[Scan]
initial_time=2016-01-18T19:25:12
final_time=2016-01-18T19:25:33
ip_count=19
run=1024
dataset=5
scan=349
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.80957E-1
ql1_imon=1.34696E-8
ql2_vset=
ql2_vmon=-8.96978E-1
ql2_imon=1.91844E-9
ql3_vset=
ql3_vmon=-9.04644E0
ql3_imon=3.41749E-10
ql4_vset=
ql4_vmon=-9.04198E0
ql4_imon=2.6679E-11
mult1=-9.29839E-9
mult2=-2.91924E-9
rf_tmon=-4.9519E-3
rf_agc=3.37515E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.68625E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66055E0
bslens_imon=2.75976E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19896E1
lens5a_imon=1.98942E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04648E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53873E1
cs_ef1b_imon=3.15692E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02492E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.12149E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41847E0
lens1_imon=1.98844E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65033E1
os_ef1alow_imon=2.99899E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03115E1
cs_ea2_imon=1.36318E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=3.03791E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.38182E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11236E1
os_restr1_imon=4.26286E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15091E1
os_ea1_imon=2.40961E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63423E1
os_ef1bup_imon=3.07346E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28332E0
cs_ionrep_imon=9.22787E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=1.96604E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.40329E-8
tplens_vset=1.4E-1
tplens_vmon=1.59675E0
tplens_imon=1.37261E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26142E1
iondef3_imon=1.51597E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26756E1
iondef2_imon=1.54572E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98214E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=4.10665E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34209E0
ionrepsh_imon=8.52265E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33792E1
lens5b_imon=2.14589E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74801E1
cs_ef2b_imon=3.14457E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52206E0
os_ea2_imon=-3.40225E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00924E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71014E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07951E0
os_ef2alow_imon=-2.28614E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31939E-1
os_ef2bup_imon=-5.11927E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.44623E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.27651E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01902E1
cs_anode2_imon=2.07981E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73252E1
iondef1_imon=1.08587E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68424E1
iondef4_imon=1.10898E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.23933E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=8.0409E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13575E0
cs_ionaccel_imon=-8.415E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02045E2
cs_ionfocb_imon=1.47368E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56561E1
einzel_imon=7.93859E-6
window_vset=0.0E0
window_vmon=2.60636E-1
window_imon=-8.78926E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39267E-4
mask2_vset=0.0E0
mask2_vmon=-1.86463E1
mask2_imon=-5.90748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.8909E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.63475E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.79541E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38823E0
defgridb_imon=5.88179E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33275E1
os_fil1_imon=9.42333E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07997E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66687E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31781E1
cs_fil1_imon=8.24712E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.59445E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69718E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.87019E-2
os_fil2_imon=-2.48161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09057E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.20297E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32072E-1
cs_fil2_imon=-2.60636E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12374E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22828E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.64374E-1
res40_imon=-2.39093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09325E0	-8.81433E-1	-8.97074E-1	-9.04651E0	-9.04224E0	4.19617E-3	9.47952E-2	2.73022E1	-3.26961E1	-3.26393E1	2.68256E1	1.20084E-7	2.52362E-3	2.52362E-3	6.28511E-3	2.99613E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09286E0	-8.81267E-1	-8.97145E-1	-9.0467E0	-9.04214E0	4.36306E-3	9.4986E-2	2.73363E1	-3.26672E1	-3.26528E1	2.68294E1	1.19941E-7	2.52131E-3	2.52131E-3	6.33388E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09348E0	-8.81386E-1	-8.97336E-1	-9.04665E0	-9.0421E0	4.57764E-3	9.53913E-2	2.73126E1	-3.26851E1	-3.26289E1	2.68435E1	1.20045E-7	2.51498E-3	2.51498E-3	6.3245E-3	2.97823E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09302E0	-8.81696E-1	-8.97169E-1	-9.0467E0	-9.04176E0	4.48227E-3	9.49144E-2	2.73075E1	-3.26711E1	-3.26062E1	2.6852E1	1.19891E-7	2.51709E-3	2.51709E-3	6.32858E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09309E0	-8.81267E-1	-8.96811E-1	-9.04679E0	-9.04164E0	4.69685E-3	9.4986E-2	2.73103E1	-3.267E1	-3.26451E1	2.68311E1	1.20278E-7	2.52209E-3	2.52209E-3	6.35692E-3	2.98222E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-8.81124E-1	-8.97169E-1	-9.04672E0	-9.04169E0	4.76837E-3	9.53436E-2	2.73401E1	-3.26737E1	-3.2612E1	2.68374E1	1.19891E-7	2.51919E-3	2.51919E-3	6.32858E-3	2.98342E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09294E0	-8.8141E-1	-8.97217E-1	-9.04675E0	-9.04224E0	4.673E-3	9.50336E-2	2.73352E1	-3.26567E1	-3.26254E1	2.68406E1	1.20154E-7	2.52066E-3	2.52066E-3	6.29035E-3	3.02426E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.81314E-1	-8.97145E-1	-9.0467E0	-9.04226E0	4.673E-3	9.5129E-2	2.72997E1	-3.26699E1	-3.26218E1	2.6852E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.81362E-1	-8.9705E-1	-9.04675E0	-9.04212E0	4.29153E-3	9.52005E-2	2.73375E1	-3.26705E1	-3.25912E1	2.68319E1	1.19861E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.81386E-1	-8.96978E-1	-9.04663E0	-9.04226E0	4.43459E-3	9.53197E-2	2.7311E1	-3.26402E1	-3.26089E1	2.67848E1	1.19902E-7	2.50989E-3	2.50989E-3	6.33436E-3	3.0071E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.81219E-1	-8.97026E-1	-9.04653E0	-9.04195E0	4.55379E-3	9.50336E-2	2.73207E1	-3.26705E1	-3.26176E1	2.68611E1	1.20226E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.81314E-1	-8.97121E-1	-9.04658E0	-9.04181E0	4.41074E-3	9.50336E-2	2.73157E1	-3.26716E1	-3.26301E1	2.68244E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-8.81171E-1	-8.97384E-1	-9.04653E0	-9.04155E0	4.31538E-3	9.52005E-2	2.73189E1	-3.26687E1	-3.25984E1	2.68466E1	1.19859E-7	2.52051E-3	2.52051E-3	6.33985E-3	3.00065E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.81338E-1	-8.9705E-1	-9.04648E0	-9.04181E0	4.69685E-3	9.49383E-2	2.73249E1	-3.26597E1	-3.26152E1	2.68274E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.96671E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.811E-1	-8.97074E-1	-9.04658E0	-9.04226E0	4.36306E-3	9.47475E-2	2.73189E1	-3.26699E1	-3.25906E1	2.68226E1	1.19757E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.8141E-1	-8.96931E-1	-9.04651E0	-9.04191E0	4.76837E-3	9.52482E-2	2.73448E1	-3.26675E1	-3.25767E1	2.68424E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9952E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.8141E-1	-8.97026E-1	-9.04646E0	-9.04202E0	4.55379E-3	9.50813E-2	2.73177E1	-3.26446E1	-3.26068E1	2.68166E1	1.19965E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.81457E-1	-8.97121E-1	-9.04644E0	-9.04186E0	4.64916E-3	9.51052E-2	2.73075E1	-3.26549E1	-3.26332E1	2.68334E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.81457E-1	-8.97121E-1	-9.04641E0	-9.04174E0	4.48227E-3	9.52005E-2	2.73057E1	-3.26425E1	-3.26408E1	2.6828E1	1.20158E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.80957E-1	-8.96978E-1	-9.04644E0	-9.04198E0	4.45843E-3	9.54628E-2	2.73252E1	-3.26756E1	-3.26142E1	2.68424E1	1.19965E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.9978E-1