[Scan]
initial_time=2016-01-18T19:28:33
final_time=2016-01-18T19:28:58
ip_count=19
run=1024
dataset=5
scan=355
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-8.8129E-1
ql1_imon=1.34861E-8
ql2_vset=
ql2_vmon=-8.96645E-1
ql2_imon=1.96877E-9
ql3_vset=
ql3_vmon=-9.0462E0
ql3_imon=2.91991E-10
ql4_vset=
ql4_vmon=-9.04131E0
ql4_imon=9.64403E-12
mult1=-9.83036E-9
mult2=-2.74677E-9
rf_tmon=-4.3443E-3
rf_agc=3.49077E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.68135E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68096E0
bslens_imon=2.44769E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=2.01589E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04888E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54199E1
cs_ef1b_imon=3.16903E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.0244E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04787E1
cs_ea1_imon=1.10697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41503E0
lens1_imon=2.61405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03513E1
cs_ea2_imon=1.36464E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.05983E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.37534E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.25886E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.38009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=9.39909E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=1.97539E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.37922E-8
tplens_vset=1.4E-1
tplens_vmon=1.66444E0
tplens_imon=-1.0422E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26431E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26791E1
iondef2_imon=1.55364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.06798E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3164E0
ionrepsh_imon=8.71599E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33528E1
lens5b_imon=2.15534E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57713E0
os_ea2_imon=-8.08562E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00948E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71528E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34665E-1
os_ef2bup_imon=-5.1603E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1152E1
os_restr2_imon=3.44581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.28406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01599E1
cs_anode2_imon=2.11883E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73523E1
iondef1_imon=1.10945E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68352E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.22288E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81331E-1
olens1_imon=8.01547E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-7.88688E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.8356E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-6.22906E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39016E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-4.60728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92605E3
multa_neg_imon=7.27545E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.30211E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.59399E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31697E0
defgridb_imon=6.1393E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33258E1
os_fil1_imon=9.44204E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07678E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66828E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31813E1
cs_fil1_imon=6.55418E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.37128E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69528E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50917E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21741E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.10543E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-1.62682E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.79094E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22865E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29624E-3
inlet_lpb_pmon=3.0041E-1
chamber_ion_pmon=1.19925E-7
chamber_cvt_pmon=2.52585E-3
foreline_cvt_pmon=2.52585E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.39781E-1
res40_imon=-2.57265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09317E0	-8.81314E-1	-8.9705E-1	-9.04684E0	-9.04193E0	4.64916E-3	9.51052E-2	2.73423E1	-3.26455E1	-3.25983E1	2.68302E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.9943E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.81076E-1	-8.9705E-1	-9.0466E0	-9.04167E0	5.07832E-3	9.51529E-2	2.73228E1	-3.26842E1	-3.26346E1	2.68226E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00302E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.81243E-1	-8.96597E-1	-9.0466E0	-9.04198E0	4.69685E-3	9.5129E-2	2.7326E1	-3.26498E1	-3.25976E1	2.68142E1	1.19861E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00824E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.81267E-1	-8.9705E-1	-9.04646E0	-9.04157E0	4.57764E-3	9.5129E-2	2.73069E1	-3.2652E1	-3.26166E1	2.68285E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.81028E-1	-8.96883E-1	-9.04632E0	-9.04181E0	4.31538E-3	9.51529E-2	2.73327E1	-3.26549E1	-3.2629E1	2.68346E1	1.19891E-7	2.52448E-3	2.52448E-3	6.31269E-3	3.006E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.8129E-1	-8.96788E-1	-9.04641E0	-9.04136E0	4.41074E-3	9.51529E-2	2.73063E1	-3.26315E1	-3.25954E1	2.68328E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09263E0	-8.81004E-1	-8.96692E-1	-9.04634E0	-9.04126E0	4.26769E-3	9.52005E-2	2.73328E1	-3.26626E1	-3.25894E1	2.6846E1	1.19819E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.0201E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0934E0	-8.81124E-1	-8.96692E-1	-9.04644E0	-9.04162E0	4.31538E-3	9.51052E-2	2.72867E1	-3.26499E1	-3.26627E1	2.68344E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.8098E-1	-8.96811E-1	-9.04648E0	-9.04169E0	4.50611E-3	9.51529E-2	2.73111E1	-3.26476E1	-3.26014E1	2.68383E1	1.20084E-7	2.51915E-3	2.51915E-3	6.34099E-3	3.01742E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.81338E-1	-8.96597E-1	-9.04629E0	-9.0416E0	4.673E-3	9.49383E-2	2.7344E1	-3.26189E1	-3.26071E1	2.6837E1	1.20158E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01223E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09325E0	-8.81147E-1	-8.96668E-1	-9.04632E0	-9.04157E0	4.52995E-3	9.52482E-2	2.73135E1	-3.26518E1	-3.26104E1	2.68412E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.81314E-1	-8.96454E-1	-9.04665E0	-9.04191E0	4.86374E-3	9.50575E-2	2.72895E1	-3.26374E1	-3.26368E1	2.68382E1	1.19925E-7	2.52362E-3	2.52362E-3	6.29624E-3	3.00144E-1
1.6E1	0.0E0	1.0E0	6.47E2	4.41E2	-2.09526E0	-8.81219E-1	-8.96692E-1	-9.04639E0	-9.04195E0	4.673E-3	9.50098E-2	2.73399E1	-3.26561E1	-3.26434E1	2.68364E1	1.19953E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.81219E-1	-8.96668E-1	-9.04655E0	-9.04188E0	4.81606E-3	9.52005E-2	2.73183E1	-3.26506E1	-3.2614E1	2.68166E1	1.19925E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.01209E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.81267E-1	-8.96668E-1	-9.04665E0	-9.04193E0	4.62532E-3	9.51052E-2	2.73105E1	-3.26627E1	-3.25731E1	2.68472E1	1.19913E-7	2.52428E-3	2.52428E-3	6.33486E-3	3.00302E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.80957E-1	-8.96502E-1	-9.04665E0	-9.04179E0	4.36306E-3	9.50575E-2	2.73424E1	-3.26789E1	-3.26266E1	2.68286E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.81028E-1	-8.9674E-1	-9.04622E0	-9.04181E0	4.69685E-3	9.49144E-2	2.73958E1	-3.26573E1	-3.26356E1	2.68316E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.81171E-1	-8.96668E-1	-9.04639E0	-9.04195E0	4.55379E-3	9.50098E-2	2.73173E1	-3.26718E1	-3.2626E1	2.68447E1	1.19876E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.81124E-1	-8.96668E-1	-9.04646E0	-9.04162E0	4.48227E-3	9.49383E-2	2.72709E1	-3.26753E1	-3.2623E1	2.6816E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.8129E-1	-8.96645E-1	-9.0462E0	-9.04131E0	4.55379E-3	9.51529E-2	2.73523E1	-3.26791E1	-3.26431E1	2.68352E1	1.19925E-7	2.52585E-3	2.52585E-3	6.29624E-3	3.0041E-1