[Scan]
initial_time=2016-01-18T19:26:17
final_time=2016-01-18T19:26:42
ip_count=19
run=1024
dataset=5
scan=351
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.8098E-1
ql1_imon=1.33966E-8
ql2_vset=
ql2_vmon=-8.96764E-1
ql2_imon=1.89346E-9
ql3_vset=
ql3_vmon=-9.04672E0
ql3_imon=2.76887E-10
ql4_vset=
ql4_vmon=-9.04219E0
ql4_imon=-1.19209E-14
mult1=-1.07518E-8
mult2=-2.86033E-9
rf_tmon=-4.54247E-3
rf_agc=3.33756E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.69532E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=1.87077E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19016E1
lens5a_imon=2.03182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12537E2
lens4a_imon=2.05153E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53737E1
cs_ef1b_imon=3.17088E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.01778E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04186E1
cs_ea1_imon=1.13068E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41739E0
lens1_imon=3.21221E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64846E1
os_ef1alow_imon=2.97036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03755E1
cs_ea2_imon=1.36818E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84464E1
cs_ef1a_imon=3.04751E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.37985E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11239E1
os_restr1_imon=4.26767E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14415E1
os_ea1_imon=2.33019E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64099E1
os_ef1bup_imon=3.07705E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=9.68579E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9198E2
cs_nozzle_imon=1.93848E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01746E1
cs_anode1_imon=1.97087E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.39775E-8
tplens_vset=1.4E-1
tplens_vmon=1.66031E0
tplens_imon=-7.5901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.53134E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.5901E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03017E2
lens6_imon=2.98006E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.0807E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22614E0
ionrepsh_imon=8.7443E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33428E1
lens5b_imon=2.20773E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74756E1
cs_ef2b_imon=3.13439E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.62256E0
os_ea2_imon=-8.36877E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0602E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71333E1
cs_ef2a_imon=3.1615E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06151E0
os_ef2alow_imon=-2.48423E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18662E-1
os_ef2bup_imon=-5.06286E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1121E1
os_restr2_imon=3.45133E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.31096E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01636E1
cs_anode2_imon=2.09737E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73171E1
iondef1_imon=1.12467E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.18394E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=8.03622E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1342E0
cs_ionaccel_imon=-8.16104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02104E2
cs_ionfocb_imon=1.47602E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56266E1
einzel_imon=7.85813E-6
window_vset=0.0E0
window_vmon=2.51859E-1
window_imon=-7.84827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82681E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86107E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.76035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93764E3
defgrida_imon=6.8401E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50068E3
multb_neg_imon=7.38517E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63293E0
defgridb_imon=6.41183E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.42947E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08198E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66785E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=8.29524E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.97494E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69711E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86374E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02241E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.09404E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.309E-1
cs_fil2_imon=-1.97414E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06671E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22849E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=3.00097E-1
chamber_ion_pmon=1.1969E-7
chamber_cvt_pmon=2.52553E-3
foreline_cvt_pmon=2.52553E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.04964E-1
res40_imon=-2.37997E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.81147E-1	-8.96621E-1	-9.0467E0	-9.04167E0	4.3869E-3	9.48668E-2	2.73357E1	-3.26458E1	-3.25617E1	2.68278E1	1.19941E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.00348E-1
2.0E0	3.1E1	1.0E0	3.16E2	1.6E2	-2.09588E0	-8.81219E-1	-8.96955E-1	-9.04663E0	-9.04179E0	4.3869E-3	9.50098E-2	2.73766E1	-3.26771E1	-3.26741E1	2.68076E1	1.19925E-7	2.51136E-3	2.51136E-3	6.29624E-3	3.00676E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.81171E-1	-8.97002E-1	-9.04672E0	-9.04181E0	4.14848E-3	9.4986E-2	2.73712E1	-3.2685E1	-3.26301E1	2.6831E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.99941E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.81362E-1	-8.96835E-1	-9.04672E0	-9.04183E0	3.98159E-3	9.50336E-2	2.73153E1	-3.26843E1	-3.26236E1	2.68166E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.81076E-1	-8.96931E-1	-9.04682E0	-9.04186E0	4.22001E-3	9.50575E-2	2.73249E1	-3.2653E1	-3.26086E1	2.68076E1	1.19697E-7	2.50989E-3	2.50989E-3	6.31278E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.81004E-1	-8.96692E-1	-9.04646E0	-9.04179E0	4.43459E-3	9.50575E-2	2.73169E1	-3.26301E1	-3.26189E1	2.684E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.81004E-1	-8.96907E-1	-9.04646E0	-9.04155E0	4.24385E-3	9.49144E-2	2.73399E1	-3.26614E1	-3.26402E1	2.68395E1	1.19913E-7	2.52209E-3	2.52209E-3	6.34588E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.81076E-1	-8.97026E-1	-9.04667E0	-9.04202E0	4.22001E-3	9.48191E-2	2.73393E1	-3.26609E1	-3.26314E1	2.68268E1	1.19902E-7	2.52492E-3	2.52492E-3	6.29665E-3	2.98665E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.81147E-1	-8.96978E-1	-9.04655E0	-9.04183E0	4.31538E-3	9.52482E-2	2.72991E1	-3.26524E1	-3.2605E1	2.68148E1	1.19757E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.80957E-1	-8.97098E-1	-9.04665E0	-9.04198E0	4.3869E-3	9.50336E-2	2.73502E1	-3.26278E1	-3.26374E1	2.68328E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99686E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.81052E-1	-8.9705E-1	-9.0462E0	-9.042E0	4.50611E-3	9.50336E-2	2.73243E1	-3.26753E1	-3.26098E1	2.68226E1	1.19913E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.8129E-1	-8.97241E-1	-9.04658E0	-9.04193E0	4.43459E-3	9.52244E-2	2.73381E1	-3.26561E1	-3.26344E1	2.6816E1	1.19819E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.01742E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.81124E-1	-8.97288E-1	-9.04694E0	-9.04193E0	4.55379E-3	9.5129E-2	2.73315E1	-3.26615E1	-3.26044E1	2.68244E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9874E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.81052E-1	-8.96978E-1	-9.04665E0	-9.0415E0	4.26769E-3	9.52721E-2	2.73134E1	-3.26402E1	-3.26231E1	2.68208E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.80909E-1	-8.97121E-1	-9.0466E0	-9.04181E0	4.26769E-3	9.52244E-2	2.73063E1	-3.26639E1	-3.25978E1	2.68094E1	1.20017E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.81147E-1	-8.96883E-1	-9.04632E0	-9.04174E0	4.3869E-3	9.51767E-2	2.73508E1	-3.26705E1	-3.26134E1	2.68198E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.81076E-1	-8.97121E-1	-9.04651E0	-9.04193E0	4.26769E-3	9.51529E-2	2.72768E1	-3.26596E1	-3.26201E1	2.68424E1	1.19856E-7	2.51593E-3	2.51593E-3	6.29655E-3	2.99475E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.81243E-1	-8.97193E-1	-9.04658E0	-9.04195E0	4.52995E-3	9.49621E-2	2.73063E1	-3.26861E1	-3.25894E1	2.6834E1					
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.811E-1	-8.96835E-1	-9.04653E0	-9.04202E0	4.43459E-3	9.49383E-2	2.73275E1	-3.26567E1	-3.26537E1	2.68343E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.8098E-1	-8.96764E-1	-9.04672E0	-9.04219E0	4.55379E-3	9.50813E-2	2.73171E1	-3.26518E1	-3.26549E1	2.68172E1	1.1969E-7	2.52553E-3	2.52553E-3	6.32328E-3	3.00097E-1