[Scan]
initial_time=2016-01-18T19:13:39
final_time=2016-01-18T19:13:58
ip_count=19
run=1024
dataset=5
scan=323
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.83722E-1
ql1_imon=1.41507E-8
ql2_vset=
ql2_vmon=-8.97098E-1
ql2_imon=1.86586E-9
ql3_vset=
ql3_vmon=-9.04622E0
ql3_imon=2.74465E-9
ql4_vset=
ql4_vmon=-9.04217E0
ql4_imon=-1.57714E-10
mult1=-1.03623E-8
mult2=-2.95843E-9
rf_tmon=-4.78083E-3
rf_agc=3.31321E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.61796E-9
bslens_vset=-6.2E0
bslens_vmon=-6.7836E0
bslens_imon=2.72377E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18279E1
lens5a_imon=1.88776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05645E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53995E1
cs_ef1b_imon=3.15893E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0482E2
lens23_imon=1.02864E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04127E1
cs_ea1_imon=9.99371E-6
lens1_vset=-5.0E0
lens1_vmon=-5.25989E0
lens1_imon=2.85473E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05312E1
cs_ea2_imon=1.47684E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.03892E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.37893E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11628E1
os_restr1_imon=4.26031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15648E1
os_ea1_imon=2.30541E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.09695E0
cs_ionrep_imon=8.6629E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91937E2
cs_nozzle_imon=1.94454E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=1.96566E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.39836E-8
tplens_vset=1.4E-1
tplens_vmon=1.81073E0
tplens_imon=-9.0062E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.41454E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2695E1
iondef2_imon=1.59328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03149E2
lens6_imon=2.98799E-4
ql6_vset=1.0E-1
ql6_vmon=9.53197E-2
ql6_imon=4.06209E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26036E0
ionrepsh_imon=7.70372E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32254E1
lens5b_imon=2.16738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.69216E0
os_ea2_imon=1.4E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06159E2
lens4b_imon=2.00117E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.16794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11883E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32863E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11346E1
os_restr2_imon=3.45266E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22905E2
cs_ionfoca_imon=6.23133E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.0763E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73134E1
iondef1_imon=1.19581E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68424E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.27566E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=8.03426E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-9.40055E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56657E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-7.13005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82687E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92722E3
multa_neg_imon=8.493E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93637E3
defgrida_imon=5.89508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=7.325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57682E0
defgridb_imon=6.94274E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33213E1
os_fil1_imon=9.44294E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07984E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67127E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31665E1
cs_fil1_imon=7.32302E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.9359E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69574E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6358E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.03709E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22599E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.50789E-3
foreline_cvt_pmon=2.50789E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.65299E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09333E0	-8.83889E-1	-8.96883E-1	-9.04603E0	-9.04162E0	4.76837E-3	9.52005E-2	2.73021E1	-3.25393E1	-3.25806E1	2.68192E1	1.20055E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.0148E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.83794E-1	-8.96883E-1	-9.04593E0	-9.04167E0	4.79221E-3	9.52244E-2	2.73657E1	-3.27148E1	-3.26034E1	2.68126E1	1.20004E-7	2.52384E-3	2.52384E-3	6.28592E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.83627E-1	-8.96931E-1	-9.04605E0	-9.04176E0	4.74453E-3	9.54151E-2	2.7326E1	-3.26706E1	-3.26115E1	2.68435E1	1.19978E-7	2.51025E-3	2.51025E-3	6.29067E-3	3.00676E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.83698E-1	-8.96835E-1	-9.04629E0	-9.04179E0	4.3869E-3	9.54628E-2	2.73508E1	-3.2653E1	-3.26074E1	2.68364E1	1.20142E-7	2.51603E-3	2.51603E-3	6.30212E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.83818E-1	-8.96668E-1	-9.04627E0	-9.04157E0	4.88758E-3	9.52482E-2	2.73135E1	-3.26476E1	-3.26218E1	2.68268E1	1.19601E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.83818E-1	-8.96788E-1	-9.0462E0	-9.04167E0	4.62532E-3	9.52482E-2	2.73201E1	-3.26717E1	-3.26254E1	2.68364E1	1.19861E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.84008E-1	-8.96668E-1	-9.04629E0	-9.04176E0	4.81606E-3	9.52721E-2	2.73417E1	-3.26455E1	-3.26001E1	2.68505E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.03185E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.83889E-1	-8.96907E-1	-9.04636E0	-9.04191E0	4.88758E-3	9.51052E-2	2.73039E1	-3.26805E1	-3.26125E1	2.6835E1	1.20158E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.83698E-1	-8.97098E-1	-9.04622E0	-9.04169E0	4.57764E-3	9.51529E-2	2.73424E1	-3.26356E1	-3.26134E1	2.6837E1	1.20031E-7	2.52921E-3	2.52921E-3	6.3074E-3	3.00942E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.83603E-1	-8.9705E-1	-9.04641E0	-9.04157E0	4.41074E-3	9.4986E-2	2.73458E1	-3.26632E1	-3.26496E1	2.68202E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.83555E-1	-8.96716E-1	-9.04624E0	-9.04179E0	4.3869E-3	9.51529E-2	2.73165E1	-3.26609E1	-3.26206E1	2.68331E1	1.21083E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.01995E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-8.83532E-1	-8.96907E-1	-9.04624E0	-9.04179E0	4.55379E-3	9.52244E-2	2.73321E1	-3.26561E1	-3.26464E1	2.68382E1	1.21803E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.83818E-1	-8.97241E-1	-9.04658E0	-9.04198E0	4.43459E-3	9.49383E-2	2.73231E1	-3.26512E1	-3.25984E1	2.68154E1	1.2212E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.00824E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.83651E-1	-8.96835E-1	-9.04615E0	-9.04186E0	4.29153E-3	9.50336E-2	2.73057E1	-3.26685E1	-3.26077E1	2.6828E1	1.21549E-7	2.52492E-3	2.52492E-3	6.33436E-3	3.00453E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.83722E-1	-8.97169E-1	-9.04648E0	-9.04164E0	4.88758E-3	9.52482E-2	2.73922E1	-3.26609E1	-3.26386E1	2.68484E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.83842E-1	-8.96883E-1	-9.04651E0	-9.04195E0	4.76837E-3	9.48906E-2	2.73225E1	-3.26639E1	-3.26266E1	2.68232E1	1.20226E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9874E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.83675E-1	-8.97169E-1	-9.04629E0	-9.04174E0	4.57764E-3	9.47237E-2	2.73293E1	-3.2649E1	-3.26626E1	2.68229E1	1.19965E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.02922E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.83651E-1	-8.97241E-1	-9.04627E0	-9.04162E0	4.79221E-3	9.48429E-2	2.73574E1	-3.26723E1	-3.26062E1	2.68241E1	1.21238E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01738E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.83794E-1	-8.97074E-1	-9.04653E0	-9.042E0	4.76837E-3	9.49383E-2	2.73399E1	-3.2638E1	-3.26344E1	2.681E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.83722E-1	-8.97098E-1	-9.04622E0	-9.04217E0	4.43459E-3	9.53197E-2	2.73134E1	-3.2695E1	-3.26396E1	2.68424E1	1.20226E-7	2.50789E-3	2.50789E-3	6.32386E-3	2.99E-1