[Scan]
initial_time=2016-01-18T19:14:32
final_time=2016-01-18T19:14:52
ip_count=19
run=1024
dataset=5
scan=325
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08727E-4
ql1_vset=
ql1_vmon=-8.83198E-1
ql1_imon=1.38611E-8
ql2_vset=
ql2_vmon=-8.97217E-1
ql2_imon=1.88389E-9
ql3_vset=
ql3_vmon=-9.04684E0
ql3_imon=1.73728E-9
ql4_vset=
ql4_vmon=-9.04181E0
ql4_imon=-6.11186E-11
mult1=-1.00896E-8
mult2=-2.75454E-9
rf_tmon=-4.77078E-3
rf_agc=3.2907E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.65827E-9
bslens_vset=-6.2E0
bslens_vmon=-6.5688E0
bslens_imon=1.67977E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18823E1
lens5a_imon=2.06058E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12622E2
lens4a_imon=2.05403E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=3.14596E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.01735E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04435E1
cs_ea1_imon=1.09589E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44646E0
lens1_imon=3.36689E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04225E1
cs_ea2_imon=1.35365E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.04721E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.37845E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.25886E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.139E1
os_ea1_imon=2.32987E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=9.78371E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92047E2
cs_nozzle_imon=1.93579E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=1.96026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.40421E-8
tplens_vset=1.4E-1
tplens_vmon=1.66607E0
tplens_imon=-8.25669E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26813E1
iondef3_imon=1.522E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26464E1
iondef2_imon=1.6096E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03035E2
lens6_imon=2.97953E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.06967E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.18661E0
ionrepsh_imon=8.07136E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.23974E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.60659E0
os_ea2_imon=-9.30213E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06003E2
lens4b_imon=2.00219E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.17804E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.24454E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1146E1
os_restr2_imon=3.45842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.34182E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.08171E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72937E1
iondef1_imon=1.11536E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68478E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.27577E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=8.05021E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-7.92292E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47489E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=2.24551E-1
window_imon=-6.2651E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-7.49045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.19896E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.70147E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=6.58972E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.8948E0
defgridb_imon=6.56809E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33237E1
os_fil1_imon=9.44474E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07636E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66826E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31727E1
cs_fil1_imon=7.25695E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40131E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69586E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66699E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.16812E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22609E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.9353E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.82983E-1	-8.97551E-1	-9.04593E0	-9.04191E0	4.36306E-3	9.5129E-2	2.72547E1	-3.25663E1	-3.26822E1	2.68244E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.03545E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.82936E-1	-8.97551E-1	-9.04627E0	-9.042E0	4.50611E-3	9.51767E-2	2.73094E1	-3.2664E1	-3.26229E1	2.68294E1	1.2026E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.82959E-1	-8.97479E-1	-9.04598E0	-9.04183E0	4.3869E-3	9.49383E-2	2.73039E1	-3.26301E1	-3.26378E1	2.68441E1	1.2035E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.00676E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.83031E-1	-8.97241E-1	-9.04632E0	-9.042E0	4.673E-3	9.51767E-2	2.73476E1	-3.2662E1	-3.26231E1	2.68268E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.82936E-1	-8.97241E-1	-9.04603E0	-9.04171E0	4.24385E-3	9.50098E-2	2.73285E1	-3.26921E1	-3.26092E1	2.68418E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.83102E-1	-8.97479E-1	-9.04639E0	-9.04212E0	4.36306E-3	9.53436E-2	2.73508E1	-3.26729E1	-3.26404E1	2.68322E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.82983E-1	-8.9736E-1	-9.04634E0	-9.04198E0	4.36306E-3	9.51052E-2	2.73568E1	-3.26945E1	-3.2632E1	2.68316E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.83222E-1	-8.97169E-1	-9.04644E0	-9.04169E0	4.36306E-3	9.51767E-2	2.73363E1	-3.26554E1	-3.26386E1	2.68238E1	1.20174E-7	2.5199E-3	2.5199E-3	6.3514E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.83269E-1	-8.96931E-1	-9.04655E0	-9.04171E0	4.55379E-3	9.51529E-2	2.73255E1	-3.26518E1	-3.26188E1	2.68394E1	1.20004E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.83174E-1	-8.96931E-1	-9.04672E0	-9.04222E0	4.62532E-3	9.51529E-2	2.73045E1	-3.2638E1	-3.26404E1	2.6816E1	1.19978E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.00676E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.82912E-1	-8.96955E-1	-9.04624E0	-9.0421E0	4.33922E-3	9.52005E-2	2.73269E1	-3.2639E1	-3.2639E1	2.68372E1	1.19749E-7	2.52276E-3	2.52276E-3	6.35601E-3	3.0148E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.82959E-1	-8.97026E-1	-9.04627E0	-9.04202E0	4.05312E-3	9.55343E-2	2.73291E1	-3.26549E1	-3.26356E1	2.68034E1	1.20174E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.83126E-1	-8.97193E-1	-9.04646E0	-9.04186E0	4.50611E-3	9.51052E-2	2.72953E1	-3.26346E1	-3.25923E1	2.68406E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01609E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.82936E-1	-8.96883E-1	-9.04665E0	-9.04171E0	4.33922E-3	9.53674E-2	2.73159E1	-3.2647E1	-3.2605E1	2.68322E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.8315E-1	-8.97145E-1	-9.04613E0	-9.0416E0	4.60148E-3	9.5129E-2	2.72962E1	-3.26478E1	-3.26325E1	2.68262E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.82816E-1	-8.97193E-1	-9.04658E0	-9.0415E0	4.31538E-3	9.50813E-2	2.73147E1	-3.26422E1	-3.26314E1	2.68327E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.83222E-1	-8.97169E-1	-9.04639E0	-9.04167E0	4.45843E-3	9.50813E-2	2.72947E1	-3.26428E1	-3.26081E1	2.68378E1	1.19653E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.83079E-1	-8.9705E-1	-9.04655E0	-9.04157E0	4.74453E-3	9.48906E-2	2.73308E1	-3.26572E1	-3.26132E1	2.68282E1	1.19991E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.00097E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.83079E-1	-8.97193E-1	-9.04658E0	-9.04174E0	4.52995E-3	9.4986E-2	2.73381E1	-3.26697E1	-3.26449E1	2.68296E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.99083E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.83198E-1	-8.97217E-1	-9.04684E0	-9.04181E0	4.43459E-3	9.48906E-2	2.72937E1	-3.26464E1	-3.26813E1	2.68478E1	1.20158E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.01738E-1