[Scan]
initial_time=2016-01-18T19:29:41
final_time=2016-01-18T19:30:06
ip_count=19
run=1024
dataset=5
scan=357
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08749E-4
ql1_vset=
ql1_vmon=-8.81052E-1
ql1_imon=1.33979E-8
ql2_vset=
ql2_vmon=-8.9674E-1
ql2_imon=1.92816E-9
ql3_vset=
ql3_vmon=-9.04672E0
ql3_imon=2.22945E-10
ql4_vset=
ql4_vmon=-9.04214E0
ql4_imon=-3.99351E-12
mult1=-1.04444E-8
mult2=-2.82565E-9
rf_tmon=-3.54827E-3
rf_agc=3.4063E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.71504E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66854E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19652E1
lens5a_imon=2.00182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54217E1
cs_ef1b_imon=3.15965E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04453E1
cs_ea1_imon=1.09769E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38277E0
lens1_imon=2.75765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65005E1
os_ef1alow_imon=2.99027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.36518E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84094E1
cs_ef1a_imon=3.04865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.37903E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11772E1
os_restr1_imon=4.24985E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=2.37241E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63269E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20704E0
cs_ionrep_imon=9.25018E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=1.96206E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.39981E-8
tplens_vset=1.4E-1
tplens_vmon=1.63302E0
tplens_imon=-7.94438E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26511E1
iondef3_imon=1.48919E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26419E1
iondef2_imon=1.58076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98281E-4
ql6_vset=1.0E-1
ql6_vmon=9.52959E-2
ql6_imon=4.08424E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=8.36696E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33297E1
lens5b_imon=2.15178E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74922E1
cs_ef2b_imon=3.13839E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50685E0
os_ea2_imon=-8.86953E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.0076E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.16758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.39245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.58091E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.114E1
os_restr2_imon=3.44257E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.29171E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.08748E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72763E1
iondef1_imon=1.12473E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.16481E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.99599E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14696E0
cs_ionaccel_imon=-7.74273E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56754E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.62993E-1
window_imon=-5.11183E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82672E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.71086E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.71589E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.31071E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48878E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33276E1
os_fil1_imon=9.43862E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0841E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66715E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31841E1
cs_fil1_imon=7.92369E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.04692E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69421E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6541E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07325E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.20421E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22791E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31555E-3
inlet_lpb_pmon=3.00896E-1
chamber_ion_pmon=1.19804E-7
chamber_cvt_pmon=2.51376E-3
foreline_cvt_pmon=2.51376E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.60203E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.811E-1	-8.96811E-1	-9.04675E0	-9.04186E0	4.3869E-3	9.4986E-2	2.73476E1	-3.26413E1	-3.26366E1	2.68458E1	1.20122E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.9978E-1
2.0E0	4.7E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.811E-1	-8.97121E-1	-9.04691E0	-9.04191E0	4.33922E-3	9.50575E-2	2.73235E1	-3.27019E1	-3.25825E1	2.68188E1	1.19646E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.8098E-1	-8.96764E-1	-9.04682E0	-9.04195E0	4.14848E-3	9.46522E-2	2.7312E1	-3.26457E1	-3.26324E1	2.68473E1	1.19766E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.99348E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.80742E-1	-8.96907E-1	-9.04675E0	-9.04195E0	4.43459E-3	9.49144E-2	2.73269E1	-3.27009E1	-3.26236E1	2.68623E1	1.19782E-7	2.51679E-3	2.51679E-3	6.30221E-3	3.0E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.80885E-1	-8.96621E-1	-9.04665E0	-9.04145E0	4.48227E-3	9.49383E-2	2.73358E1	-3.2639E1	-3.2639E1	2.67998E1	1.19902E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.81076E-1	-8.96811E-1	-9.04665E0	-9.04148E0	4.3869E-3	9.50813E-2	2.73676E1	-3.26573E1	-3.2623E1	2.6852E1	1.20174E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.81028E-1	-8.96525E-1	-9.04653E0	-9.04195E0	4.19617E-3	9.52959E-2	2.73027E1	-3.26708E1	-3.26006E1	2.68603E1	1.20122E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.81267E-1	-8.96645E-1	-9.04675E0	-9.04183E0	4.36306E-3	9.53436E-2	2.73014E1	-3.25893E1	-3.26505E1	2.68256E1	1.19891E-7	2.51287E-3	2.51287E-3	6.34982E-3	3.02368E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.80718E-1	-8.96788E-1	-9.04667E0	-9.04155E0	4.22001E-3	9.50813E-2	2.72913E1	-3.26633E1	-3.25852E1	2.68605E1	1.19819E-7	2.52473E-3	2.52473E-3	6.32418E-3	3.02277E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.80909E-1	-8.9674E-1	-9.0467E0	-9.04179E0	4.62532E-3	9.50813E-2	2.73027E1	-3.26332E1	-3.26687E1	2.6831E1	1.19861E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.02133E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.80623E-1	-8.96764E-1	-9.04691E0	-9.04183E0	4.64916E-3	9.48906E-2	2.72992E1	-3.26744E1	-3.2629E1	2.68322E1	1.20174E-7	2.52099E-3	2.52099E-3	6.27461E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.80647E-1	-8.96549E-1	-9.04691E0	-9.04186E0	4.48227E-3	9.4986E-2	2.7346E1	-3.26747E1	-3.25864E1	2.6819E1	1.19851E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.9943E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.80742E-1	-8.96645E-1	-9.04667E0	-9.04207E0	4.36306E-3	9.50575E-2	2.73169E1	-3.26419E1	-3.26119E1	2.68319E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.80742E-1	-8.96692E-1	-9.04682E0	-9.0416E0	4.26769E-3	9.51529E-2	2.7301E1	-3.26354E1	-3.25942E1	2.6837E1	1.19902E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.01223E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.80671E-1	-8.96716E-1	-9.04667E0	-9.04176E0	4.24385E-3	9.52959E-2	2.73003E1	-3.26615E1	-3.26038E1	2.68526E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.811E-1	-8.96668E-1	-9.04677E0	-9.04191E0	4.33922E-3	9.52721E-2	2.73234E1	-3.26502E1	-3.26531E1	2.68508E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.9943E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.80909E-1	-8.96788E-1	-9.04682E0	-9.04162E0	4.3869E-3	9.54151E-2	2.73016E1	-3.26579E1	-3.25942E1	2.68256E1	1.20278E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.81195E-1	-8.9674E-1	-9.04655E0	-9.04167E0	4.60148E-3	9.52005E-2	2.73505E1	-3.26608E1	-3.2659E1	2.68166E1	1.1969E-7	2.51287E-3	2.51287E-3	6.32858E-3	3.006E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.81243E-1	-8.96788E-1	-9.04663E0	-9.04202E0	4.57764E-3	9.51767E-2	2.7298E1	-3.26891E1	-3.26054E1	2.68412E1	1.19861E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.02133E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.81052E-1	-8.9674E-1	-9.04672E0	-9.04214E0	4.3869E-3	9.52959E-2	2.72763E1	-3.26419E1	-3.26511E1	2.68112E1	1.19804E-7	2.51376E-3	2.51376E-3	6.31555E-3	3.00896E-1