[Scan]
initial_time=2016-01-18T19:17:39
final_time=2016-01-18T19:17:58
ip_count=19
run=1024
dataset=5
scan=332
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.82149E-1
ql1_imon=1.36516E-8
ql2_vset=
ql2_vmon=-8.96978E-1
ql2_imon=1.91211E-9
ql3_vset=
ql3_vmon=-9.04648E0
ql3_imon=7.59542E-10
ql4_vset=
ql4_vmon=-9.04202E0
ql4_imon=1.97291E-11
mult1=-9.9812E-9
mult2=-2.73258E-9
rf_tmon=-3.34081E-3
rf_agc=3.35739E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.66215E-9
bslens_vset=-6.2E0
bslens_vmon=-6.59043E0
bslens_imon=2.15563E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19652E1
lens5a_imon=2.044E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12552E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.16614E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.01825E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04465E1
cs_ea1_imon=1.10274E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45007E0
lens1_imon=2.94872E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03426E1
cs_ea2_imon=1.31003E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.04541E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.3816E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.26679E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14104E1
os_ea1_imon=2.33888E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64476E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=9.83057E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91974E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=1.95809E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.39339E-8
tplens_vset=1.4E-1
tplens_vmon=1.60418E0
tplens_imon=-5.48088E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.5494E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.97946E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=4.08986E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24429E0
ionrepsh_imon=8.60128E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34096E1
lens5b_imon=2.21271E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.13983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53208E0
os_ea2_imon=-9.69867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06052E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.17371E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.28433E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.55087E-1
os_ef2bup_imon=-5.1639E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11129E1
os_restr2_imon=3.45482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.34362E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.08063E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.11103E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.28237E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=8.03383E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-9.29243E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.95093E-6
window_vset=0.0E0
window_vmon=2.52181E-1
window_imon=-7.59857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82705E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86807E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.3756E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.84207E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=6.62937E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.79555E0
defgridb_imon=6.34098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33237E1
os_fil1_imon=9.43808E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07822E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66898E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31749E1
cs_fil1_imon=6.95061E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0963E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69808E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95074E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.18616E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22655E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18157E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.82101E-1	-8.97241E-1	-9.04636E0	-9.04219E0	4.62532E-3	9.46283E-2	2.72579E1	-3.25859E1	-3.26832E1	2.68151E1	1.20069E-7	2.51552E-3	2.51552E-3	6.28006E-3	3.00824E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.82268E-1	-8.96907E-1	-9.04651E0	-9.04214E0	4.72069E-3	9.48191E-2	2.73165E1	-3.26687E1	-3.26338E1	2.68454E1	1.19851E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.82387E-1	-8.97408E-1	-9.04655E0	-9.04191E0	4.79221E-3	9.52244E-2	2.73346E1	-3.26838E1	-3.26248E1	2.68545E1	1.19705E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00824E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.82292E-1	-8.97121E-1	-9.04672E0	-9.04195E0	4.86374E-3	9.50575E-2	2.73128E1	-3.26555E1	-3.26071E1	2.68169E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.82268E-1	-8.97026E-1	-9.04653E0	-9.04212E0	4.72069E-3	9.51767E-2	2.73057E1	-3.26741E1	-3.26326E1	2.6819E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.82268E-1	-8.97002E-1	-9.04658E0	-9.04179E0	4.673E-3	9.4986E-2	2.73424E1	-3.26428E1	-3.2602E1	2.684E1	1.20517E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.82339E-1	-8.97074E-1	-9.0462E0	-9.04181E0	4.29153E-3	9.50575E-2	2.72931E1	-3.2641E1	-3.26434E1	2.68358E1	1.20403E-7	2.52473E-3	2.52473E-3	6.31299E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.82268E-1	-8.97002E-1	-9.04636E0	-9.04207E0	4.43459E-3	9.52721E-2	2.72823E1	-3.26651E1	-3.26386E1	2.6837E1	1.20055E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.82196E-1	-8.97169E-1	-9.04639E0	-9.04191E0	4.36306E-3	9.51052E-2	2.72985E1	-3.26651E1	-3.26068E1	2.68184E1	1.19601E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.82363E-1	-8.97264E-1	-9.04617E0	-9.04214E0	4.52995E-3	9.52244E-2	2.73086E1	-3.26632E1	-3.26296E1	2.6828E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02922E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.8222E-1	-8.97217E-1	-9.04636E0	-9.04157E0	4.673E-3	9.51529E-2	2.73571E1	-3.26903E1	-3.26542E1	2.68484E1	1.20826E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.82244E-1	-8.97264E-1	-9.04634E0	-9.04217E0	4.74453E-3	9.4986E-2	2.72835E1	-3.26543E1	-3.2629E1	2.68388E1	1.2067E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.0041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.82316E-1	-8.97193E-1	-9.0467E0	-9.04195E0	4.79221E-3	9.4986E-2	2.73213E1	-3.26723E1	-3.26086E1	2.68496E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.82339E-1	-8.97551E-1	-9.04686E0	-9.04233E0	4.72069E-3	9.4986E-2	2.73287E1	-3.26602E1	-3.26119E1	2.68382E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.81815E-1	-8.97312E-1	-9.04682E0	-9.04207E0	4.91142E-3	9.50098E-2	2.73387E1	-3.26452E1	-3.26549E1	2.68382E1	1.198E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01738E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.82268E-1	-8.9736E-1	-9.04632E0	-9.04217E0	4.57764E-3	9.49621E-2	2.72898E1	-3.26555E1	-3.26095E1	2.68192E1	1.19913E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00302E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.82149E-1	-8.97241E-1	-9.04629E0	-9.04193E0	4.57764E-3	9.52721E-2	2.73123E1	-3.26518E1	-3.26609E1	2.68412E1	1.2026E-7	2.52599E-3	2.52599E-3	6.33436E-3	2.97647E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.82387E-1	-8.97527E-1	-9.04653E0	-9.04176E0	4.55379E-3	9.50336E-2	2.73228E1	-3.26555E1	-3.2629E1	2.6816E1	1.19757E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.97704E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.82268E-1	-8.97121E-1	-9.04653E0	-9.04207E0	4.72069E-3	9.48429E-2	2.73287E1	-3.26744E1	-3.26313E1	2.68412E1	1.198E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.82149E-1	-8.96978E-1	-9.04648E0	-9.04202E0	4.60148E-3	9.52721E-2	2.73087E1	-3.26711E1	-3.2638E1	2.68124E1	1.19697E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.01223E-1