[Scan]
initial_time=2016-01-18T19:21:39
final_time=2016-01-18T19:21:58
ip_count=19
run=1024
dataset=5
scan=341
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.81386E-1
ql1_imon=1.35072E-8
ql2_vset=
ql2_vmon=-8.96716E-1
ql2_imon=1.90823E-9
ql3_vset=
ql3_vmon=-9.04629E0
ql3_imon=3.76773E-10
ql4_vset=
ql4_vmon=-9.04171E0
ql4_imon=1.19448E-11
mult1=-1.02236E-8
mult2=-2.87446E-9
rf_tmon=-4.28286E-3
rf_agc=3.27897E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.6925E-9
bslens_vset=-6.2E0
bslens_vmon=-6.71273E0
bslens_imon=2.72754E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19653E1
lens5a_imon=1.97609E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05267E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53894E1
cs_ef1b_imon=3.17698E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04686E2
lens23_imon=1.02476E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04386E1
cs_ea1_imon=1.07968E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34378E0
lens1_imon=2.57055E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64786E1
os_ef1alow_imon=2.98833E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04491E1
cs_ea2_imon=1.38675E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84577E1
cs_ef1a_imon=3.04043E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.37933E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11207E1
os_restr1_imon=4.26713E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15425E1
os_ea1_imon=2.38207E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63651E1
os_ef1bup_imon=3.08218E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19872E0
cs_ionrep_imon=9.32739E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91966E2
cs_nozzle_imon=1.93656E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01962E1
cs_anode1_imon=1.95938E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.39345E-8
tplens_vset=1.4E-1
tplens_vmon=1.70789E0
tplens_imon=-2.17595E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26162E1
iondef3_imon=1.48189E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26689E1
iondef2_imon=1.57232E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03E2
lens6_imon=2.98396E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=4.08396E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2971E0
ionrepsh_imon=8.5707E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.335E1
lens5b_imon=2.16951E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.60847E0
os_ea2_imon=-6.16349E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00701E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71284E1
cs_ef2a_imon=3.17007E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06502E0
os_ef2alow_imon=-2.23434E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.42764E-1
os_ef2bup_imon=-5.21947E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10982E1
os_restr2_imon=3.44316E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.25156E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01564E1
cs_anode2_imon=2.10189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73149E1
iondef1_imon=1.11924E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6828E1
iondef4_imon=1.10653E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.25396E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=8.0227E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13433E0
cs_ionaccel_imon=-9.06573E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56259E1
einzel_imon=7.81654E-6
window_vset=0.0E0
window_vmon=2.62528E-1
window_imon=-6.46041E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82696E2
mask1_imon=2.39329E-4
mask2_vset=0.0E0
mask2_vmon=-1.86768E1
mask2_imon=-6.17791E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.61934E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=5.90815E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.095E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41942E0
defgridb_imon=6.44506E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33259E1
os_fil1_imon=9.44267E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07868E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66958E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3179E1
cs_fil1_imon=6.84908E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.70029E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69735E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91745E-2
os_fil2_imon=-2.61481E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22438E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.14533E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31231E-1
cs_fil2_imon=-2.1649E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35594E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22849E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40083E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.00234E-1
res40_imon=-2.34735E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=587
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.81958E-1	-8.9674E-1	-9.0467E0	-9.0421E0	4.62532E-3	9.50098E-2	2.7355E1	-3.26747E1	-3.26146E1	2.6822E1	1.20105E-7	2.52117E-3	2.52117E-3	6.31218E-3	2.99109E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.81958E-1	-8.96788E-1	-9.04658E0	-9.04214E0	4.24385E-3	9.51529E-2	2.73173E1	-3.26609E1	-3.26114E1	2.68301E1	1.20106E-7	2.52707E-3	2.52707E-3	6.31817E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.81839E-1	-8.96907E-1	-9.04694E0	-9.04191E0	4.41074E-3	9.49144E-2	2.737E1	-3.26673E1	-3.25782E1	2.67984E1	1.20009E-7	2.51536E-3	2.51536E-3	6.3226E-3	3.03246E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.8172E-1	-8.96955E-1	-9.04651E0	-9.042E0	4.52995E-3	9.48429E-2	2.73222E1	-3.26626E1	-3.26408E1	2.6825E1	1.20042E-7	2.52342E-3	2.52342E-3	6.32858E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.81648E-1	-8.96955E-1	-9.04632E0	-9.04198E0	4.62532E-3	9.47475E-2	2.73099E1	-3.26494E1	-3.26242E1	2.68322E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.81577E-1	-8.96907E-1	-9.04622E0	-9.04193E0	4.57764E-3	9.51767E-2	2.73363E1	-3.26651E1	-3.25954E1	2.68172E1	1.20174E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.8141E-1	-8.97193E-1	-9.04639E0	-9.04176E0	4.57764E-3	9.51529E-2	2.73189E1	-3.26711E1	-3.26038E1	2.68563E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.98665E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.81314E-1	-8.97145E-1	-9.04644E0	-9.04226E0	4.60148E-3	9.53674E-2	2.7308E1	-3.26431E1	-3.26136E1	2.68052E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.98481E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.81338E-1	-8.97121E-1	-9.04627E0	-9.04195E0	4.673E-3	9.51052E-2	2.73357E1	-3.26819E1	-3.26218E1	2.68136E1	1.20017E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.81505E-1	-8.96978E-1	-9.04636E0	-9.04186E0	4.3869E-3	9.47952E-2	2.73099E1	-3.26086E1	-3.26284E1	2.68526E1	1.20278E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.01347E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.81839E-1	-8.97074E-1	-9.04694E0	-9.04193E0	4.33922E-3	9.50336E-2	2.73299E1	-3.26903E1	-3.26083E1	2.68337E1	1.19851E-7	2.51739E-3	2.51739E-3	6.28592E-3	2.97647E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.81362E-1	-8.96835E-1	-9.04689E0	-9.04202E0	4.36306E-3	9.48668E-2	2.73045E1	-3.26446E1	-3.26585E1	2.68466E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.98156E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.81672E-1	-8.96859E-1	-9.0466E0	-9.04217E0	4.76837E-3	9.50575E-2	2.73273E1	-3.26633E1	-3.26344E1	2.68202E1	1.19925E-7	2.51581E-3	2.51581E-3	6.32418E-3	2.97762E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.81338E-1	-8.9674E-1	-9.04641E0	-9.04179E0	4.41074E-3	9.4676E-2	2.72921E1	-3.26231E1	-3.26219E1	2.68569E1	1.20209E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99941E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.81433E-1	-8.96978E-1	-9.04644E0	-9.042E0	4.48227E-3	9.49383E-2	2.73346E1	-3.26826E1	-3.26337E1	2.68325E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.81577E-1	-8.96788E-1	-9.04617E0	-9.04191E0	4.3869E-3	9.48429E-2	2.73033E1	-3.26707E1	-3.26229E1	2.68569E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.816E-1	-8.9705E-1	-9.04632E0	-9.04181E0	4.41074E-3	9.49383E-2	2.73117E1	-3.26813E1	-3.25942E1	2.68112E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.81481E-1	-8.97193E-1	-9.04655E0	-9.0415E0	4.24385E-3	9.47714E-2	2.73057E1	-3.26614E1	-3.26063E1	2.68742E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.81767E-1	-8.96883E-1	-9.04632E0	-9.04179E0	4.36306E-3	9.53197E-2	2.73016E1	-3.26567E1	-3.26148E1	2.68128E1	1.19851E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.81386E-1	-8.96716E-1	-9.04629E0	-9.04171E0	4.43459E-3	9.48191E-2	2.73149E1	-3.26689E1	-3.26162E1	2.6828E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01738E-1