[Scan]
initial_time=2016-01-18T19:22:32
final_time=2016-01-18T19:22:51
ip_count=19
run=1024
dataset=5
scan=343
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09309E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.81386E-1
ql1_imon=1.33815E-8
ql2_vset=
ql2_vmon=-8.97193E-1
ql2_imon=1.94678E-9
ql3_vset=
ql3_vmon=-9.04696E0
ql3_imon=4.08781E-10
ql4_vset=
ql4_vmon=-9.04171E0
ql4_imon=4.61936E-11
mult1=-9.69223E-9
mult2=-2.85235E-9
rf_tmon=-2.30739E-3
rf_agc=3.5076E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.70976E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68804E0
bslens_imon=2.63528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19382E1
lens5a_imon=1.9543E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53995E1
cs_ef1b_imon=3.16254E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04673E2
lens23_imon=1.02457E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04422E1
cs_ea1_imon=1.10166E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36666E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.99423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.36428E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=3.03784E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.38288E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.27076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15064E1
os_ea1_imon=2.32559E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63305E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20845E0
cs_ionrep_imon=9.25752E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91951E2
cs_nozzle_imon=1.93639E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=1.9617E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.39931E-8
tplens_vset=1.4E-1
tplens_vmon=1.66916E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26434E1
iondef3_imon=1.51188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27005E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02998E2
lens6_imon=2.98321E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.09594E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=8.53902E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33457E1
lens5b_imon=2.1557E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.14128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54056E0
os_ea2_imon=-5.43106E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00722E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.1683E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2085E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11159E1
os_restr2_imon=3.45987E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23008E2
cs_ionfoca_imon=6.25221E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.09973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.11546E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68269E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.23528E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=8.03157E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-7.85084E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47511E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.96895E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-9.04015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82687E2
mask1_imon=2.39326E-4
mask2_vset=0.0E0
mask2_vmon=-1.86764E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.62231E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.2384E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.43118E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46461E0
defgridb_imon=6.24902E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33249E1
os_fil1_imon=9.44378E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0778E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66937E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31776E1
cs_fil1_imon=7.86963E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40131E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69764E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.76243E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13331E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.1763E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22775E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.65299E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.81815E-1	-8.96955E-1	-9.04644E0	-9.0416E0	4.52995E-3	9.53436E-2	2.73141E1	-3.26621E1	-3.26056E1	2.6828E1	1.19902E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00197E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.8191E-1	-8.97074E-1	-9.0466E0	-9.04181E0	4.86374E-3	9.53197E-2	2.73462E1	-3.26712E1	-3.2597E1	2.68569E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09294E0	-8.816E-1	-8.9705E-1	-9.04624E0	-9.04205E0	4.52995E-3	9.52959E-2	2.73405E1	-3.26708E1	-3.25753E1	2.6814E1	1.19953E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01223E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09364E0	-8.81529E-1	-8.97098E-1	-9.0466E0	-9.04186E0	4.48227E-3	9.50575E-2	2.73311E1	-3.26083E1	-3.26148E1	2.68292E1	1.19891E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.02875E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.81457E-1	-8.97264E-1	-9.04677E0	-9.04193E0	4.45843E-3	9.50575E-2	2.72805E1	-3.26699E1	-3.26182E1	2.6834E1	1.19953E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.81386E-1	-8.97312E-1	-9.0467E0	-9.042E0	4.36306E-3	9.51052E-2	2.73604E1	-3.26266E1	-3.26585E1	2.68256E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-8.81243E-1	-8.97002E-1	-9.04691E0	-9.04217E0	4.43459E-3	9.51529E-2	2.73201E1	-3.26753E1	-3.26002E1	2.68304E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.81577E-1	-8.97145E-1	-9.04651E0	-9.04183E0	4.45843E-3	9.50575E-2	2.73476E1	-3.26537E1	-3.26107E1	2.68099E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.81219E-1	-8.97002E-1	-9.04651E0	-9.04164E0	4.52995E-3	9.5129E-2	2.73021E1	-3.2638E1	-3.2635E1	2.68364E1	1.19653E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.81624E-1	-8.97169E-1	-9.04632E0	-9.04193E0	4.64916E-3	9.50098E-2	2.73499E1	-3.26561E1	-3.26396E1	2.6837E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.8141E-1	-8.96931E-1	-9.04648E0	-9.04186E0	4.62532E-3	9.49383E-2	2.73177E1	-3.27107E1	-3.2608E1	2.68292E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.816E-1	-8.97145E-1	-9.04627E0	-9.0416E0	4.31538E-3	9.52005E-2	2.73273E1	-3.26434E1	-3.25978E1	2.68316E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.81505E-1	-8.96931E-1	-9.04641E0	-9.04176E0	4.55379E-3	9.51529E-2	2.73255E1	-3.26579E1	-3.26194E1	2.68322E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.81743E-1	-8.97074E-1	-9.04641E0	-9.04169E0	4.36306E-3	9.50813E-2	2.73021E1	-3.2653E1	-3.26272E1	2.68406E1	1.19913E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.811E-1	-8.96811E-1	-9.04653E0	-9.04138E0	4.17233E-3	9.51529E-2	2.73225E1	-3.26795E1	-3.26248E1	2.68351E1	1.19851E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.02511E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.8141E-1	-8.96788E-1	-9.04658E0	-9.04174E0	4.45843E-3	9.51052E-2	2.73405E1	-3.26632E1	-3.25983E1	2.68477E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00302E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.81314E-1	-8.97026E-1	-9.04653E0	-9.04202E0	4.52995E-3	9.47952E-2	2.73225E1	-3.26603E1	-3.26092E1	2.68184E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.81433E-1	-8.97026E-1	-9.04653E0	-9.04164E0	4.52995E-3	9.46522E-2	2.73375E1	-3.26422E1	-3.26326E1	2.6834E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.99E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.81386E-1	-8.97002E-1	-9.04653E0	-9.0415E0	4.62532E-3	9.4676E-2	2.73092E1	-3.26691E1	-3.26248E1	2.68401E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09309E0	-8.81386E-1	-8.97193E-1	-9.04696E0	-9.04171E0	4.19617E-3	9.49144E-2	2.73237E1	-3.27005E1	-3.26434E1	2.68269E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.02253E-1