[Scan]
initial_time=2016-01-18T19:14:59
final_time=2016-01-18T19:15:18
ip_count=19
run=1024
dataset=5
scan=326
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-8.82959E-1
ql1_imon=1.38328E-8
ql2_vset=
ql2_vmon=-8.97622E-1
ql2_imon=1.90287E-9
ql3_vset=
ql3_vmon=-9.04627E0
ql3_imon=1.47655E-9
ql4_vset=
ql4_vmon=-9.04169E0
ql4_imon=-8.90493E-12
mult1=-9.52366E-9
mult2=-2.63278E-9
rf_tmon=-5.46173E-3
rf_agc=3.30211E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.71649E-9
bslens_vset=-6.2E0
bslens_vmon=-6.84999E0
bslens_imon=2.85138E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18974E1
lens5a_imon=1.929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12387E2
lens4a_imon=2.05313E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=3.16866E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04727E2
lens23_imon=1.03004E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=1.05768E-5
lens1_vset=-5.0E0
lens1_vmon=-5.17969E0
lens1_imon=2.26378E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04435E1
cs_ea2_imon=1.42034E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=3.04469E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.38081E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1158E1
os_restr1_imon=4.26679E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1587E1
os_ea1_imon=2.34537E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.14095E0
cs_ionrep_imon=8.78874E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.94094E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=1.96782E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.40303E-8
tplens_vset=1.4E-1
tplens_vmon=1.79705E0
tplens_imon=3.02681E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2602E1
iondef3_imon=1.42863E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26218E1
iondef2_imon=1.54723E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03079E2
lens6_imon=2.98825E-4
ql6_vset=1.0E-1
ql6_vmon=9.48668E-2
ql6_imon=4.08925E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.323E0
ionrepsh_imon=8.09299E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32672E1
lens5b_imon=2.13268E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58315E0
os_ea2_imon=3.02681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06221E2
lens4b_imon=2.00781E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15444E-1
os_ef2bup_imon=-5.08462E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11238E1
os_restr2_imon=3.44833E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22963E2
cs_ionfoca_imon=6.21529E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.08784E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.16547E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6846E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.33139E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=8.03879E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-7.23817E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.82839E-6
window_vset=0.0E0
window_vmon=2.53983E-1
window_imon=-8.03104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82689E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.8617E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9261E3
multa_neg_imon=8.99783E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93648E3
defgrida_imon=5.89396E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50168E3
multb_neg_imon=7.35757E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.08577E0
defgridb_imon=6.36621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33225E1
os_fil1_imon=9.42768E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07978E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66805E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31713E1
cs_fil1_imon=7.52124E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01281E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69713E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.71858E-2
os_fil2_imon=-2.37164E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.23772E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.17343E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.61074E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22695E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.59602E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.83102E-1	-8.97503E-1	-9.04648E0	-9.04212E0	4.52995E-3	9.48429E-2	2.74467E1	-3.27499E1	-3.25057E1	2.67992E1	1.19965E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.01347E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.83341E-1	-8.97408E-1	-9.04648E0	-9.04138E0	4.31538E-3	9.51529E-2	2.73308E1	-3.26793E1	-3.26168E1	2.68412E1	1.19953E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.83079E-1	-8.97241E-1	-9.0466E0	-9.04143E0	4.48227E-3	9.53436E-2	2.73213E1	-3.26417E1	-3.2615E1	2.68389E1	1.20208E-7	2.52066E-3	2.52066E-3	6.3074E-3	2.989E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.83579E-1	-8.97527E-1	-9.0466E0	-9.04152E0	4.43459E-3	9.50336E-2	2.72961E1	-3.265E1	-3.26206E1	2.68292E1	1.20142E-7	2.51603E-3	2.51603E-3	6.33388E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.83102E-1	-8.97241E-1	-9.04667E0	-9.04152E0	4.673E-3	9.4986E-2	2.73353E1	-3.26647E1	-3.26004E1	2.68458E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3514E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.82936E-1	-8.97312E-1	-9.04677E0	-9.04195E0	4.673E-3	9.50098E-2	2.73057E1	-3.26648E1	-3.26202E1	2.68331E1	1.20226E-7	2.5199E-3	2.5199E-3	6.3126E-3	3.00989E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.8315E-1	-8.97479E-1	-9.0466E0	-9.04217E0	4.43459E-3	9.45091E-2	2.73326E1	-3.26934E1	-3.26148E1	2.68113E1	1.19941E-7	2.52553E-3	2.52553E-3	6.33919E-3	3.01104E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.82769E-1	-8.97384E-1	-9.04658E0	-9.04231E0	4.14848E-3	9.46283E-2	2.73225E1	-3.26645E1	-3.26128E1	2.68394E1	1.20045E-7	2.51952E-3	2.51952E-3	6.3074E-3	3.00251E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.8284E-1	-8.97312E-1	-9.04672E0	-9.04186E0	4.33922E-3	9.50098E-2	2.73165E1	-3.26627E1	-3.26152E1	2.6843E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.82888E-1	-8.97574E-1	-9.04624E0	-9.04174E0	3.95775E-3	9.51052E-2	2.7311E1	-3.26284E1	-3.2616E1	2.68082E1	1.19978E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.99879E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.82912E-1	-8.97002E-1	-9.04632E0	-9.04167E0	4.26769E-3	9.48906E-2	2.73222E1	-3.26536E1	-3.26487E1	2.68331E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.83174E-1	-8.97455E-1	-9.04641E0	-9.04169E0	4.55379E-3	9.48429E-2	2.73417E1	-3.26732E1	-3.26065E1	2.68262E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.82959E-1	-8.97503E-1	-9.04644E0	-9.04191E0	4.57764E-3	9.50336E-2	2.73195E1	-3.26332E1	-3.26194E1	2.68262E1	1.20004E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.83245E-1	-8.97408E-1	-9.04641E0	-9.04198E0	4.673E-3	9.52244E-2	2.73237E1	-3.26759E1	-3.26068E1	2.68292E1	1.20174E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00824E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.83341E-1	-8.97431E-1	-9.04617E0	-9.04191E0	4.74453E-3	9.5129E-2	2.73523E1	-3.2682E1	-3.26107E1	2.6846E1	1.20122E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.83055E-1	-8.97455E-1	-9.04627E0	-9.04195E0	4.48227E-3	9.50575E-2	2.73424E1	-3.26597E1	-3.26116E1	2.68136E1	1.20004E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.0071E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.83269E-1	-8.97312E-1	-9.04622E0	-9.04229E0	4.3869E-3	9.50575E-2	2.73497E1	-3.2626E1	-3.26243E1	2.68406E1	1.19809E-7	2.52099E-3	2.52099E-3	6.28552E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.83055E-1	-8.97288E-1	-9.04639E0	-9.04186E0	4.45843E-3	9.47952E-2	2.7346E1	-3.26681E1	-3.26164E1	2.68605E1	1.20004E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.83007E-1	-8.97503E-1	-9.04615E0	-9.04126E0	4.86374E-3	9.46522E-2	2.73116E1	-3.26832E1	-3.26148E1	2.68319E1	1.20069E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.82959E-1	-8.97622E-1	-9.04627E0	-9.04169E0	4.79221E-3	9.48668E-2	2.73033E1	-3.26218E1	-3.2602E1	2.6846E1	1.20055E-7	2.51632E-3	2.51632E-3	6.29128E-3	2.9892E-1