[Scan]
initial_time=2016-01-18T19:12:45
final_time=2016-01-18T19:13:05
ip_count=19
run=1024
dataset=5
scan=321
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.84819E-1
ql1_imon=1.60301E-8
ql2_vset=
ql2_vmon=-8.97431E-1
ql2_imon=1.68322E-9
ql3_vset=
ql3_vmon=-9.04741E0
ql3_imon=7.64313E-9
ql4_vset=
ql4_vmon=-9.04207E0
ql4_imon=-5.0801E-10
mult1=-9.36206E-9
mult2=-2.75286E-9
rf_tmon=-5.92689E-3
rf_agc=3.16348E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.46055E-9
bslens_vset=-6.2E0
bslens_vmon=-6.58923E0
bslens_imon=1.77711E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19106E1
lens5a_imon=2.04327E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12603E2
lens4a_imon=2.05237E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54019E1
cs_ef1b_imon=3.17515E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.01696E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04063E1
cs_ea1_imon=1.09445E-5
lens1_vset=-5.0E0
lens1_vmon=-5.46749E0
lens1_imon=3.45702E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04075E1
cs_ea2_imon=1.32985E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.04613E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.37188E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.26643E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1447E1
os_ea1_imon=2.32554E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=9.81615E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92002E2
cs_nozzle_imon=1.93719E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01557E1
cs_anode1_imon=1.95557E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.37315E-8
tplens_vset=1.4E-1
tplens_vmon=1.62761E0
tplens_imon=-7.3194E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26032E1
iondef3_imon=1.51551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26511E1
iondef2_imon=1.61356E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.9778E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=3.96425E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21785E0
ionrepsh_imon=8.56163E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34373E1
lens5b_imon=2.23109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.14019E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58375E0
os_ea2_imon=-9.98707E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06012E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0966E0
os_ef2alow_imon=-2.38164E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2085E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11688E1
os_restr2_imon=3.43968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.33966E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.08856E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73603E1
iondef1_imon=1.14023E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68273E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.79159E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.95925E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-8.13916E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.48577E-1
window_imon=-6.69758E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82686E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.14128E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=7.3035E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50092E3
multb_neg_imon=6.45994E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.75946E0
defgridb_imon=6.41308E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.42036E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07876E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66617E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31638E1
cs_fil1_imon=7.01068E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.04044E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69197E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74438E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.24143E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.39885E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.63476E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22531E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35692E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.34975E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.86226E-1	-8.96668E-1	-9.04787E0	-9.04198E0	4.57764E-3	9.50575E-2	2.72974E1	-3.259E1	-3.26071E1	2.68196E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.86083E-1	-8.97121E-1	-9.04734E0	-9.04193E0	4.48227E-3	9.48429E-2	2.72922E1	-3.26517E1	-3.26125E1	2.68292E1	1.19851E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.85987E-1	-8.96978E-1	-9.04729E0	-9.04195E0	4.31538E-3	9.49144E-2	2.73493E1	-3.25891E1	-3.26221E1	2.6816E1	1.19819E-7	2.52139E-3	2.52139E-3	6.32978E-3	3.00942E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09325E0	-8.85868E-1	-8.96811E-1	-9.04763E0	-9.04207E0	4.52995E-3	9.51529E-2	2.73299E1	-3.2668E1	-3.26069E1	2.68465E1	1.20404E-7	2.51549E-3	2.51549E-3	6.31761E-3	2.98937E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.85701E-1	-8.9705E-1	-9.04756E0	-9.04224E0	4.29153E-3	9.50813E-2	2.73321E1	-3.27011E1	-3.26182E1	2.6825E1	1.19895E-7	2.52222E-3	2.52222E-3	6.34231E-3	2.98985E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.85415E-1	-8.97002E-1	-9.04789E0	-9.04205E0	4.36306E-3	9.52721E-2	2.73316E1	-3.26443E1	-3.26172E1	2.68453E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.85415E-1	-8.97121E-1	-9.04765E0	-9.04202E0	4.33922E-3	9.51767E-2	2.73415E1	-3.26539E1	-3.26249E1	2.68238E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.847E-1	-8.97002E-1	-9.04775E0	-9.04219E0	4.45843E-3	9.4986E-2	2.73201E1	-3.26603E1	-3.26116E1	2.6828E1	1.20078E-7	2.52197E-3	2.52197E-3	6.28667E-3	3.01981E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.84652E-1	-8.9705E-1	-9.04791E0	-9.04179E0	4.45843E-3	9.48429E-2	2.73137E1	-3.26395E1	-3.25954E1	2.68484E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.84461E-1	-8.97098E-1	-9.04758E0	-9.04191E0	4.41074E-3	9.52482E-2	2.73275E1	-3.26738E1	-3.26349E1	2.68563E1	1.20031E-7	2.51581E-3	2.51581E-3	6.30182E-3	3.03081E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.84628E-1	-8.9705E-1	-9.04741E0	-9.042E0	4.3869E-3	9.49621E-2	2.73063E1	-3.26462E1	-3.2664E1	2.68256E1	1.19697E-7	2.52492E-3	2.52492E-3	6.34518E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.84461E-1	-8.97288E-1	-9.04768E0	-9.04176E0	4.45843E-3	9.4986E-2	2.7373E1	-3.26663E1	-3.262E1	2.6831E1	1.19872E-7	2.52585E-3	2.52585E-3	6.31299E-3	2.97762E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.84509E-1	-8.97288E-1	-9.0476E0	-9.04191E0	4.48227E-3	9.5129E-2	2.72957E1	-3.26585E1	-3.2662E1	2.68316E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9978E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.84366E-1	-8.96931E-1	-9.04756E0	-9.04233E0	4.26769E-3	9.5129E-2	2.73296E1	-3.26444E1	-3.26536E1	2.68412E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.84485E-1	-8.97026E-1	-9.04748E0	-9.04224E0	4.45843E-3	9.50336E-2	2.7334E1	-3.26803E1	-3.26366E1	2.68298E1	1.19978E-7	2.51359E-3	2.51359E-3	6.33538E-3	3.02813E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.84342E-1	-8.97121E-1	-9.04744E0	-9.04233E0	4.673E-3	9.50098E-2	2.73201E1	-3.27041E1	-3.26314E1	2.6813E1	1.20226E-7	2.5188E-3	2.5188E-3	6.35692E-3	3.00824E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.84485E-1	-8.97002E-1	-9.04739E0	-9.04207E0	4.48227E-3	9.49621E-2	2.73409E1	-3.26713E1	-3.26179E1	2.68225E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.847E-1	-8.97098E-1	-9.04753E0	-9.042E0	4.3869E-3	9.48429E-2	2.73116E1	-3.26439E1	-3.25976E1	2.6835E1	1.20254E-7	2.51784E-3	2.51784E-3	6.32509E-3	3.0066E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.84724E-1	-8.96978E-1	-9.04758E0	-9.04243E0	4.22001E-3	9.48191E-2	2.73369E1	-3.2638E1	-3.2605E1	2.68202E1	1.20043E-7	2.51606E-3	2.51606E-3	6.31462E-3	3.0006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.84819E-1	-8.97431E-1	-9.04741E0	-9.04207E0	4.33922E-3	9.4986E-2	2.73603E1	-3.26511E1	-3.26032E1	2.68273E1	1.19861E-7	2.52209E-3	2.52209E-3	6.35692E-3	3.00302E-1