[Scan]
initial_time=2016-01-18T19:29:07
final_time=2016-01-18T19:29:32
ip_count=19
run=1024
dataset=5
scan=356
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.81124E-1
ql1_imon=1.33359E-8
ql2_vset=
ql2_vmon=-8.96835E-1
ql2_imon=1.92755E-9
ql3_vset=
ql3_vmon=-9.0466E0
ql3_imon=2.66826E-10
ql4_vset=
ql4_vmon=-9.04212E0
ql4_imon=2.71916E-11
mult1=-8.94571E-9
mult2=-2.68069E-9
rf_tmon=-3.92962E-3
rf_agc=3.44211E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.6952E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.66753E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=2.01696E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.04826E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54097E1
cs_ef1b_imon=3.18452E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=1.10635E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40561E0
lens1_imon=2.45123E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.35076E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.06667E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.37836E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1161E1
os_restr1_imon=4.26175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15053E1
os_ea1_imon=2.38791E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63293E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23107E0
cs_ionrep_imon=9.39798E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93539E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02085E1
cs_anode1_imon=1.97179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.38951E-8
tplens_vset=1.4E-1
tplens_vmon=1.6937E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26518E1
iondef3_imon=1.50938E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26368E1
iondef2_imon=1.54615E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.9809E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.08671E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29476E0
ionrepsh_imon=8.78874E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53268E0
os_ea2_imon=-9.37423E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.1784E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23252E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11388E1
os_restr2_imon=3.45194E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.09432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72973E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.16431E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8114E-1
olens1_imon=8.02815E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10672E0
cs_ionaccel_imon=-8.89599E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.39567E-1
window_imon=-6.33718E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82689E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-3.74232E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92576E3
multa_neg_imon=8.03531E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50187E3
multb_neg_imon=7.46212E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18201E0
defgridb_imon=5.95885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.4263E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07942E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66835E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31823E1
cs_fil1_imon=7.62335E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.60554E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69782E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.70568E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.23543E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.0534E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.09534E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.63476E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22893E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.63807E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.81243E-1	-8.96311E-1	-9.04653E0	-9.04188E0	4.43459E-3	9.52244E-2	2.73434E1	-3.26514E1	-3.25835E1	2.68285E1	1.19601E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01347E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.81195E-1	-8.96645E-1	-9.04639E0	-9.04167E0	4.29153E-3	9.50336E-2	2.73411E1	-3.26573E1	-3.26543E1	2.68132E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.811E-1	-8.96573E-1	-9.04655E0	-9.04171E0	4.26769E-3	9.49621E-2	2.73075E1	-3.2672E1	-3.26077E1	2.68348E1	1.20137E-7	2.51693E-3	2.51693E-3	6.33538E-3	2.99879E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09356E0	-8.81028E-1	-8.96645E-1	-9.0466E0	-9.04169E0	4.3869E-3	9.52482E-2	2.73069E1	-3.26615E1	-3.2614E1	2.68448E1	1.20142E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.81052E-1	-8.96764E-1	-9.04644E0	-9.04186E0	4.26769E-3	9.5129E-2	2.73075E1	-3.26615E1	-3.25972E1	2.68388E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09294E0	-8.81004E-1	-8.96764E-1	-9.04641E0	-9.04186E0	4.31538E-3	9.51052E-2	2.72973E1	-3.26517E1	-3.26087E1	2.68244E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.81124E-1	-8.96573E-1	-9.04646E0	-9.04157E0	4.31538E-3	9.47952E-2	2.73194E1	-3.26485E1	-3.25848E1	2.684E1	1.19676E-7	2.51549E-3	2.51549E-3	6.28703E-3	3.01365E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09333E0	-8.81076E-1	-8.96525E-1	-9.04646E0	-9.04171E0	4.24385E-3	9.50813E-2	2.72806E1	-3.26793E1	-3.26419E1	2.68344E1	1.1995E-7	2.51874E-3	2.51874E-3	6.31321E-3	2.99811E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.80814E-1	-8.96406E-1	-9.04679E0	-9.04169E0	4.55379E-3	9.49144E-2	2.72895E1	-3.26482E1	-3.26236E1	2.68383E1	1.19861E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09302E0	-8.81028E-1	-8.96525E-1	-9.04651E0	-9.04167E0	4.55379E-3	9.47475E-2	2.73442E1	-3.26488E1	-3.25876E1	2.68163E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00041E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-8.81219E-1	-8.9643E-1	-9.04648E0	-9.04148E0	4.55379E-3	9.47952E-2	2.73424E1	-3.26663E1	-3.26098E1	2.68424E1	1.20244E-7	2.51804E-3	2.51804E-3	6.33538E-3	3.00676E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09317E0	-8.811E-1	-8.96645E-1	-9.04613E0	-9.04183E0	4.673E-3	9.47475E-2	2.73482E1	-3.26508E1	-3.26296E1	2.68605E1	1.19953E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.9943E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.811E-1	-8.96573E-1	-9.0461E0	-9.04167E0	4.673E-3	9.49383E-2	2.72979E1	-3.26512E1	-3.2593E1	2.68064E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.03545E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0934E0	-8.81052E-1	-8.96883E-1	-9.04641E0	-9.04181E0	4.60148E-3	9.4986E-2	2.73255E1	-3.26482E1	-3.26284E1	2.68352E1	1.20031E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00676E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.81171E-1	-8.96907E-1	-9.04639E0	-9.04181E0	4.64916E-3	9.4533E-2	2.73315E1	-3.26615E1	-3.26476E1	2.68496E1	1.20311E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.99175E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.81124E-1	-8.96573E-1	-9.04665E0	-9.04207E0	4.64916E-3	9.48668E-2	2.73604E1	-3.26825E1	-3.26134E1	2.68232E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.80957E-1	-8.96764E-1	-9.04651E0	-9.04143E0	4.57764E-3	9.49144E-2	2.72998E1	-3.26756E1	-3.26095E1	2.68232E1	1.19965E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.81004E-1	-8.96955E-1	-9.04655E0	-9.04171E0	4.57764E-3	9.49383E-2	2.73417E1	-3.26531E1	-3.26337E1	2.68163E1	1.19953E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01995E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.80933E-1	-8.96716E-1	-9.04667E0	-9.04174E0	4.45843E-3	9.47714E-2	2.73181E1	-3.26567E1	-3.26001E1	2.68466E1	1.20106E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.81124E-1	-8.96835E-1	-9.0466E0	-9.04212E0	4.36306E-3	9.51529E-2	2.72973E1	-3.26368E1	-3.26518E1	2.68052E1	1.198E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.99941E-1