[Scan]
initial_time=2016-01-18T19:17:12
final_time=2016-01-18T19:17:31
ip_count=19
run=1024
dataset=5
scan=331
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.82649E-1
ql1_imon=1.36111E-8
ql2_vset=
ql2_vmon=-8.97264E-1
ql2_imon=1.90817E-9
ql3_vset=
ql3_vmon=-9.04646E0
ql3_imon=8.13591E-10
ql4_vset=
ql4_vmon=-9.04188E0
ql4_imon=-3.14713E-12
mult1=-1.03235E-8
mult2=-2.82783E-9
rf_tmon=-3.95623E-3
rf_agc=3.35984E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.66916E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70974E0
bslens_imon=2.24266E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18345E1
lens5a_imon=1.95194E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.05642E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53684E1
cs_ef1b_imon=3.16601E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04694E2
lens23_imon=1.02277E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03887E1
cs_ea1_imon=1.0377E-5
lens1_vset=-5.0E0
lens1_vmon=-5.332E0
lens1_imon=3.07695E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64904E1
os_ef1alow_imon=2.99746E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04304E1
cs_ea2_imon=1.41E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=3.03465E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.37825E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11552E1
os_restr1_imon=4.27809E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14564E1
os_ea1_imon=2.29921E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63705E1
os_ef1bup_imon=3.08122E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.14086E0
cs_ionrep_imon=9.15683E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91982E2
cs_nozzle_imon=1.94119E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01919E1
cs_anode1_imon=1.97574E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.40658E-8
tplens_vset=1.4E-1
tplens_vmon=1.75847E0
tplens_imon=-4.34017E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.4837E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26938E1
iondef2_imon=1.61475E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03073E2
lens6_imon=2.98315E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.10087E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20517E0
ionrepsh_imon=7.98883E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32922E1
lens5b_imon=2.19006E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74727E1
cs_ef2b_imon=3.14134E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.65012E0
os_ea2_imon=-4.79207E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00147E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7098E1
cs_ef2a_imon=3.17366E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09974E0
os_ef2alow_imon=-2.39039E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.46464E-1
os_ef2bup_imon=-5.19492E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1077E1
os_restr2_imon=3.44716E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22956E2
cs_ionfoca_imon=6.28885E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.08243E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73596E1
iondef1_imon=1.19447E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68169E1
iondef4_imon=1.10832E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.27109E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=8.02323E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-1.01072E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47664E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56608E1
einzel_imon=7.69131E-6
window_vset=0.0E0
window_vmon=2.81978E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82696E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.85452E1
mask2_imon=-6.97946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92577E3
multa_neg_imon=9.68522E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.34111E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50051E3
multb_neg_imon=7.20668E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.90823E0
defgridb_imon=6.80344E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.42183E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08418E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66857E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3177E1
cs_fil1_imon=7.91875E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.5637E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69776E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.87934E-2
os_fil2_imon=-2.55334E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.10091E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31025E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08988E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22766E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.60944E-1
res40_imon=-2.30004E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.81982E-1	-8.96835E-1	-9.04653E0	-9.0416E0	4.14848E-3	9.49144E-2	2.72809E1	-3.26638E1	-3.27222E1	2.68406E1	1.19991E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.00852E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.82077E-1	-8.96955E-1	-9.04672E0	-9.04183E0	4.26769E-3	9.49383E-2	2.73286E1	-3.26559E1	-3.26247E1	2.68004E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.82339E-1	-8.97145E-1	-9.04691E0	-9.04195E0	4.22001E-3	9.47714E-2	2.73125E1	-3.26596E1	-3.26106E1	2.68278E1	1.20045E-7	2.52179E-3	2.52179E-3	6.3074E-3	3.00794E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.82387E-1	-8.97145E-1	-9.04667E0	-9.04195E0	4.12464E-3	9.54151E-2	2.73281E1	-3.26537E1	-3.26201E1	2.68352E1	1.20092E-7	2.51393E-3	2.51393E-3	6.3074E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.82316E-1	-8.97121E-1	-9.0466E0	-9.04176E0	3.98159E-3	9.47952E-2	2.73273E1	-3.26494E1	-3.26008E1	2.68214E1	1.19841E-7	2.51182E-3	2.51182E-3	6.31269E-3	3.00852E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.82268E-1	-8.97074E-1	-9.04658E0	-9.04186E0	4.36306E-3	9.48191E-2	2.72727E1	-3.2652E1	-3.26585E1	2.6803E1	1.20069E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.82483E-1	-8.97121E-1	-9.04646E0	-9.04169E0	4.29153E-3	9.50575E-2	2.7346E1	-3.26627E1	-3.26398E1	2.68112E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.82411E-1	-8.97193E-1	-9.04679E0	-9.04174E0	4.43459E-3	9.49383E-2	2.72973E1	-3.2638E1	-3.26188E1	2.68436E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.82244E-1	-8.97217E-1	-9.04677E0	-9.0416E0	4.50611E-3	9.52482E-2	2.73169E1	-3.26354E1	-3.25877E1	2.68352E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.82483E-1	-8.97431E-1	-9.04675E0	-9.04186E0	4.36306E-3	9.52005E-2	2.73159E1	-3.2632E1	-3.25713E1	2.6816E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.82483E-1	-8.97336E-1	-9.04636E0	-9.04186E0	4.72069E-3	9.52244E-2	2.7352E1	-3.26723E1	-3.25954E1	2.6816E1	1.19953E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.82339E-1	-8.97217E-1	-9.0467E0	-9.04167E0	4.60148E-3	9.52482E-2	2.73327E1	-3.26633E1	-3.2632E1	2.68695E1	1.19766E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.0041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.82483E-1	-8.97336E-1	-9.04658E0	-9.04145E0	4.3869E-3	9.54628E-2	2.73237E1	-3.26615E1	-3.26404E1	2.6834E1	1.2026E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.82721E-1	-8.97241E-1	-9.04646E0	-9.04148E0	4.52995E-3	9.50098E-2	2.73564E1	-3.26195E1	-3.26048E1	2.68065E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.82626E-1	-8.97217E-1	-9.04672E0	-9.04183E0	4.72069E-3	9.49383E-2	2.73183E1	-3.26524E1	-3.26386E1	2.68472E1	1.20017E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.82435E-1	-8.97312E-1	-9.04663E0	-9.04169E0	4.62532E-3	9.47714E-2	2.73405E1	-3.26603E1	-3.26344E1	2.68316E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01085E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.82292E-1	-8.97002E-1	-9.04677E0	-9.04167E0	4.88758E-3	9.48906E-2	2.73087E1	-3.26482E1	-3.26416E1	2.68226E1	1.198E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.82435E-1	-8.96931E-1	-9.04648E0	-9.04174E0	4.72069E-3	9.51767E-2	2.73196E1	-3.26753E1	-3.25692E1	2.68169E1	1.20122E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.8253E-1	-8.96883E-1	-9.04651E0	-9.04207E0	4.50611E-3	9.50098E-2	2.72855E1	-3.2615E1	-3.26083E1	2.68313E1	1.19851E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.82649E-1	-8.97264E-1	-9.04646E0	-9.04188E0	4.52995E-3	9.50098E-2	2.73596E1	-3.26938E1	-3.2626E1	2.68169E1	1.19809E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02396E-1