[Scan]
initial_time=2016-01-18T19:18:58
final_time=2016-01-18T19:19:18
ip_count=19
run=1024
dataset=5
scan=335
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.81791E-1
ql1_imon=1.35657E-8
ql2_vset=
ql2_vmon=-8.97074E-1
ql2_imon=1.92821E-9
ql3_vset=
ql3_vmon=-9.04672E0
ql3_imon=5.93817E-10
ql4_vset=
ql4_vmon=-9.04191E0
ql4_imon=7.37905E-12
mult1=-1.00151E-8
mult2=-2.81751E-9
rf_tmon=-3.2177E-3
rf_agc=3.4216E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.68298E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68657E0
bslens_imon=2.134E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19448E1
lens5a_imon=2.01407E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05302E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=3.16542E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04677E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04363E1
cs_ea1_imon=1.08472E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36475E0
lens1_imon=2.96314E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.99135E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.3659E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84646E1
cs_ef1a_imon=3.05009E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.37904E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.27616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14939E1
os_ea1_imon=2.32302E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19862E0
cs_ionrep_imon=9.52776E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91968E2
cs_nozzle_imon=1.93795E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=1.97251E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.39336E-8
tplens_vset=1.4E-1
tplens_vmon=1.67989E0
tplens_imon=-2.48877E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.49172E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26334E1
iondef2_imon=1.59265E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03023E2
lens6_imon=2.98299E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.10383E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22626E0
ionrepsh_imon=8.43185E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33574E1
lens5b_imon=2.17305E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.62581E0
os_ea2_imon=-5.01223E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.16182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.36362E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34665E-1
os_ef2bup_imon=-5.10264E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.46563E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.2863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.08892E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73559E1
iondef1_imon=1.12581E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68188E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.24442E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=8.01615E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-8.82392E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.4746E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=2.48577E-1
window_imon=-7.56253E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82699E2
mask1_imon=2.39297E-4
mask2_vset=0.0E0
mask2_vmon=-1.87011E1
mask2_imon=-5.32807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=8.15787E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.99708E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.80962E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50081E0
defgridb_imon=6.29051E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.43754E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0802E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6681E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31801E1
cs_fil1_imon=7.35906E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.86382E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6954E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69279E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18737E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=9.94106E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35245E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22683E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.02115E-1
chamber_ion_pmon=1.1979E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.23563E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.81743E-1	-8.96955E-1	-9.04675E0	-9.04138E0	4.36306E-3	9.51052E-2	2.73328E1	-3.2708E1	-3.26183E1	2.68319E1	1.22014E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01347E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.82006E-1	-8.97169E-1	-9.0467E0	-9.04181E0	4.36306E-3	9.50813E-2	2.73265E1	-3.26572E1	-3.26474E1	2.68182E1	1.22016E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.82053E-1	-8.97121E-1	-9.04655E0	-9.04191E0	4.74453E-3	9.52244E-2	2.73399E1	-3.26626E1	-3.26266E1	2.68412E1	1.2212E-7	2.52362E-3	2.52362E-3	6.31299E-3	3.00676E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.8203E-1	-8.97193E-1	-9.04655E0	-9.04176E0	4.36306E-3	9.51052E-2	2.73297E1	-3.26591E1	-3.26338E1	2.68328E1	1.21497E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.81982E-1	-8.97169E-1	-9.04653E0	-9.04179E0	4.48227E-3	9.48906E-2	2.73345E1	-3.26585E1	-3.262E1	2.6831E1	1.19965E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.81886E-1	-8.97074E-1	-9.04634E0	-9.04174E0	4.60148E-3	9.49144E-2	2.7324E1	-3.26714E1	-3.26378E1	2.68394E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.82149E-1	-8.96716E-1	-9.04648E0	-9.04195E0	4.72069E-3	9.51052E-2	2.73045E1	-3.26242E1	-3.26446E1	2.6834E1	1.20004E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.81886E-1	-8.97026E-1	-9.04663E0	-9.0416E0	4.72069E-3	9.51052E-2	2.73375E1	-3.26464E1	-3.26152E1	2.68436E1	1.19861E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.82077E-1	-8.97598E-1	-9.04629E0	-9.04169E0	4.69685E-3	9.46999E-2	2.72756E1	-3.2662E1	-3.26095E1	2.68271E1	1.19749E-7	2.52599E-3	2.52599E-3	6.3074E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.81839E-1	-8.96978E-1	-9.04644E0	-9.04191E0	4.69685E-3	9.48429E-2	2.73364E1	-3.26531E1	-3.26195E1	2.68304E1	1.19913E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.02133E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.81886E-1	-8.97336E-1	-9.04632E0	-9.04224E0	4.72069E-3	9.50098E-2	2.73236E1	-3.26249E1	-3.26176E1	2.68356E1	1.19902E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01738E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.82101E-1	-8.97098E-1	-9.0467E0	-9.04229E0	4.64916E-3	9.51767E-2	2.73468E1	-3.26525E1	-3.25962E1	2.67926E1	1.20404E-7	2.51345E-3	2.51345E-3	6.3074E-3	3.02342E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.8222E-1	-8.97026E-1	-9.0466E0	-9.0416E0	4.50611E-3	9.51529E-2	2.73213E1	-3.26543E1	-3.26266E1	2.68412E1	1.1992E-7	2.51468E-3	2.51468E-3	6.31949E-3	3.00025E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.8203E-1	-8.97384E-1	-9.04677E0	-9.04167E0	4.72069E-3	9.49383E-2	2.73254E1	-3.26805E1	-3.25988E1	2.68609E1	1.19965E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.81982E-1	-8.97098E-1	-9.04689E0	-9.0421E0	4.36306E-3	9.49144E-2	2.7298E1	-3.26467E1	-3.2613E1	2.6834E1	1.20192E-7	2.51498E-3	2.51498E-3	6.32858E-3	3.006E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.81743E-1	-8.97169E-1	-9.04684E0	-9.04169E0	4.31538E-3	9.45091E-2	2.73069E1	-3.26456E1	-3.26101E1	2.68232E1	1.19902E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.99686E-1
2.0E1	6.0E0	2.0E0	8.08E2	5.58E2	-2.09503E0	-8.81863E-1	-8.97455E-1	-9.04703E0	-9.04217E0	4.26769E-3	9.47237E-2	2.73112E1	-3.26499E1	-3.26383E1	2.68325E1	1.19819E-7	2.51693E-3	2.51693E-3	6.35223E-3	3.02813E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.8172E-1	-8.97026E-1	-9.04658E0	-9.04198E0	4.17233E-3	9.50098E-2	2.73163E1	-3.26449E1	-3.2639E1	2.6814E1	1.21098E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.01742E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.82149E-1	-8.97074E-1	-9.04665E0	-9.04186E0	4.24385E-3	9.49621E-2	2.73514E1	-3.26654E1	-3.26081E1	2.68545E1	1.2062E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.81791E-1	-8.97074E-1	-9.04672E0	-9.04191E0	4.14848E-3	9.4986E-2	2.73559E1	-3.26334E1	-3.26119E1	2.68188E1	1.1979E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.02115E-1