[Scan]
initial_time=2016-01-18T19:27:59
final_time=2016-01-18T19:28:24
ip_count=19
run=1024
dataset=5
scan=354
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.81386E-1
ql1_imon=1.34267E-8
ql2_vset=
ql2_vmon=-8.96907E-1
ql2_imon=1.91783E-9
ql3_vset=
ql3_vmon=-9.04615E0
ql3_imon=3.09312E-10
ql4_vset=
ql4_vmon=-9.04179E0
ql4_imon=1.53422E-11
mult1=-1.05441E-8
mult2=-2.87402E-9
rf_tmon=-4.64568E-3
rf_agc=3.45369E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.6521E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.34669E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19364E1
lens5a_imon=2.01876E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12542E2
lens4a_imon=2.05237E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=3.15137E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04291E1
cs_ea1_imon=1.1049E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43565E0
lens1_imon=3.0064E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64951E1
os_ef1alow_imon=2.99784E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0381E1
cs_ea2_imon=1.35112E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=3.04793E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.37691E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11736E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14771E1
os_ea1_imon=2.33996E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64152E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=9.68638E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9199E2
cs_nozzle_imon=1.93571E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01587E1
cs_anode1_imon=1.96098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.39989E-8
tplens_vset=1.4E-1
tplens_vmon=1.66487E0
tplens_imon=-4.50754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.50938E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.267E1
iondef2_imon=1.58436E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.97794E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.07888E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23227E0
ionrepsh_imon=8.65896E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.20117E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.14344E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.60298E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71011E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.38525E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.45477E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.44149E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.31587E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.07018E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73115E1
iondef1_imon=1.11644E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.11008E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.12679E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=8.01486E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16198E0
cs_ionaccel_imon=-7.85084E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56826E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.70801E-1
window_imon=-8.1752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39369E-4
mask2_vset=0.0E0
mask2_vmon=-1.86879E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.48735E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.74113E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=6.97545E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58803E0
defgridb_imon=6.25806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.44216E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08398E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66879E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31807E1
cs_fil1_imon=7.5753E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.64158E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69283E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.70568E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.16425E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.74405E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2271E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67701E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.8129E-1	-8.97121E-1	-9.04655E0	-9.04217E0	4.33922E-3	9.50575E-2	2.73198E1	-3.26419E1	-3.2639E1	2.68233E1	1.20158E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00966E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.8141E-1	-8.97121E-1	-9.04658E0	-9.04198E0	4.41074E-3	9.5129E-2	2.73081E1	-3.26675E1	-3.26266E1	2.6804E1	1.19991E-7	2.51498E-3	2.51498E-3	6.32112E-3	3.00954E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.81195E-1	-8.97312E-1	-9.04665E0	-9.04188E0	4.12464E-3	9.50813E-2	2.73198E1	-3.26738E1	-3.26166E1	2.6829E1					
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.81195E-1	-8.96883E-1	-9.04672E0	-9.04207E0	4.1008E-3	9.50098E-2	2.73328E1	-3.26679E1	-3.26331E1	2.68364E1	1.20042E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.81171E-1	-8.96692E-1	-9.04684E0	-9.04212E0	4.29153E-3	9.48906E-2	2.73424E1	-3.26567E1	-3.26218E1	2.67926E1	1.19861E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.81314E-1	-8.96788E-1	-9.04694E0	-9.04195E0	4.36306E-3	9.51052E-2	2.73287E1	-3.26455E1	-3.26349E1	2.68376E1	1.19851E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.81338E-1	-8.96955E-1	-9.0467E0	-9.04188E0	4.43459E-3	9.52482E-2	2.73249E1	-3.26651E1	-3.26464E1	2.68377E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.81195E-1	-8.9674E-1	-9.04634E0	-9.04205E0	4.45843E-3	9.51767E-2	2.73285E1	-3.26657E1	-3.26116E1	2.68487E1	1.2026E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.98156E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09348E0	-8.81267E-1	-8.97241E-1	-9.04658E0	-9.04179E0	4.50611E-3	9.48906E-2	2.73273E1	-3.2653E1	-3.26284E1	2.68154E1	1.20031E-7	2.51359E-3	2.51359E-3	6.3074E-3	3.0041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.81243E-1	-8.96931E-1	-9.04682E0	-9.04179E0	4.22001E-3	9.50098E-2	2.73079E1	-3.27262E1	-3.26215E1	2.68334E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.01995E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.81529E-1	-8.96883E-1	-9.04665E0	-9.04174E0	4.36306E-3	9.52482E-2	2.7335E1	-3.26516E1	-3.26067E1	2.68656E1	1.20127E-7	2.51575E-3	2.51575E-3	6.31779E-3	3.00247E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.816E-1	-8.96716E-1	-9.04641E0	-9.04195E0	4.3869E-3	9.52482E-2	2.73303E1	-3.26789E1	-3.26356E1	2.68508E1	1.19785E-7	2.51874E-3	2.51874E-3	6.31902E-3	3.00087E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.81648E-1	-8.96835E-1	-9.04644E0	-9.04174E0	4.14848E-3	9.50336E-2	2.73267E1	-3.26729E1	-3.26308E1	2.68106E1	1.20055E-7	2.52815E-3	2.52815E-3	6.30202E-3	3.01738E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.81648E-1	-8.96668E-1	-9.04684E0	-9.042E0	4.17233E-3	9.50336E-2	2.73306E1	-3.26753E1	-3.25982E1	2.68094E1	1.19809E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.81529E-1	-8.96478E-1	-9.0466E0	-9.04198E0	4.36306E-3	9.54151E-2	2.73177E1	-3.26518E1	-3.26639E1	2.68238E1	1.1979E-7	2.51393E-3	2.51393E-3	6.3074E-3	2.99594E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.81624E-1	-8.96621E-1	-9.04627E0	-9.04162E0	4.19617E-3	9.49383E-2	2.73647E1	-3.26656E1	-3.26118E1	2.68231E1	1.19913E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00041E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.81529E-1	-8.96716E-1	-9.04646E0	-9.04195E0	4.43459E-3	9.50336E-2	2.73198E1	-3.26744E1	-3.26291E1	2.68148E1	1.19991E-7	2.52072E-3	2.52072E-3	6.31563E-3	3.0102E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.81481E-1	-8.96716E-1	-9.04686E0	-9.04186E0	4.3869E-3	9.52482E-2	2.7324E1	-3.26679E1	-3.2629E1	2.68364E1	1.19757E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.03976E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.81433E-1	-8.96668E-1	-9.04677E0	-9.04167E0	4.62532E-3	9.5129E-2	2.73165E1	-3.26603E1	-3.26116E1	2.68395E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-8.81386E-1	-8.96907E-1	-9.04615E0	-9.04179E0	4.45843E-3	9.49621E-2	2.73115E1	-3.267E1	-3.26446E1	2.68118E1	1.19902E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.00197E-1