[Scan]
initial_time=2016-01-18T19:16:19
final_time=2016-01-18T19:16:38
ip_count=19
run=1024
dataset=5
scan=329
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.82196E-1
ql1_imon=1.36868E-8
ql2_vset=
ql2_vmon=-8.97455E-1
ql2_imon=1.91863E-9
ql3_vset=
ql3_vmon=-9.04639E0
ql3_imon=1.03431E-9
ql4_vset=
ql4_vmon=-9.0421E0
ql4_imon=1.71185E-11
mult1=-9.84875E-9
mult2=-2.8244E-9
rf_tmon=-3.38888E-3
rf_agc=3.34598E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=1.73502E-9
bslens_vset=-6.2E0
bslens_vmon=-6.54717E0
bslens_imon=1.25078E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18835E1
lens5a_imon=2.02381E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12674E2
lens4a_imon=2.05969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=3.16434E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.0113E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03131E1
cs_ea1_imon=1.09085E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4753E0
lens1_imon=4.02299E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04784E1
cs_ea2_imon=1.31399E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=3.03568E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.37751E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.26355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.13059E1
os_ea1_imon=2.27399E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.00649E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92104E2
cs_nozzle_imon=1.94062E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=1.97179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.40168E-8
tplens_vset=1.4E-1
tplens_vmon=1.62581E0
tplens_imon=-1.26547E-6
iondef3_vset=-3.249E1
iondef3_vmon=-3.26032E1
iondef3_imon=1.52524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.64276E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03018E2
lens6_imon=2.97654E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=4.14096E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.1109E0
ionrepsh_imon=8.00647E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34703E1
lens5b_imon=2.26065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.14344E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.59277E0
os_ea2_imon=-9.87892E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.05957E2
lens4b_imon=2.0014E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.1629E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.37668E-1
os_ef2bup_imon=-5.1603E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11099E1
os_restr2_imon=3.45482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.36129E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.08243E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.14204E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.10792E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.30874E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=8.0224E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13975E0
cs_ionaccel_imon=-6.66154E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47605E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.86443E-6
window_vset=0.0E0
window_vmon=2.5098E-1
window_imon=-8.96807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82678E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86999E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92503E3
multa_neg_imon=9.27541E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93671E3
defgrida_imon=7.89471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.49866E3
multb_neg_imon=6.82044E-5
defgridb_vset=0.0E0
defgridb_vmon=-2.70083E0
defgridb_imon=6.19678E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.4391E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08044E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66951E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31718E1
cs_fil1_imon=7.37108E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.03804E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69622E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67989E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.17972E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41252E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22658E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30182E-3
inlet_lpb_pmon=2.99348E-1
chamber_ion_pmon=1.20403E-7
chamber_cvt_pmon=2.5147E-3
foreline_cvt_pmon=2.5147E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.50883E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.82387E-1	-8.97121E-1	-9.04648E0	-9.04174E0	4.64916E-3	9.46522E-2	2.74169E1	-3.27552E1	-3.24974E1	2.68334E1	1.2026E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
2.0E0	3.1E1	2.0E0	3.16E2	1.6E2	-2.09472E0	-8.82459E-1	-8.97098E-1	-9.04651E0	-9.04171E0	4.45843E-3	9.4986E-2	2.72925E1	-3.26747E1	-3.26326E1	2.68094E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.82339E-1	-8.97217E-1	-9.0466E0	-9.04145E0	4.24385E-3	9.4676E-2	2.72727E1	-3.26671E1	-3.26272E1	2.68314E1	1.20724E-7	2.51136E-3	2.51136E-3	6.29067E-3	3.00942E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.82173E-1	-8.97288E-1	-9.04634E0	-9.04207E0	4.1008E-3	9.51052E-2	2.72612E1	-3.26494E1	-3.25972E1	2.68388E1	1.20078E-7	2.52301E-3	2.52301E-3	6.29185E-3	3.02728E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.82506E-1	-8.96931E-1	-9.0466E0	-9.04195E0	4.14848E-3	9.52482E-2	2.72618E1	-3.26831E1	-3.25984E1	2.68454E1	1.19766E-7	2.52697E-3	2.52697E-3	6.29067E-3	3.03081E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.82721E-1	-8.9705E-1	-9.04629E0	-9.04169E0	4.33922E-3	9.50336E-2	2.72811E1	-3.26224E1	-3.26014E1	2.6837E1	1.20278E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.82602E-1	-8.97121E-1	-9.04632E0	-9.04181E0	4.74453E-3	9.49621E-2	2.72474E1	-3.26711E1	-3.25978E1	2.68495E1	1.21064E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.82602E-1	-8.96978E-1	-9.0461E0	-9.04195E0	4.43459E-3	9.51052E-2	2.72835E1	-3.26639E1	-3.25557E1	2.68286E1	1.21964E-7	2.52815E-3	2.52815E-3	6.32356E-3	2.99175E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.82435E-1	-8.97241E-1	-9.04639E0	-9.04193E0	4.76837E-3	9.53197E-2	2.73169E1	-3.26343E1	-3.2613E1	2.68208E1	1.21644E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.82554E-1	-8.97193E-1	-9.04646E0	-9.04207E0	4.91142E-3	9.53436E-2	2.73951E1	-3.26878E1	-3.26064E1	2.6828E1	1.2212E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.82339E-1	-8.97145E-1	-9.04665E0	-9.04176E0	4.69685E-3	9.50575E-2	2.739E1	-3.2652E1	-3.26567E1	2.68082E1	1.22014E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.82173E-1	-8.97217E-1	-9.04627E0	-9.04233E0	4.55379E-3	9.47475E-2	2.72996E1	-3.26462E1	-3.26242E1	2.68142E1	1.20487E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.82173E-1	-8.96668E-1	-9.04651E0	-9.04181E0	4.43459E-3	9.49383E-2	2.72691E1	-3.2659E1	-3.2626E1	2.68064E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.82006E-1	-8.96978E-1	-9.04663E0	-9.04181E0	4.72069E-3	9.50575E-2	2.72823E1	-3.26392E1	-3.26056E1	2.68166E1	1.19902E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.9892E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.82077E-1	-8.96907E-1	-9.04658E0	-9.04207E0	4.74453E-3	9.54628E-2	2.73448E1	-3.26771E1	-3.25912E1	2.68466E1	1.20069E-7	2.52757E-3	2.52757E-3	6.3074E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.82363E-1	-8.9736E-1	-9.04667E0	-9.042E0	4.88758E-3	9.53436E-2	2.73027E1	-3.26526E1	-3.26455E1	2.68372E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.02922E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.82101E-1	-8.97217E-1	-9.04691E0	-9.04181E0	4.31538E-3	9.5439E-2	2.72955E1	-3.2641E1	-3.26032E1	2.68532E1	1.22067E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.81934E-1	-8.97074E-1	-9.04648E0	-9.04212E0	4.22001E-3	9.52244E-2	2.7348E1	-3.26776E1	-3.26243E1	2.68267E1	1.2212E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.82077E-1	-8.97336E-1	-9.04641E0	-9.04193E0	4.22001E-3	9.50098E-2	2.72892E1	-3.26493E1	-3.26487E1	2.68169E1	1.21508E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.82196E-1	-8.97455E-1	-9.04639E0	-9.0421E0	4.05312E-3	9.52005E-2	2.73243E1	-3.26536E1	-3.26032E1	2.68094E1	1.20403E-7	2.5147E-3	2.5147E-3	6.30182E-3	2.99348E-1