[Scan]
initial_time=2016-01-18T19:18:32
final_time=2016-01-18T19:18:51
ip_count=19
run=1024
dataset=5
scan=334
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-8.82149E-1
ql1_imon=1.35399E-8
ql2_vset=
ql2_vmon=-8.9736E-1
ql2_imon=1.87806E-9
ql3_vset=
ql3_vmon=-9.0462E0
ql3_imon=6.80709E-10
ql4_vset=
ql4_vmon=-9.0421E0
ql4_imon=3.9041E-11
mult1=-1.06434E-8
mult2=-2.91223E-9
rf_tmon=-3.10048E-3
rf_agc=3.32735E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.69904E-9
bslens_vset=-6.2E0
bslens_vmon=-6.72742E0
bslens_imon=2.718E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.96973E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12425E2
lens4a_imon=2.04833E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=3.16326E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02528E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=1.07679E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38638E0
lens1_imon=2.53415E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03522E1
cs_ea2_imon=1.3778E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84676E1
cs_ef1a_imon=3.03532E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.37648E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.27544E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15696E1
os_ea1_imon=2.367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20884E0
cs_ionrep_imon=9.25018E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=1.96566E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.40042E-8
tplens_vset=1.4E-1
tplens_vmon=1.70873E0
tplens_imon=6.11494E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26326E1
iondef3_imon=1.48451E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26789E1
iondef2_imon=1.55985E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03021E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=4.07579E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30858E0
ionrepsh_imon=8.65175E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33453E1
lens5b_imon=2.14133E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74459E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58435E0
os_ea2_imon=-2.63296E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00673E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.096E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.49081E-1
os_ef2bup_imon=-5.07741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11057E1
os_restr2_imon=3.46455E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.26756E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.0745E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73466E1
iondef1_imon=1.11175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.10828E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.28222E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=8.00574E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-8.39144E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02127E2
cs_ionfocb_imon=1.47475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.38366E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82705E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.54503E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.33737E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.52701E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18502E0
defgridb_imon=6.04898E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3325E1
os_fil1_imon=9.43766E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07383E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66907E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.318E1
cs_fil1_imon=6.95662E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.05065E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69741E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.01344E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.73688E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22735E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.08546E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.81529E-1	-8.97288E-1	-9.04682E0	-9.04202E0	4.48227E-3	9.50813E-2	2.73576E1	-3.26773E1	-3.257E1	2.68364E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.81815E-1	-8.9736E-1	-9.04679E0	-9.04188E0	4.45843E-3	9.51529E-2	2.73141E1	-3.26705E1	-3.26212E1	2.68076E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.8191E-1	-8.97121E-1	-9.04627E0	-9.04183E0	4.45843E-3	9.48906E-2	2.73287E1	-3.26478E1	-3.26001E1	2.68343E1	1.20278E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.81982E-1	-8.9736E-1	-9.04627E0	-9.04174E0	4.3869E-3	9.5129E-2	2.73327E1	-3.26771E1	-3.25978E1	2.68124E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.81767E-1	-8.97288E-1	-9.04639E0	-9.04179E0	4.45843E-3	9.50098E-2	2.73009E1	-3.26819E1	-3.26392E1	2.68244E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.81505E-1	-8.9736E-1	-9.04634E0	-9.04183E0	4.64916E-3	9.48906E-2	2.73051E1	-3.26729E1	-3.26062E1	2.68298E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.81791E-1	-8.97026E-1	-9.04639E0	-9.04219E0	4.41074E-3	9.52244E-2	2.7321E1	-3.26366E1	-3.2603E1	2.68088E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.81672E-1	-8.97074E-1	-9.04639E0	-9.04193E0	4.24385E-3	9.53197E-2	2.73173E1	-3.2645E1	-3.26285E1	2.68352E1	1.19646E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.81767E-1	-8.96907E-1	-9.0467E0	-9.04183E0	4.3869E-3	9.51767E-2	2.73139E1	-3.26543E1	-3.26278E1	2.6822E1	1.20137E-7	2.52139E-3	2.52139E-3	6.32978E-3	3.01209E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.81886E-1	-8.96835E-1	-9.04648E0	-9.04167E0	4.22001E-3	9.52005E-2	2.73405E1	-3.26705E1	-3.26392E1	2.68328E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99941E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.82268E-1	-8.96883E-1	-9.04627E0	-9.04171E0	4.43459E-3	9.49621E-2	2.73237E1	-3.26446E1	-3.26296E1	2.68117E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.81934E-1	-8.97121E-1	-9.0462E0	-9.04167E0	4.24385E-3	9.48429E-2	2.73249E1	-3.26476E1	-3.26374E1	2.68444E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.82339E-1	-8.96978E-1	-9.04636E0	-9.04138E0	4.43459E-3	9.50098E-2	2.73063E1	-3.26711E1	-3.26128E1	2.68352E1	1.19861E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.03185E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.82173E-1	-8.97312E-1	-9.04641E0	-9.04162E0	4.45843E-3	9.5129E-2	2.73291E1	-3.26332E1	-3.26278E1	2.6825E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01871E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.82149E-1	-8.9705E-1	-9.04653E0	-9.04174E0	4.14848E-3	9.51529E-2	2.73315E1	-3.26338E1	-3.26308E1	2.68268E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.81934E-1	-8.97384E-1	-9.04634E0	-9.04176E0	4.3869E-3	9.53436E-2	2.73057E1	-3.26981E1	-3.26014E1	2.68232E1	1.20069E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.9952E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.8222E-1	-8.97598E-1	-9.04646E0	-9.04188E0	4.55379E-3	9.52244E-2	2.73249E1	-3.26651E1	-3.26266E1	2.68118E1	1.19653E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.82101E-1	-8.97455E-1	-9.0462E0	-9.04207E0	4.57764E-3	9.51529E-2	2.73234E1	-3.26337E1	-3.26024E1	2.68285E1	1.19601E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.82173E-1	-8.97503E-1	-9.04634E0	-9.04217E0	4.26769E-3	9.51052E-2	2.73428E1	-3.26838E1	-3.26178E1	2.68358E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.04582E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.82149E-1	-8.9736E-1	-9.0462E0	-9.0421E0	4.57764E-3	9.5129E-2	2.73466E1	-3.26789E1	-3.26326E1	2.68244E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01871E-1