2.38419E-4	4.22001E-3	9.52721E-2	2.73411E1	-3.26909E1	-3.26431E1	2.6846E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
1.8E1	4.767E3	1.0E0	7.27E2	5.0E2	-7.36328E-2	-8.80034E1	-6.91414E-4	-8.80007E1	3.8147E-4	3.98159E-3	9.50575E-2	2.73607E1	-3.26579E1	-3.26131E1	2.68249E1	1.20466E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01738E-1
1.9E1	2.26E3	2.0E0	7.68E2	5.29E2	-7.47923E-2	-8.80033E1	-3.8147E-4	-8.80012E1	2.14577E-4	4.45843E-3	9.51052E-2	2.73476E1	-3.26866E1	-3.2657E1	2.68406E1	1.19913E-7	2.51896E-3	2.51896E-3	6.32151E-3	3.01721E-1
2.0E1	2.7134E4	1.8E1	8.08E2	5.58E2	-7.46377E-2	-8.8003E1	-5.96046E-4	-8.80011E1	1.66893E-4	4.60148E-3	9.52005E-2	2.73075E1	-3.26735E1	-3.26176E1	2.68364E1	1.20101E-7	2.51727E-3	2.51727E-3	6.32716E-3	3.01452E-1
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.47923E-2	-8.8003E1	-9.77516E-4	-8.80011E1	5.00679E-4	4.48227E-3	9.53674E-2	2.73033E1	-3.26797E1	-3.26231E1	2.68238E1	1.20069E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.01347E-1
2.2E1	1.936E3	3.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80033E1	-1.19209E-3	-8.80011E1	2.86102E-4	4.36306E-3	9.51529E-2	2.73399E1	-3.26368E1	-3.26248E1	2.68755E1	1.20158E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99941E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80032E1	-7.15256E-4	-8.8001E1	3.09944E-4	4.57764E-3	9.49621E-2	2.72967E1	-3.26488E1	-3.26699E1	2.68016E1	1.20226E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1