[Scan]
initial_time=2016-01-18T19:12:08
final_time=2016-01-18T19:12:28
ip_count=19
run=1024
dataset=4
scan=320
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.78934E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-7.16591E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.39838E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.21069E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.5845E-8
mult1=-2.16639E-8
mult2=-3.33276E-9
rf_tmon=-2.36223E-3
rf_agc=3.57867E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=6.13785E-10
bslens_vset=-6.2E0
bslens_vmon=-6.57301E0
bslens_imon=1.80955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19238E1
lens5a_imon=2.02705E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12579E2
lens4a_imon=2.05432E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54163E1
cs_ef1b_imon=2.84287E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.01742E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04189E1
cs_ea1_imon=2.52778E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03535E0
lens1_imon=1.88165E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04375E1
cs_ea2_imon=1.48018E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.93369E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.36525E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.26427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14104E1
os_ea1_imon=2.32374E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63365E1
os_ef1bup_imon=3.06992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22806E0
cs_ionrep_imon=1.22639E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92024E2
cs_nozzle_imon=1.9368E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.99279E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=4.03977E-8
tplens_vset=1.4E-1
tplens_vmon=1.57955E0
tplens_imon=-8.14854E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26225E1
iondef3_imon=1.49604E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26673E1
iondef2_imon=1.61176E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03003E2
lens6_imon=2.97884E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=9.41598E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22446E0
ionrepsh_imon=1.80174E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3421E1
lens5b_imon=2.20189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51586E0
os_ea2_imon=-8.79743E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06044E2
lens4b_imon=2.00302E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.15461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11688E1
os_restr2_imon=3.42779E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.3238E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.24893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73193E1
iondef1_imon=1.084E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68436E1
iondef4_imon=1.08161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.38116E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.96893E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.76536E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-8.96807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82703E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.62074E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=7.18814E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=6.92498E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62412E0
defgridb_imon=6.18597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33282E1
os_fil1_imon=9.41735E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06807E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66851E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3075E1
cs_fil1_imon=9.95819E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62714E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68444E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.22354E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22487E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.33173E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.188E3	0.0E0	1.47E2	4.1E1	-7.06958E-2	-8.80033E1	-7.15256E-4	-8.80012E1	2.6226E-4	4.3869E-3	9.51767E-2	2.73163E1	-3.26236E1	-3.25871E1	2.68198E1	1.20017E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.01609E-1
2.0E0	1.12069E5	1.16E2	3.16E2	1.6E2	-7.07733E-2	-8.80034E1	-4.76837E-4	-8.80009E1	5.24521E-4	4.52995E-3	9.52005E-2	2.73363E1	-3.26419E1	-3.2615E1	2.68394E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99686E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.06187E-2	-8.80033E1	-7.39098E-4	-8.8001E1	2.6226E-4	4.72069E-3	9.49621E-2	2.73115E1	-3.26579E1	-3.26243E1	2.68047E1	1.20191E-7	2.52473E-3	2.52473E-3	6.29624E-3	3.01742E-1
4.0E0	2.4246E4	1.5E1	6.55E2	3.98E2	-7.17779E-2	-8.80033E1	-4.76837E-4	-8.80008E1	6.19888E-4	4.64916E-3	9.51052E-2	2.73333E1	-3.26783E1	-3.26098E1	2.68575E1	1.19891E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80032E1	-7.15256E-4	-8.80008E1	-2.6226E-4	4.62532E-3	9.50813E-2	2.73424E1	-3.26921E1	-3.26068E1	2.68394E1	1.19925E-7	2.5147E-3	2.5147E-3	6.29624E-3	2.99613E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.8003E1	-1.0252E-3	-8.80009E1	0.0E0	4.57764E-3	9.49621E-2	2.73093E1	-3.26843E1	-3.26158E1	2.68148E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9892E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80033E1	-8.58307E-4	-8.80007E1	3.57628E-4	4.55379E-3	9.50098E-2	2.73393E1	-3.26349E1	-3.26408E1	2.68383E1	1.19913E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.8003E1	-8.34465E-4	-8.80007E1	5.48363E-4	4.31538E-3	9.49144E-2	2.73315E1	-3.26038E1	-3.26206E1	2.68469E1	1.20158E-7	2.52384E-3	2.52384E-3	6.33436E-3	3.0148E-1
1.2E1	1.1E2	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80032E1	-1.12057E-3	-8.80009E1	-9.53674E-5	4.69685E-3	9.49144E-2	2.73015E1	-3.26134E1	-3.25797E1	2.68238E1	1.20031E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.0041E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80032E1	-7.39098E-4	-8.80007E1	4.52995E-4	4.55379E-3	9.5129E-2	2.73629E1	-3.26313E1	-3.26402E1	2.68064E1	1.20106E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.0071E-1
1.4E1	3.623E3	3.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80033E1	-9.05991E-4	-8.80013E1	4.05312E-4	4.45843E-3	9.48429E-2	2.73516E1	-3.26707E1	-3.26242E1	2.68322E1	1.19953E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00453E-1
1.5E1	1.08E2	1.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80034E1	-5.72205E-4	-8.80012E1	2.38419E-4	4.673E-3	9.50575E-2	2.73311E1	-3.26649E1	-3.26124E1	2.68454E1	1.19766E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00942E-1
1.6E1	5.02E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80035E1	-9.53674E-4	-8.80012E1	5.00679E-4	4.81606E-3	9.52005E-2	2.73075E1	-3.2685E1	-3.26266E1	2.68364E1	1.20055E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0148E-1
1.7E1	1.121E3	1.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80035E1	-1.0252E-3	-8.80013E1	3.33786E-4	4.673E-3	9.51052E-2	2.73255E1	-3.26543E1	-3.26428E1	2.67978E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
1.8E1	4.776E3	2.0E0	7.27E2	5.0E2	-7.17007E-2	-8.80033E1	-1.00136E-3	-8.8001E1	3.57628E-4	4.41074E-3	9.48906E-2	2.73484E1	-3.26675E1	-3.2602E1	2.68382E1	1.19595E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
1.9E1	2.376E3	1.0E0	7.68E2	5.29E2	-7.201E-2	-8.80033E1	-5.96046E-4	-8.80012E1	4.29153E-4	4.72069E-3	9.50813E-2	2.73069E1	-3.26801E1	-3.26482E1	2.68448E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.98481E-1
2.0E1	2.7108E4	2.5E1	8.08E2	5.58E2	-7.17779E-2	-8.80034E1	-7.62939E-4	-8.80011E1	1.66893E-4	4.3869E-3	9.51529E-2	2.73003E1	-3.26729E1	-3.2614E1	2.68058E1	1.20226E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.97963E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80032E1	-9.05991E-4	-8.80012E1	3.33786E-4	4.29153E-3	9.50098E-2	2.73021E1	-3.26809E1	-3.26201E1	2.68202E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00041E-1
2.2E1	1.94E3	1.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80028E1	-7.39098E-4	-8.80009E1	6.19888E-4	4.72069E-3	9.51529E-2	2.73246E1	-3.26868E1	-3.2613E1	2.68256E1	1.20004E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.0148E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80031E1	-1.04904E-3	-8.80009E1	3.57628E-4	4.45843E-3	9.52005E-2	2.73193E1	-3.26673E1	-3.26225E1	2.68436E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01738E-1