[Scan]
initial_time=2016-01-18T19:24:45
final_time=2016-01-18T19:25:05
ip_count=19
run=1024
dataset=5
scan=348
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09348E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.81267E-1
ql1_imon=1.33416E-8
ql2_vset=
ql2_vmon=-8.9736E-1
ql2_imon=1.87968E-9
ql3_vset=
ql3_vmon=-9.04667E0
ql3_imon=3.53086E-10
ql4_vset=
ql4_vmon=-9.04176E0
ql4_imon=2.44498E-11
mult1=-8.89755E-9
mult2=-2.71861E-9
rf_tmon=-4.38024E-3
rf_agc=3.32795E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.70418E-9
bslens_vset=-6.2E0
bslens_vmon=-6.75765E0
bslens_imon=2.85473E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18385E1
lens5a_imon=1.92316E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12427E2
lens4a_imon=2.05454E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54187E1
cs_ef1b_imon=3.16182E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04804E2
lens23_imon=1.02673E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=1.02556E-5
lens1_vset=-5.0E0
lens1_vmon=-5.2882E0
lens1_imon=2.51494E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04988E1
cs_ea2_imon=1.41596E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=3.04361E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.37821E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.26175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15353E1
os_ea1_imon=2.29975E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.10167E0
cs_ionrep_imon=8.96021E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91941E2
cs_nozzle_imon=1.94174E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=1.96314E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.40926E-8
tplens_vset=1.4E-1
tplens_vmon=1.77888E0
tplens_imon=9.75266E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.45879E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.59081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03098E2
lens6_imon=2.98664E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.10684E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27451E0
ionrepsh_imon=7.91962E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32667E1
lens5b_imon=2.14402E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.65028E0
os_ea2_imon=-3.69709E-8
lens4b_vset=-4.05E2
lens4b_vmon=-4.06161E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71059E1
cs_ef2a_imon=3.17371E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0918E0
os_ef2alow_imon=-2.32037E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.40071E-1
os_ef2bup_imon=-5.04858E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.4505E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22949E2
cs_ionfoca_imon=6.24442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.08711E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73201E1
iondef1_imon=1.16679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.20089E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=8.03364E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-1.00132E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.87525E-6
window_vset=0.0E0
window_vmon=2.26352E-1
window_imon=-7.02193E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8268E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=8.25232E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93648E3
defgrida_imon=6.00126E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50188E3
multb_neg_imon=7.28253E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4528E0
defgridb_imon=6.50032E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33257E1
os_fil1_imon=9.44667E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08308E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66889E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31792E1
cs_fil1_imon=6.62626E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.82177E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.699E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.85107E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.09404E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.6708E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22804E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.52995E-1
res40_imon=-2.42489E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.81314E-1	-8.97479E-1	-9.04653E0	-9.04191E0	4.69685E-3	9.52005E-2	2.73617E1	-3.27062E1	-3.2649E1	2.68273E1	1.198E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.99686E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.81743E-1	-8.97241E-1	-9.04653E0	-9.04167E0	4.62532E-3	9.52244E-2	2.73243E1	-3.26669E1	-3.26368E1	2.68382E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.8129E-1	-8.96764E-1	-9.0467E0	-9.04186E0	4.52995E-3	9.52721E-2	2.7334E1	-3.26632E1	-3.26036E1	2.68545E1	1.20122E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01871E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.81505E-1	-8.96931E-1	-9.04653E0	-9.04176E0	4.33922E-3	9.50813E-2	2.73263E1	-3.26679E1	-3.26254E1	2.68626E1	1.20106E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.81243E-1	-8.96788E-1	-9.04677E0	-9.04171E0	4.43459E-3	9.4986E-2	2.73195E1	-3.26518E1	-3.25918E1	2.68268E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.81171E-1	-8.97002E-1	-9.04696E0	-9.04167E0	4.12464E-3	9.48191E-2	2.73243E1	-3.26356E1	-3.26639E1	2.68112E1	1.19861E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.81433E-1	-8.96883E-1	-9.04677E0	-9.04193E0	4.33922E-3	9.49144E-2	2.73104E1	-3.26815E1	-3.25947E1	2.68442E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.81219E-1	-8.97193E-1	-9.04644E0	-9.04179E0	4.64916E-3	9.48191E-2	2.72859E1	-3.26795E1	-3.2596E1	2.68274E1	1.19749E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.81267E-1	-8.97121E-1	-9.04663E0	-9.04186E0	4.26769E-3	9.49383E-2	2.73033E1	-3.26773E1	-3.26077E1	2.68435E1	1.20069E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.81481E-1	-8.97145E-1	-9.04684E0	-9.04179E0	4.48227E-3	9.51529E-2	2.7352E1	-3.26476E1	-3.26392E1	2.68208E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99941E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.81457E-1	-8.97074E-1	-9.04665E0	-9.04198E0	4.62532E-3	9.51767E-2	2.73472E1	-3.26524E1	-3.2626E1	2.68214E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00563E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09294E0	-8.8129E-1	-8.96955E-1	-9.0466E0	-9.0414E0	4.52995E-3	9.53436E-2	2.73228E1	-3.26697E1	-3.26042E1	2.68016E1	1.19653E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09286E0	-8.81338E-1	-8.96859E-1	-9.04655E0	-9.04162E0	4.74453E-3	9.50813E-2	2.73291E1	-3.26777E1	-3.26434E1	2.68442E1	1.19902E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00453E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.81219E-1	-8.9674E-1	-9.04665E0	-9.04186E0	4.74453E-3	9.51052E-2	2.73141E1	-3.26777E1	-3.26254E1	2.68577E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.81147E-1	-8.96788E-1	-9.04648E0	-9.04198E0	4.74453E-3	9.48906E-2	2.73291E1	-3.26615E1	-3.26254E1	2.68294E1	1.19601E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.81362E-1	-8.97241E-1	-9.04646E0	-9.04169E0	4.8399E-3	9.47714E-2	2.73273E1	-3.26639E1	-3.26062E1	2.68238E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01085E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.81052E-1	-8.97026E-1	-9.04651E0	-9.04188E0	4.8399E-3	9.4986E-2	2.73369E1	-3.26819E1	-3.26452E1	2.68493E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.81195E-1	-8.97026E-1	-9.04667E0	-9.04191E0	4.673E-3	9.50336E-2	2.73045E1	-3.2653E1	-3.26014E1	2.68298E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02133E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.81338E-1	-8.97264E-1	-9.04639E0	-9.04171E0	4.64916E-3	9.4676E-2	2.73196E1	-3.26718E1	-3.25843E1	2.68364E1	1.20055E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09348E0	-8.81267E-1	-8.9736E-1	-9.04667E0	-9.04176E0	4.55379E-3	9.50098E-2	2.73201E1	-3.26597E1	-3.2629E1	2.68442E1	1.20158E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99941E-1