[Scan]
initial_time=2016-01-18T19:15:25
final_time=2016-01-18T19:15:45
ip_count=19
run=1024
dataset=5
scan=327
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.82816E-1
ql1_imon=1.36828E-8
ql2_vset=
ql2_vmon=-8.96811E-1
ql2_imon=1.90833E-9
ql3_vset=
ql3_vmon=-9.04617E0
ql3_imon=1.25706E-9
ql4_vset=
ql4_vmon=-9.04217E0
ql4_imon=-1.719E-11
mult1=-9.6561E-9
mult2=-2.66272E-9
rf_tmon=-4.27209E-3
rf_agc=3.28229E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.71385E-9
bslens_vset=-6.2E0
bslens_vmon=-6.53636E0
bslens_imon=2.25296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20956E1
lens5a_imon=2.11573E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12613E2
lens4a_imon=2.04278E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=3.17011E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04412E2
lens23_imon=1.01577E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05222E1
cs_ea1_imon=1.21125E-5
lens1_vset=-5.0E0
lens1_vmon=-5.551E0
lens1_imon=2.76847E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64867E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02471E1
cs_ea2_imon=1.22675E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84628E1
cs_ef1a_imon=3.04253E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.38305E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.26535E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14867E1
os_ea1_imon=2.44306E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.37887E0
cs_ionrep_imon=1.00252E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.92854E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=1.97287E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.41156E-8
tplens_vset=1.4E-1
tplens_vmon=1.52908E0
tplens_imon=-3.6784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.58869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2638E1
iondef2_imon=1.53353E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02867E2
lens6_imon=2.9774E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.16598E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31338E0
ionrepsh_imon=9.17087E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.35124E1
lens5b_imon=2.19576E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40531E0
os_ea2_imon=-1.38083E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06043E2
lens4b_imon=2.01113E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0942E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26256E-1
os_ef2bup_imon=-5.07741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.45987E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23185E2
cs_ionfoca_imon=6.36165E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.08099E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73424E1
iondef1_imon=1.01911E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.31336E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=8.04271E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-7.20213E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.93291E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-8.21124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82687E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86722E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92551E3
multa_neg_imon=7.05476E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93769E3
defgrida_imon=7.70726E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50066E3
multb_neg_imon=7.2314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=5.30636E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33229E1
os_fil1_imon=9.41525E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07966E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66704E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31727E1
cs_fil1_imon=7.80355E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.70765E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69669E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.32359E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.19003E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50863E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22813E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.63807E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.83007E-1	-8.97074E-1	-9.0467E0	-9.04188E0	4.64916E-3	9.50575E-2	2.72336E1	-3.25816E1	-3.27438E1	2.68376E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.82697E-1	-8.97098E-1	-9.04679E0	-9.04214E0	4.52995E-3	9.50813E-2	2.73111E1	-3.26615E1	-3.26062E1	2.68319E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.82864E-1	-8.97121E-1	-9.04658E0	-9.04224E0	4.3869E-3	9.51767E-2	2.72974E1	-3.26366E1	-3.26366E1	2.68244E1	1.20017E-7	2.5199E-3	2.5199E-3	6.35692E-3	3.01871E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.83007E-1	-8.97145E-1	-9.04651E0	-9.04233E0	4.79221E-3	9.48191E-2	2.73417E1	-3.2652E1	-3.26278E1	2.68348E1	1.20158E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.8284E-1	-8.9705E-1	-9.04663E0	-9.04229E0	4.76837E-3	9.51529E-2	2.73326E1	-3.26248E1	-3.26052E1	2.68375E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.8284E-1	-8.96597E-1	-9.04691E0	-9.04193E0	4.98295E-3	9.48429E-2	2.73364E1	-3.26832E1	-3.26272E1	2.68198E1	1.19757E-7	2.5188E-3	2.5188E-3	6.30466E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.82912E-1	-8.97121E-1	-9.04672E0	-9.04193E0	4.86374E-3	9.5582E-2	2.73069E1	-3.2626E1	-3.25776E1	2.68481E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.82959E-1	-8.97121E-1	-9.04663E0	-9.04193E0	4.62532E-3	9.49383E-2	2.73039E1	-3.26697E1	-3.26048E1	2.68372E1	1.20069E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.82816E-1	-8.9674E-1	-9.04653E0	-9.04155E0	4.8399E-3	9.50813E-2	2.73694E1	-3.26506E1	-3.25984E1	2.68322E1	1.20069E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.82745E-1	-8.97098E-1	-9.04663E0	-9.04183E0	4.74453E-3	9.4986E-2	2.73075E1	-3.26657E1	-3.26134E1	2.68502E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.8284E-1	-8.9705E-1	-9.04663E0	-9.04217E0	4.76837E-3	9.51767E-2	2.73069E1	-3.26759E1	-3.26296E1	2.6822E1	1.20158E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.03286E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.82912E-1	-8.96788E-1	-9.04629E0	-9.04193E0	4.74453E-3	9.52005E-2	2.73141E1	-3.26843E1	-3.26104E1	2.6828E1	1.20137E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.99613E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.83055E-1	-8.96668E-1	-9.04632E0	-9.04212E0	4.3869E-3	9.50336E-2	2.73547E1	-3.26376E1	-3.26181E1	2.68525E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.83079E-1	-8.96811E-1	-9.04651E0	-9.04193E0	4.41074E-3	9.49621E-2	2.73045E1	-3.26614E1	-3.25995E1	2.68447E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.97704E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.83126E-1	-8.96811E-1	-9.04646E0	-9.04171E0	4.19617E-3	9.50098E-2	2.73544E1	-3.26314E1	-3.265E1	2.68292E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.83198E-1	-8.96764E-1	-9.04653E0	-9.04167E0	4.43459E-3	9.50575E-2	2.73069E1	-3.26974E1	-3.2636E1	2.68094E1	1.20017E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9926E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.82912E-1	-8.96716E-1	-9.04677E0	-9.04183E0	4.64916E-3	9.50336E-2	2.73173E1	-3.26627E1	-3.25942E1	2.6837E1	1.19749E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.03286E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.82721E-1	-8.96835E-1	-9.04644E0	-9.04222E0	4.673E-3	9.52005E-2	2.73198E1	-3.26661E1	-3.26343E1	2.6831E1	1.19861E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.03185E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.82721E-1	-8.96859E-1	-9.04624E0	-9.04174E0	4.55379E-3	9.51052E-2	2.73428E1	-3.26486E1	-3.25994E1	2.68001E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.03804E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.82816E-1	-8.96811E-1	-9.04617E0	-9.04217E0	4.43459E-3	9.50098E-2	2.73424E1	-3.2638E1	-3.2635E1	2.68178E1	1.19697E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9943E-1