[Scan]
initial_time=2016-01-18T19:19:52
final_time=2016-01-18T19:20:11
ip_count=19
run=1024
dataset=5
scan=337
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08727E-4
ql1_vset=
ql1_vmon=-8.81553E-1
ql1_imon=1.34715E-8
ql2_vset=
ql2_vmon=-8.97384E-1
ql2_imon=1.92232E-9
ql3_vset=
ql3_vmon=-9.04634E0
ql3_imon=4.96423E-10
ql4_vset=
ql4_vmon=-9.04193E0
ql4_imon=3.73244E-11
mult1=-9.94144E-9
mult2=-2.74226E-9
rf_tmon=-5.94794E-3
rf_agc=3.23244E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.72472E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.4296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19406E1
lens5a_imon=2.02164E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05133E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=3.1647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.01948E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.047E1
cs_ea1_imon=1.10202E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4002E0
lens1_imon=3.02442E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.99495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03546E1
cs_ea2_imon=1.34463E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=3.03784E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.38268E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=4.2722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15029E1
os_ea1_imon=2.35258E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=9.35111E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93654E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=1.96458E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.40543E-8
tplens_vset=1.4E-1
tplens_vmon=1.63302E0
tplens_imon=-1.73173E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26138E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.59085E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.08076E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26472E0
ionrepsh_imon=8.37778E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34096E1
lens5b_imon=2.19324E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.60779E0
os_ea2_imon=-8.18459E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.17731E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2986E-1
os_ef2bup_imon=-5.09182E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.45446E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.29207E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.09072E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73265E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68292E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.26519E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=8.03313E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-9.58075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.87164E-6
window_vset=0.0E0
window_vmon=2.71402E-1
window_imon=-6.69758E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82713E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.87065E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.04394E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.87451E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=6.80602E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.67225E0
defgridb_imon=6.17515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33229E1
os_fil1_imon=9.44258E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07774E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66757E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31763E1
cs_fil1_imon=6.83048E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.85781E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6968E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86045E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18737E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.16941E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55067E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22788E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.98342E-1
chamber_ion_pmon=1.19841E-7
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.38869E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0934E0	-8.81743E-1	-8.9674E-1	-9.04663E0	-9.04195E0	4.45843E-3	9.48429E-2	2.73283E1	-3.26793E1	-3.25884E1	2.68175E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.99E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.8203E-1	-8.96621E-1	-9.04639E0	-9.04179E0	4.24385E-3	9.50575E-2	2.73506E1	-3.26566E1	-3.26123E1	2.68269E1	1.20092E-7	2.51709E-3	2.51709E-3	6.29157E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.81696E-1	-8.96859E-1	-9.04665E0	-9.04167E0	4.14848E-3	9.50813E-2	2.73254E1	-3.26341E1	-3.26046E1	2.68389E1	1.19829E-7	2.50705E-3	2.50705E-3	6.33021E-3	3.02426E-1
4.0E0	6.0E0	1.0E0	6.55E2	3.98E2	-2.09402E0	-8.81386E-1	-8.97002E-1	-9.04655E0	-9.04222E0	4.17233E-3	9.47714E-2	2.73761E1	-3.26627E1	-3.25954E1	2.68569E1	1.1974E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.8141E-1	-8.9705E-1	-9.04636E0	-9.04152E0	4.36306E-3	9.51052E-2	2.72868E1	-3.26897E1	-3.25806E1	2.6813E1	1.19766E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.00676E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.8172E-1	-8.97074E-1	-9.0462E0	-9.04171E0	4.31538E-3	9.52959E-2	2.73183E1	-3.26452E1	-3.26302E1	2.68244E1	1.198E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.81648E-1	-8.97169E-1	-9.04639E0	-9.04157E0	4.36306E-3	9.50098E-2	2.73249E1	-3.26741E1	-3.26188E1	2.68169E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.81767E-1	-8.97026E-1	-9.0462E0	-9.04202E0	4.50611E-3	9.4676E-2	2.72914E1	-3.26476E1	-3.2618E1	2.68199E1	1.19925E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.02545E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.81815E-1	-8.97098E-1	-9.04629E0	-9.04188E0	4.57764E-3	9.47952E-2	2.73305E1	-3.26317E1	-3.25764E1	2.68367E1	1.20028E-7	2.51783E-3	2.51783E-3	6.323E-3	3.00494E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.81433E-1	-8.9705E-1	-9.04636E0	-9.04167E0	4.81606E-3	9.47952E-2	2.73363E1	-3.26368E1	-3.26452E1	2.68157E1	1.20281E-7	2.52106E-3	2.52106E-3	6.31321E-3	2.99811E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.81553E-1	-8.97074E-1	-9.04644E0	-9.04191E0	4.45843E-3	9.48906E-2	2.73263E1	-3.2662E1	-3.25953E1	2.68238E1	1.20311E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.81791E-1	-8.97098E-1	-9.04644E0	-9.04183E0	4.60148E-3	9.48191E-2	2.73363E1	-3.26699E1	-3.2614E1	2.68382E1	1.19861E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.98222E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.81481E-1	-8.97074E-1	-9.04658E0	-9.04233E0	4.55379E-3	9.49144E-2	2.73169E1	-3.26508E1	-3.26071E1	2.6852E1	1.19965E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.81433E-1	-8.96931E-1	-9.04665E0	-9.04183E0	4.62532E-3	9.47952E-2	2.73333E1	-3.26536E1	-3.2635E1	2.68004E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01995E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.8191E-1	-8.97217E-1	-9.04648E0	-9.04167E0	4.52995E-3	9.49621E-2	2.73345E1	-3.26627E1	-3.26092E1	2.68283E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.81839E-1	-8.97217E-1	-9.04634E0	-9.04171E0	4.52995E-3	9.49144E-2	2.73584E1	-3.26446E1	-3.26115E1	2.68253E1	1.19953E-7	2.51954E-3	2.51954E-3	6.28056E-3	3.0071E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.81839E-1	-8.97264E-1	-9.04636E0	-9.04219E0	4.48227E-3	9.50336E-2	2.73225E1	-3.26609E1	-3.26032E1	2.6831E1	1.19891E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.99845E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.81886E-1	-8.97336E-1	-9.04658E0	-9.04193E0	4.17233E-3	9.48191E-2	2.73159E1	-3.26765E1	-3.26128E1	2.68058E1	1.20137E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.98026E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.81553E-1	-8.97408E-1	-9.04639E0	-9.042E0	4.3869E-3	9.47714E-2	2.73486E1	-3.26724E1	-3.26347E1	2.68273E1	1.20174E-7	2.52647E-3	2.52647E-3	6.3074E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.81553E-1	-8.97384E-1	-9.04634E0	-9.04193E0	4.33922E-3	9.51529E-2	2.73265E1	-3.26554E1	-3.26138E1	2.68292E1	1.19841E-7	2.51498E-3	2.51498E-3	6.3074E-3	2.98342E-1