[Scan]
initial_time=2016-01-18T19:20:45
final_time=2016-01-18T19:21:05
ip_count=19
run=1024
dataset=5
scan=339
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0924E0
qbias_imon=-1.08775E-4
ql1_vset=
ql1_vmon=-8.81767E-1
ql1_imon=1.34928E-8
ql2_vset=
ql2_vmon=-8.9705E-1
ql2_imon=1.93243E-9
ql3_vset=
ql3_vmon=-9.04665E0
ql3_imon=5.03302E-10
ql4_vset=
ql4_vmon=-9.04202E0
ql4_imon=-4.91142E-12
mult1=-1.02581E-8
mult2=-2.7246E-9
rf_tmon=-4.97506E-3
rf_agc=3.32735E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.65884E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69158E0
bslens_imon=2.3132E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19282E1
lens5a_imon=1.99536E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53866E1
cs_ef1b_imon=3.15829E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04274E1
cs_ea1_imon=1.08326E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40264E0
lens1_imon=2.75208E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64706E1
os_ef1alow_imon=2.98066E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04327E1
cs_ea2_imon=1.38517E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84397E1
cs_ef1a_imon=3.03869E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.37548E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11572E1
os_restr1_imon=4.27042E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15111E1
os_ea1_imon=2.34718E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63685E1
os_ef1bup_imon=3.08328E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21257E0
cs_ionrep_imon=9.3814E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91962E2
cs_nozzle_imon=1.93816E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=1.96478E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.39593E-8
tplens_vset=1.4E-1
tplens_vmon=1.67624E0
tplens_imon=-3.16584E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2608E1
iondef3_imon=1.49135E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.58939E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03022E2
lens6_imon=2.9825E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.06694E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25741E0
ionrepsh_imon=8.36205E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.19215E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74643E1
cs_ef2b_imon=3.13282E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.61607E0
os_ea2_imon=-3.90912E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00382E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71069E1
cs_ef2a_imon=3.1636E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0808E0
os_ef2alow_imon=-2.44625E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.56594E-1
os_ef2bup_imon=-5.20977E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11023E1
os_restr2_imon=3.45764E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23008E2
cs_ionfoca_imon=6.25575E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01762E1
cs_anode2_imon=2.08544E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73345E1
iondef1_imon=1.12821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.10812E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.18739E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.99685E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12778E0
cs_ionaccel_imon=-9.21183E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.4758E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56617E1
einzel_imon=7.80815E-6
window_vset=0.0E0
window_vmon=2.75607E-1
window_imon=-8.29184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8268E2
mask1_imon=2.39197E-4
mask2_vset=0.0E0
mask2_vmon=-1.86108E1
mask2_imon=-6.48723E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9268E3
multa_neg_imon=7.2259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.68437E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50173E3
multb_neg_imon=6.7056E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4971E0
defgridb_imon=6.3552E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33233E1
os_fil1_imon=9.4321E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08391E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66802E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31785E1
cs_fil1_imon=7.86515E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.03303E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6974E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91439E-2
os_fil2_imon=-2.49068E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99134E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.14086E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29842E-1
cs_fil2_imon=-2.60863E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14211E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22853E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.97876E-1
res40_imon=-2.33302E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.81433E-1	-8.97312E-1	-9.04655E0	-9.04207E0	4.64916E-3	9.52005E-2	2.73219E1	-3.26729E1	-3.26591E1	2.68406E1	1.20278E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9952E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.8141E-1	-8.96907E-1	-9.04622E0	-9.04207E0	4.33922E-3	9.52721E-2	2.73192E1	-3.26327E1	-3.26444E1	2.68247E1	1.19913E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.81267E-1	-8.97169E-1	-9.04655E0	-9.04193E0	4.55379E-3	9.53197E-2	2.73364E1	-3.26642E1	-3.26179E1	2.68241E1	1.20174E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02396E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.81124E-1	-8.9705E-1	-9.04646E0	-9.04171E0	4.673E-3	9.51529E-2	2.73375E1	-3.26779E1	-3.25995E1	2.68175E1	1.19941E-7	2.51287E-3	2.51287E-3	6.33388E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.81124E-1	-8.96835E-1	-9.04634E0	-9.042E0	4.79221E-3	9.5439E-2	2.73187E1	-3.26408E1	-3.2613E1	2.68196E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.811E-1	-8.96955E-1	-9.04629E0	-9.042E0	4.69685E-3	9.51529E-2	2.73535E1	-3.26542E1	-3.26003E1	2.6834E1	1.20226E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.81243E-1	-8.97121E-1	-9.04658E0	-9.04157E0	4.43459E-3	9.53436E-2	2.73287E1	-3.26455E1	-3.26254E1	2.6834E1	1.19861E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.81076E-1	-8.97026E-1	-9.04658E0	-9.04171E0	4.22001E-3	9.5582E-2	2.73159E1	-3.26398E1	-3.259E1	2.68478E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.81886E-1	-8.97288E-1	-9.04667E0	-9.04181E0	4.50611E-3	9.52482E-2	2.73082E1	-3.26517E1	-3.2615E1	2.68256E1	1.19965E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-8.81505E-1	-8.97121E-1	-9.04663E0	-9.04186E0	4.48227E-3	9.50575E-2	2.73505E1	-3.26708E1	-3.26189E1	2.68244E1	1.20031E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.00942E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.8141E-1	-8.97312E-1	-9.04632E0	-9.04164E0	4.33922E-3	9.5129E-2	2.73559E1	-3.26658E1	-3.2585E1	2.68508E1	1.19749E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09333E0	-8.81696E-1	-8.96764E-1	-9.04636E0	-9.04226E0	4.52995E-3	9.48429E-2	2.73293E1	-3.26685E1	-3.26219E1	2.68304E1	1.20122E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.81982E-1	-8.96883E-1	-9.04629E0	-9.04214E0	4.33922E-3	9.53197E-2	2.73204E1	-3.26561E1	-3.26301E1	2.68204E1	1.20062E-7	2.51918E-3	2.51918E-3	6.29926E-3	2.99991E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.81433E-1	-8.96764E-1	-9.0462E0	-9.04212E0	4.57764E-3	9.54151E-2	2.7352E1	-3.26633E1	-3.26224E1	2.68376E1					
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.81577E-1	-8.97098E-1	-9.04658E0	-9.04217E0	4.14848E-3	9.51529E-2	2.73183E1	-3.26759E1	-3.25978E1	2.68076E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-8.81696E-1	-8.97002E-1	-9.04663E0	-9.04193E0	4.31538E-3	9.50813E-2	2.73246E1	-3.26767E1	-3.26136E1	2.68298E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09356E0	-8.81839E-1	-8.97002E-1	-9.04641E0	-9.04181E0	4.41074E-3	9.52959E-2	2.73009E1	-3.26398E1	-3.26332E1	2.68304E1	1.20106E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.9892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09302E0	-8.81815E-1	-8.96883E-1	-9.04658E0	-9.04198E0	4.26769E-3	9.5129E-2	2.7344E1	-3.26661E1	-3.26077E1	2.68621E1	1.19757E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.98481E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-8.81743E-1	-8.97074E-1	-9.0467E0	-9.04233E0	4.64916E-3	9.50098E-2	2.73279E1	-3.26506E1	-3.25846E1	2.6846E1	1.20055E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0924E0	-8.81767E-1	-8.9705E-1	-9.04665E0	-9.04202E0	4.48227E-3	9.51529E-2	2.73345E1	-3.26597E1	-3.2608E1	2.68142E1	1.19965E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00563E-1