[Scan]
initial_time=2016-01-18T19:15:52
final_time=2016-01-18T19:16:11
ip_count=19
run=1024
dataset=5
scan=328
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.82673E-1
ql1_imon=1.37102E-8
ql2_vset=
ql2_vmon=-8.97312E-1
ql2_imon=1.9111E-9
ql3_vset=
ql3_vmon=-9.04672E0
ql3_imon=1.13982E-9
ql4_vset=
ql4_vmon=-9.04212E0
ql4_imon=-9.94205E-12
mult1=-1.01739E-8
mult2=-2.79247E-9
rf_tmon=-4.73473E-3
rf_agc=3.33095E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.66917E-9
bslens_vset=-6.2E0
bslens_vmon=-6.83788E0
bslens_imon=2.75208E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18072E1
lens5a_imon=1.89378E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12421E2
lens4a_imon=2.05599E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=3.18165E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0479E2
lens23_imon=1.03147E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04493E1
cs_ea1_imon=9.6964E-6
lens1_vset=-5.0E0
lens1_vmon=-5.16491E0
lens1_imon=2.58573E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64701E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.052E1
cs_ea2_imon=1.46693E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84475E1
cs_ef1a_imon=3.03187E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.3799E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1154E1
os_restr1_imon=4.26697E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15901E1
os_ea1_imon=2.29126E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63427E1
os_ef1bup_imon=3.08261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.05625E0
cs_ionrep_imon=8.92127E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91948E2
cs_nozzle_imon=1.94188E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01954E1
cs_anode1_imon=1.96566E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.40061E-8
tplens_vset=1.4E-1
tplens_vmon=1.82135E0
tplens_imon=2.3199E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.60284E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03116E2
lens6_imon=2.99054E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=4.07642E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25741E0
ionrepsh_imon=7.62585E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32224E1
lens5b_imon=2.17552E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74692E1
cs_ef2b_imon=3.14273E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.65677E0
os_ea2_imon=2.53261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06222E2
lens4b_imon=2.00194E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71304E1
cs_ef2a_imon=3.16532E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06962E0
os_ef2alow_imon=-2.42167E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.30825E-1
os_ef2bup_imon=-5.2818E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11048E1
os_restr2_imon=3.45515E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22902E2
cs_ionfoca_imon=6.22708E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.07235E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74108E1
iondef1_imon=1.18802E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68382E1
iondef4_imon=1.09685E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.33724E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=8.03143E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13709E0
cs_ionaccel_imon=-8.30005E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47483E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.82337E-6
window_vset=0.0E0
window_vmon=2.57651E-1
window_imon=-8.36956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.39317E-4
mask2_vset=0.0E0
mask2_vmon=-1.86031E1
mask2_imon=-5.69361E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92515E3
multa_neg_imon=1.04007E-4
defgrida_vset=2.902E3
defgrida_vmon=2.93665E3
defgrida_imon=5.50574E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50032E3
multb_neg_imon=9.3814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60045E0
defgridb_imon=6.46138E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33203E1
os_fil1_imon=9.42125E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08001E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66807E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31697E1
cs_fil1_imon=6.52286E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00676E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69399E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73711E-2
os_fil2_imon=-2.31587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15562E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.16111E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-2.09577E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22543E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.18662E-1
res40_imon=-2.33131E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.82602E-1	-8.96907E-1	-9.0462E0	-9.04222E0	4.26769E-3	9.48191E-2	2.73922E1	-3.26493E1	-3.25304E1	2.68199E1	1.19902E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.03027E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.82292E-1	-8.97288E-1	-9.04632E0	-9.04188E0	4.33922E-3	9.51529E-2	2.72567E1	-3.26597E1	-3.25897E1	2.68393E1	1.1993E-7	2.52613E-3	2.52613E-3	6.3074E-3	2.9926E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.82244E-1	-8.96811E-1	-9.04644E0	-9.042E0	4.55379E-3	9.5129E-2	2.73564E1	-3.26555E1	-3.26189E1	2.68511E1	1.19895E-7	2.51642E-3	2.51642E-3	6.29581E-3	2.9871E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.82316E-1	-8.96931E-1	-9.04658E0	-9.0425E0	4.64916E-3	9.47475E-2	2.73329E1	-3.26509E1	-3.25988E1	2.68099E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.82816E-1	-8.97002E-1	-9.04636E0	-9.04214E0	4.55379E-3	9.48906E-2	2.72949E1	-3.26585E1	-3.26302E1	2.68605E1	1.19979E-7	2.51265E-3	2.51265E-3	6.3074E-3	2.99506E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.82602E-1	-8.96907E-1	-9.04653E0	-9.04236E0	4.26769E-3	9.47952E-2	2.72868E1	-3.26762E1	-3.2659E1	2.6837E1	1.19705E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.82745E-1	-8.96835E-1	-9.04663E0	-9.04231E0	4.62532E-3	9.50813E-2	2.73664E1	-3.26434E1	-3.26573E1	2.68148E1	1.19861E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.82745E-1	-8.96859E-1	-9.04639E0	-9.04236E0	4.57764E-3	9.54151E-2	2.73602E1	-3.2694E1	-3.25917E1	2.68316E1	1.20055E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.82459E-1	-8.96883E-1	-9.04672E0	-9.04167E0	4.86374E-3	9.54866E-2	2.72854E1	-3.2644E1	-3.2604E1	2.68366E1	1.19766E-7	2.51693E-3	2.51693E-3	6.29067E-3	2.99613E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.8253E-1	-8.96907E-1	-9.0466E0	-9.04229E0	4.8399E-3	9.53436E-2	2.73792E1	-3.26585E1	-3.2664E1	2.67945E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01738E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.82554E-1	-8.97193E-1	-9.0466E0	-9.04164E0	4.76837E-3	9.4986E-2	2.73496E1	-3.26591E1	-3.26464E1	2.68526E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.82673E-1	-8.97098E-1	-9.04636E0	-9.0421E0	4.76837E-3	9.50336E-2	2.73375E1	-3.26585E1	-3.2623E1	2.68532E1	1.19913E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.82673E-1	-8.97193E-1	-9.04658E0	-9.04191E0	4.81606E-3	9.47952E-2	2.72396E1	-3.2626E1	-3.25966E1	2.68599E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.82506E-1	-8.97431E-1	-9.0466E0	-9.04181E0	4.48227E-3	9.46999E-2	2.72862E1	-3.26856E1	-3.26113E1	2.68233E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.82697E-1	-8.97241E-1	-9.04675E0	-9.04126E0	4.52995E-3	9.47475E-2	2.72702E1	-3.26458E1	-3.26242E1	2.68232E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.82697E-1	-8.97288E-1	-9.04689E0	-9.04174E0	4.79221E-3	9.46045E-2	2.73015E1	-3.26164E1	-3.26536E1	2.68184E1	1.198E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0071E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.82697E-1	-8.97336E-1	-9.04658E0	-9.04155E0	4.36306E-3	9.46283E-2	2.73782E1	-3.26644E1	-3.26101E1	2.6837E1	1.19861E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.82792E-1	-8.97431E-1	-9.04667E0	-9.04233E0	4.60148E-3	9.48429E-2	2.73605E1	-3.2649E1	-3.2626E1	2.68221E1	1.20226E-7	2.52867E-3	2.52867E-3	6.31837E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.82649E-1	-8.97241E-1	-9.04679E0	-9.042E0	4.93526E-3	9.46999E-2	2.73676E1	-3.26446E1	-3.2596E1	2.68082E1	1.19851E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-8.82673E-1	-8.97312E-1	-9.04672E0	-9.04212E0	4.93526E-3	9.47952E-2	2.74108E1	-3.26657E1	-3.2617E1	2.68382E1	1.19913E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.01609E-1