[Scan]
initial_time=2016-01-18T19:21:12
final_time=2016-01-18T19:21:31
ip_count=19
run=1024
dataset=5
scan=340
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.81648E-1
ql1_imon=1.34737E-8
ql2_vset=
ql2_vmon=-8.96835E-1
ql2_imon=1.9492E-9
ql3_vset=
ql3_vmon=-9.04639E0
ql3_imon=4.90952E-10
ql4_vset=
ql4_vmon=-9.04179E0
ql4_imon=4.37737E-11
mult1=-9.31415E-9
mult2=-2.68907E-9
rf_tmon=-5.88591E-3
rf_agc=3.13893E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.69766E-9
bslens_vset=-6.2E0
bslens_vmon=-6.59404E0
bslens_imon=2.48728E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20458E1
lens5a_imon=2.02453E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=3.15749E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04555E2
lens23_imon=1.02052E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04628E1
cs_ea1_imon=1.09517E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44586E0
lens1_imon=2.81173E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03035E1
cs_ea2_imon=1.323E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8416E1
cs_ef1a_imon=3.05118E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.37795E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.26607E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15113E1
os_ea1_imon=2.38899E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62824E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26111E0
cs_ionrep_imon=9.74405E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93164E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=1.95016E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.39399E-8
tplens_vset=1.4E-1
tplens_vmon=1.65045E0
tplens_imon=-3.85865E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25943E1
iondef3_imon=1.52416E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26174E1
iondef2_imon=1.54723E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.08496E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2557E0
ionrepsh_imon=8.49674E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34174E1
lens5b_imon=2.17413E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4726E0
os_ea2_imon=-8.76138E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.47879E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=3.45482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23099E2
cs_ionfoca_imon=6.26035E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.07486E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73058E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68311E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.34379E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=8.00713E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15837E0
cs_ionaccel_imon=-8.24728E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.81758E-6
window_vset=0.0E0
window_vmon=2.72603E-1
window_imon=-7.59857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8267E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.87041E1
mask2_imon=-5.18391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=6.99708E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93763E3
defgrida_imon=6.89975E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.11965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=5.71372E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33207E1
os_fil1_imon=9.45231E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0829E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67009E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31804E1
cs_fil1_imon=7.03471E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.119E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69834E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.87335E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.01731E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22696E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.82718E-1
res40_imon=-2.42489E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.81934E-1	-8.97217E-1	-9.04677E0	-9.04205E0	4.72069E-3	9.50336E-2	2.73541E1	-3.2672E1	-3.25582E1	2.68319E1	1.20004E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.02769E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.82006E-1	-8.97098E-1	-9.0467E0	-9.042E0	4.57764E-3	9.46283E-2	2.73682E1	-3.26669E1	-3.2629E1	2.6828E1	1.19953E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.8172E-1	-8.97074E-1	-9.04655E0	-9.04214E0	4.55379E-3	9.50336E-2	2.73497E1	-3.2677E1	-3.26463E1	2.68534E1	1.19925E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00676E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.81624E-1	-8.96859E-1	-9.04694E0	-9.042E0	4.62532E-3	9.49144E-2	2.73188E1	-3.26431E1	-3.26613E1	2.68204E1	1.19941E-7	2.52342E-3	2.52342E-3	6.31269E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.81624E-1	-8.96907E-1	-9.04694E0	-9.04186E0	4.43459E-3	9.49383E-2	2.7346E1	-3.26681E1	-3.26627E1	2.68424E1	1.19979E-7	2.51783E-3	2.51783E-3	6.29703E-3	3.00741E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.81648E-1	-8.96978E-1	-9.04696E0	-9.04188E0	4.45843E-3	9.49383E-2	2.73033E1	-3.26675E1	-3.2623E1	2.68052E1	1.19965E-7	2.52757E-3	2.52757E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.81433E-1	-8.97264E-1	-9.04679E0	-9.04195E0	4.52995E-3	9.4986E-2	2.73159E1	-3.26428E1	-3.26494E1	2.6855E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.81338E-1	-8.97288E-1	-9.04665E0	-9.04202E0	4.22001E-3	9.49144E-2	2.73225E1	-3.26711E1	-3.26002E1	2.68412E1	1.20226E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.81314E-1	-8.97193E-1	-9.04667E0	-9.04229E0	4.55379E-3	9.46522E-2	2.73057E1	-3.26585E1	-3.26332E1	2.6807E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.8141E-1	-8.97288E-1	-9.04641E0	-9.04224E0	4.36306E-3	9.48906E-2	2.73281E1	-3.26555E1	-3.2626E1	2.68298E1	1.19697E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.81338E-1	-8.97217E-1	-9.04663E0	-9.04195E0	4.55379E-3	9.4986E-2	2.73243E1	-3.2632E1	-3.26392E1	2.6843E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.81338E-1	-8.97169E-1	-9.04651E0	-9.04212E0	4.43459E-3	9.52721E-2	2.73273E1	-3.26687E1	-3.26056E1	2.68659E1	1.20069E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.81219E-1	-8.97241E-1	-9.0466E0	-9.04176E0	4.33922E-3	9.5129E-2	2.73423E1	-3.26531E1	-3.26166E1	2.68094E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.81481E-1	-8.97169E-1	-9.04646E0	-9.04157E0	4.52995E-3	9.52721E-2	2.72845E1	-3.26461E1	-3.26508E1	2.68348E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00197E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.81481E-1	-8.97074E-1	-9.04646E0	-9.04193E0	4.72069E-3	9.51052E-2	2.73577E1	-3.26229E1	-3.26389E1	2.68262E1	1.20106E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.816E-1	-8.96907E-1	-9.04653E0	-9.04164E0	4.50611E-3	9.52244E-2	2.7347E1	-3.2659E1	-3.26077E1	2.68412E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.98222E-1
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-2.09356E0	-8.81886E-1	-8.96692E-1	-9.04644E0	-9.04167E0	4.57764E-3	9.54628E-2	2.73069E1	-3.2653E1	-3.2584E1	2.68244E1	1.19549E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.97704E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.81767E-1	-8.96955E-1	-9.04636E0	-9.04186E0	4.60148E-3	9.5129E-2	2.73325E1	-3.26523E1	-3.26501E1	2.68339E1	1.20363E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99686E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.81457E-1	-8.96788E-1	-9.0466E0	-9.04179E0	4.31538E-3	9.51767E-2	2.73389E1	-3.26909E1	-3.26107E1	2.68304E1	1.20019E-7	2.51649E-3	2.51649E-3	6.30507E-3	3.00663E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.81648E-1	-8.96835E-1	-9.04639E0	-9.04179E0	4.50611E-3	9.51052E-2	2.73058E1	-3.26174E1	-3.25943E1	2.68311E1