[Scan]
initial_time=2016-01-18T19:23:25
final_time=2016-01-18T19:23:45
ip_count=19
run=1024
dataset=5
scan=345
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08828E-4
ql1_vset=
ql1_vmon=-8.81505E-1
ql1_imon=1.34855E-8
ql2_vset=
ql2_vmon=-8.9674E-1
ql2_imon=1.94975E-9
ql3_vset=
ql3_vmon=-9.04634E0
ql3_imon=3.66175E-10
ql4_vset=
ql4_vmon=-9.04174E0
ql4_imon=-1.16825E-12
mult1=-1.02441E-8
mult2=-2.80557E-9
rf_tmon=-4.24992E-3
rf_agc=3.29729E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.69696E-9
bslens_vset=-6.2E0
bslens_vmon=-6.74605E0
bslens_imon=2.25296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18631E1
lens5a_imon=1.9463E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05753E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53845E1
cs_ef1b_imon=3.15028E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04752E2
lens23_imon=1.02438E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03852E1
cs_ea1_imon=1.02632E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30587E0
lens1_imon=3.02442E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64969E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05072E1
cs_ea2_imon=1.45963E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.0382E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.38421E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.28229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.30211E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.12052E0
cs_ionrep_imon=9.15645E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92013E2
cs_nozzle_imon=1.94206E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01563E1
cs_anode1_imon=1.96782E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20384E0
olens4_imon=3.3958E-8
tplens_vset=1.4E-1
tplens_vmon=1.79344E0
tplens_imon=-1.81596E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2613E1
iondef3_imon=1.43296E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26378E1
iondef2_imon=1.63051E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03096E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.10093E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23527E0
ionrepsh_imon=7.85145E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32811E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.69611E0
os_ea2_imon=-1.45546E-8
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00205E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0924E0
os_ef2alow_imon=-2.38164E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36467E-1
os_ef2bup_imon=-5.1639E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.43212E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22942E2
cs_ionfoca_imon=6.25855E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73269E1
iondef1_imon=1.1716E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.11585E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.18441E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=8.05493E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-9.40055E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47507E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.56986E-1
window_imon=-7.41837E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82704E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92712E3
multa_neg_imon=8.19392E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9366E3
defgrida_imon=5.73535E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=6.76276E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60307E0
defgridb_imon=6.90335E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33249E1
os_fil1_imon=9.43549E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08152E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66819E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31751E1
cs_fil1_imon=7.19689E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00981E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69753E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86045E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.02633E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22684E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01674E-1
chamber_ion_pmon=1.20114E-7
chamber_cvt_pmon=2.52569E-3
foreline_cvt_pmon=2.52569E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.21761E-1
res40_imon=-2.28794E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=190
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.81433E-1	-8.96406E-1	-9.0466E0	-9.04171E0	4.45843E-3	9.50336E-2	2.72107E1	-3.25647E1	-3.27652E1	2.68424E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.98665E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.81505E-1	-8.96668E-1	-9.0466E0	-9.04193E0	4.45843E-3	9.5129E-2	2.73186E1	-3.26523E1	-3.26242E1	2.68376E1	1.19809E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9926E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.8172E-1	-8.96621E-1	-9.04677E0	-9.04191E0	4.62532E-3	9.51052E-2	2.7319E1	-3.26382E1	-3.26289E1	2.68285E1	1.19913E-7	2.52538E-3	2.52538E-3	6.28552E-3	3.00302E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.81672E-1	-8.96716E-1	-9.04675E0	-9.04143E0	4.48227E-3	9.51052E-2	2.73159E1	-3.26609E1	-3.26374E1	2.68418E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.81529E-1	-8.97026E-1	-9.04648E0	-9.04155E0	4.57764E-3	9.52005E-2	2.73285E1	-3.26663E1	-3.26284E1	2.68238E1	1.20363E-7	2.51632E-3	2.51632E-3	6.36144E-3	3.03286E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.81529E-1	-8.97145E-1	-9.04629E0	-9.04205E0	4.62532E-3	9.51767E-2	2.73535E1	-3.2675E1	-3.26537E1	2.68196E1	1.19861E-7	2.50898E-3	2.50898E-3	6.31288E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.8141E-1	-8.96955E-1	-9.04629E0	-9.04176E0	4.48227E-3	9.55105E-2	2.73269E1	-3.26496E1	-3.26331E1	2.68273E1	1.19749E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.81505E-1	-8.96931E-1	-9.0466E0	-9.04186E0	4.41074E-3	9.52721E-2	2.72959E1	-3.26346E1	-3.25948E1	2.68431E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9943E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.81338E-1	-8.9674E-1	-9.04665E0	-9.04205E0	4.31538E-3	9.50336E-2	2.73111E1	-3.26116E1	-3.2626E1	2.68028E1	1.20191E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.00144E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09325E0	-8.8129E-1	-8.96978E-1	-9.04677E0	-9.04174E0	4.26769E-3	9.50813E-2	2.73256E1	-3.26397E1	-3.26237E1	2.68199E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02396E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09348E0	-8.81362E-1	-8.96883E-1	-9.04632E0	-9.04157E0	4.45843E-3	9.51052E-2	2.73249E1	-3.26657E1	-3.26212E1	2.68256E1	1.19991E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.02115E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.81338E-1	-8.96931E-1	-9.04632E0	-9.04164E0	4.45843E-3	9.4986E-2	2.73602E1	-3.26805E1	-3.26089E1	2.68196E1	1.19953E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.81457E-1	-8.96716E-1	-9.04658E0	-9.04186E0	4.36306E-3	9.51767E-2	2.73222E1	-3.26319E1	-3.26254E1	2.68292E1	1.19978E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.01475E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.81457E-1	-8.97026E-1	-9.04691E0	-9.04145E0	4.52995E-3	9.50098E-2	2.73598E1	-3.26488E1	-3.26092E1	2.68502E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.81338E-1	-8.96859E-1	-9.04672E0	-9.04157E0	4.22001E-3	9.51052E-2	2.73063E1	-3.26699E1	-3.2596E1	2.68328E1	1.20435E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.81505E-1	-8.96883E-1	-9.04663E0	-9.04148E0	4.3869E-3	9.50575E-2	2.73309E1	-3.26561E1	-3.25996E1	2.68484E1	1.20278E-7	2.5188E-3	2.5188E-3	6.35692E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.81433E-1	-8.97193E-1	-9.04646E0	-9.04205E0	4.24385E-3	9.51529E-2	2.73285E1	-3.26494E1	-3.26332E1	2.68352E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02133E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.81386E-1	-8.97002E-1	-9.0466E0	-9.04207E0	4.29153E-3	9.53197E-2	2.73057E1	-3.26773E1	-3.26478E1	2.6819E1	1.19913E-7	2.52428E-3	2.52428E-3	6.29098E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.81553E-1	-8.96859E-1	-9.04641E0	-9.04186E0	4.22001E-3	9.53436E-2	2.72859E1	-3.26488E1	-3.26326E1	2.68366E1	1.19749E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.81505E-1	-8.9674E-1	-9.04634E0	-9.04174E0	4.36306E-3	9.49383E-2	2.73269E1	-3.26378E1	-3.2613E1	2.6816E1	1.20114E-7	2.52569E-3	2.52569E-3	6.3074E-3	3.01674E-1