[Scan]
initial_time=2016-01-18T19:26:51
final_time=2016-01-18T19:27:16
ip_count=19
run=1024
dataset=5
scan=352
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.81004E-1
ql1_imon=1.3443E-8
ql2_vset=
ql2_vmon=-8.96692E-1
ql2_imon=1.89981E-9
ql3_vset=
ql3_vmon=-9.04653E0
ql3_imon=3.0427E-10
ql4_vset=
ql4_vmon=-9.04202E0
ql4_imon=7.30753E-12
mult1=-1.0587E-8
mult2=-2.8722E-9
rf_tmon=-3.46535E-3
rf_agc=3.42824E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.64721E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67335E0
bslens_imon=2.66753E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19532E1
lens5a_imon=1.98343E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12414E2
lens4a_imon=2.04859E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53835E1
cs_ef1b_imon=3.16115E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02557E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04658E1
cs_ea1_imon=1.07246E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3257E0
lens1_imon=2.426E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64736E1
os_ef1alow_imon=2.98669E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.38609E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=3.05411E-5
olens2_vset=9.7E-1
olens2_vmon=9.69625E-1
olens2_imon=1.37476E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11477E1
os_restr1_imon=4.26697E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15522E1
os_ea1_imon=2.35222E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.09234E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17639E0
cs_ionrep_imon=9.28262E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93701E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0178E1
cs_anode1_imon=1.95941E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.38893E-8
tplens_vset=1.4E-1
tplens_vmon=1.72735E0
tplens_imon=-1.11888E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.48018E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.56418E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03003E2
lens6_imon=2.98508E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.06683E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=8.36696E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3355E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74605E1
cs_ef2b_imon=3.13161E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57654E0
os_ea2_imon=-2.66901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7113E1
cs_ef2a_imon=3.16706E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07483E0
os_ef2alow_imon=-2.51898E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.37196E-1
os_ef2bup_imon=-5.17407E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11083E1
os_restr2_imon=3.45446E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.27333E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01914E1
cs_anode2_imon=2.09703E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73122E1
iondef1_imon=1.12365E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68372E1
iondef4_imon=1.1031E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.19687E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=8.03648E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13188E0
cs_ionaccel_imon=-8.30005E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.4748E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56533E1
einzel_imon=7.85813E-6
window_vset=0.0E0
window_vmon=2.61127E-1
window_imon=-6.77094E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8267E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.86471E1
mask2_imon=-4.99856E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=8.05694E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.4513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=6.12108E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33254E1
os_fil1_imon=9.437E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08157E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66733E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3177E1
cs_fil1_imon=7.03835E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.33781E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69669E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82176E-2
os_fil2_imon=-2.46067E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01661E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.28026E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33315E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22698E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31332E-3
inlet_lpb_pmon=3.00479E-1
chamber_ion_pmon=1.19907E-7
chamber_cvt_pmon=2.51321E-3
foreline_cvt_pmon=2.51321E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.74672E-1
res40_imon=-2.43557E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.81529E-1	-8.96358E-1	-9.04658E0	-9.04191E0	4.36306E-3	9.48191E-2	2.73576E1	-3.27151E1	-3.25806E1	2.68292E1	1.19595E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.00453E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.8141E-1	-8.96907E-1	-9.04682E0	-9.04205E0	4.33922E-3	9.50575E-2	2.73496E1	-3.27017E1	-3.26002E1	2.68232E1	1.19902E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.81314E-1	-8.96859E-1	-9.04667E0	-9.04181E0	4.26769E-3	9.52244E-2	2.73323E1	-3.26741E1	-3.26266E1	2.68435E1	1.19872E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.00676E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.811E-1	-8.97026E-1	-9.04663E0	-9.04155E0	4.45843E-3	9.52721E-2	2.7329E1	-3.26487E1	-3.26223E1	2.68296E1	1.19841E-7	2.52131E-3	2.52131E-3	6.32328E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.81243E-1	-8.96597E-1	-9.04653E0	-9.0414E0	4.55379E-3	9.4986E-2	2.73375E1	-3.26633E1	-3.26452E1	2.68425E1	1.20174E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-8.81195E-1	-8.96597E-1	-9.04646E0	-9.04179E0	4.55379E-3	9.50098E-2	2.73157E1	-3.26632E1	-3.26331E1	2.68238E1	1.19819E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.99083E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09356E0	-8.81386E-1	-8.96573E-1	-9.04646E0	-9.04183E0	4.52995E-3	9.48429E-2	2.73296E1	-3.26554E1	-3.26156E1	2.68412E1	1.198E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9892E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.81457E-1	-8.96716E-1	-9.04646E0	-9.04174E0	4.64916E-3	9.50098E-2	2.73069E1	-3.26332E1	-3.26434E1	2.68192E1	1.19872E-7	2.52139E-3	2.52139E-3	6.33538E-3	2.99613E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.81338E-1	-8.96716E-1	-9.0466E0	-9.04198E0	4.22001E-3	9.48429E-2	2.73177E1	-3.26554E1	-3.25743E1	2.68346E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.81124E-1	-8.96788E-1	-9.04639E0	-9.042E0	4.24385E-3	9.46283E-2	2.73181E1	-3.26502E1	-3.26313E1	2.6825E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02396E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.8129E-1	-8.96835E-1	-9.04663E0	-9.04188E0	4.17233E-3	9.48668E-2	2.73285E1	-3.26693E1	-3.26278E1	2.68274E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.03545E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.81052E-1	-8.96621E-1	-9.04663E0	-9.04191E0	4.55379E-3	9.45568E-2	2.73271E1	-3.26597E1	-3.26254E1	2.68214E1	1.19757E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.81195E-1	-8.9674E-1	-9.04646E0	-9.04202E0	4.22001E-3	9.47237E-2	2.73257E1	-3.26614E1	-3.26236E1	2.68274E1	1.19913E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.81124E-1	-8.97026E-1	-9.04636E0	-9.04171E0	4.33922E-3	9.44853E-2	2.73051E1	-3.26542E1	-3.26401E1	2.68232E1	1.19757E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.80885E-1	-8.97026E-1	-9.04622E0	-9.0421E0	4.60148E-3	9.46999E-2	2.7311E1	-3.26832E1	-3.25906E1	2.68172E1	1.20226E-7	2.51771E-3	2.51771E-3	6.3514E-3	3.01085E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.8098E-1	-8.97098E-1	-9.04639E0	-9.04212E0	4.3869E-3	9.49383E-2	2.73351E1	-3.26386E1	-3.2635E1	2.68178E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.81219E-1	-8.96859E-1	-9.04682E0	-9.04207E0	4.3869E-3	9.50336E-2	2.72997E1	-3.26506E1	-3.26338E1	2.6846E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.81147E-1	-8.97026E-1	-9.04648E0	-9.04212E0	4.33922E-3	9.4676E-2	2.73258E1	-3.26814E1	-3.26182E1	2.68406E1	1.19965E-7	2.51007E-3	2.51007E-3	6.33486E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.81362E-1	-8.96811E-1	-9.04644E0	-9.04188E0	4.45843E-3	9.48429E-2	2.73267E1	-3.26502E1	-3.2619E1	2.68251E1	1.1986E-7	2.51923E-3	2.51923E-3	6.28737E-3	3.01969E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.81004E-1	-8.96692E-1	-9.04653E0	-9.04202E0	4.45843E-3	9.49383E-2	2.73122E1	-3.26561E1	-3.26119E1	2.68372E1	1.19907E-7	2.51321E-3	2.51321E-3	6.31332E-3	3.00479E-1