[Scan]
initial_time=2016-01-18T19:34:23
final_time=2016-01-18T19:34:44
ip_count=19
run=1024
dataset=5
scan=366
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08737E-4
ql1_vset=
ql1_vmon=-8.80599E-1
ql1_imon=1.33536E-8
ql2_vset=
ql2_vmon=-8.96406E-1
ql2_imon=1.91892E-9
ql3_vset=
ql3_vmon=-9.04703E0
ql3_imon=1.56903E-10
ql4_vset=
ql4_vmon=-9.0415E0
ql4_imon=-8.76188E-12
mult1=-9.78762E-9
mult2=-2.7378E-9
rf_tmon=-5.74158E-3
rf_agc=3.22123E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.69698E-9
bslens_vset=-6.2E0
bslens_vmon=-6.663E0
bslens_imon=2.56877E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19786E1
lens5a_imon=2.00778E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05056E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=3.16104E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04602E1
cs_ea1_imon=1.11084E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3695E0
lens1_imon=2.79649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64852E1
os_ef1alow_imon=2.98252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03372E1
cs_ea2_imon=1.34591E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.845E1
cs_ef1a_imon=3.03566E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.37407E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1151E1
os_restr1_imon=4.27221E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15342E1
os_ea1_imon=2.35304E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63242E1
os_ef1bup_imon=3.08282E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23496E0
cs_ionrep_imon=9.74208E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93497E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=1.96117E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.39693E-8
tplens_vset=1.4E-1
tplens_vmon=1.65184E0
tplens_imon=-4.06338E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26572E1
iondef3_imon=1.51413E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26422E1
iondef2_imon=1.5729E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03004E2
lens6_imon=2.98085E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.07207E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2674E0
ionrepsh_imon=8.67692E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33701E1
lens5b_imon=2.18813E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74707E1
cs_ef2b_imon=3.1311E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56552E0
os_ea2_imon=-7.55271E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00575E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7117E1
cs_ef2a_imon=3.16553E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13128E0
os_ef2alow_imon=-2.42835E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2383E-1
os_ef2bup_imon=-5.11178E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11192E1
os_restr2_imon=3.45221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01853E1
cs_anode2_imon=2.08056E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72783E1
iondef1_imon=1.11011E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68331E1
iondef4_imon=1.10898E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.12652E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.99463E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13388E0
cs_ionaccel_imon=-8.34015E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47526E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56418E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.72488E-1
window_imon=-6.91797E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82678E2
mask1_imon=2.3926E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.98273E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.59802E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.14896E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36984E0
defgridb_imon=6.13155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.42383E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07841E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66682E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31835E1
cs_fil1_imon=7.89157E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02681E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69328E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.65993E-2
os_fil2_imon=-2.68122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.17014E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30727E-1
cs_fil2_imon=-2.10112E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43562E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22834E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33297E-3
inlet_lpb_pmon=3.01121E-1
chamber_ion_pmon=1.2021E-7
chamber_cvt_pmon=2.51345E-3
foreline_cvt_pmon=2.51345E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.17394E-1
res40_imon=-2.34602E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.80814E-1	-8.96573E-1	-9.04639E0	-9.0421E0	4.33922E-3	9.51052E-2	2.73257E1	-3.26561E1	-3.26024E1	2.68256E1	1.19757E-7	2.51116E-3	2.51116E-3	6.29645E-3	3.01609E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.80718E-1	-8.96478E-1	-9.04646E0	-9.04186E0	4.55379E-3	9.51529E-2	2.73496E1	-3.26561E1	-3.26506E1	2.68354E1	1.19861E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.8048E-1	-8.96811E-1	-9.04644E0	-9.04179E0	4.31538E-3	9.50336E-2	2.73187E1	-3.26868E1	-3.25924E1	2.68328E1	1.198E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00197E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.80551E-1	-8.9674E-1	-9.04636E0	-9.04193E0	4.36306E-3	9.48429E-2	2.73303E1	-3.26681E1	-3.26326E1	2.68304E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.80742E-1	-8.96358E-1	-9.04675E0	-9.04176E0	4.69685E-3	9.55105E-2	2.73598E1	-3.26723E1	-3.26236E1	2.68256E1	1.19902E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.80527E-1	-8.96716E-1	-9.04644E0	-9.04195E0	4.57764E-3	9.52244E-2	2.73417E1	-3.26663E1	-3.26044E1	2.68286E1	1.20031E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.0201E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.80504E-1	-8.96764E-1	-9.04646E0	-9.04164E0	4.673E-3	9.51529E-2	2.73682E1	-3.26478E1	-3.26266E1	2.68412E1	1.19757E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.80694E-1	-8.96668E-1	-9.04641E0	-9.04162E0	4.673E-3	9.52005E-2	2.73088E1	-3.26358E1	-3.26015E1	2.6834E1	1.19749E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.80837E-1	-8.96811E-1	-9.04677E0	-9.04186E0	4.79221E-3	9.50575E-2	2.72379E1	-3.26747E1	-3.26011E1	2.68285E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.80527E-1	-8.96573E-1	-9.04651E0	-9.04202E0	4.60148E-3	9.52005E-2	2.73831E1	-3.26528E1	-3.26822E1	2.68356E1	1.20092E-7	2.51709E-3	2.51709E-3	6.33388E-3	3.00852E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.80742E-1	-8.96788E-1	-9.04663E0	-9.04241E0	4.45843E-3	9.48668E-2	2.72721E1	-3.26785E1	-3.26331E1	2.6822E1	1.20045E-7	2.51271E-3	2.51271E-3	6.30171E-3	2.9917E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.80647E-1	-8.96573E-1	-9.04658E0	-9.04191E0	4.52995E-3	9.50098E-2	2.72817E1	-3.26753E1	-3.26392E1	2.68418E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.9978E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.80408E-1	-8.96645E-1	-9.04675E0	-9.04186E0	4.52995E-3	9.49383E-2	2.72931E1	-3.26422E1	-3.26705E1	2.6843E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.80241E-1	-8.96764E-1	-9.04665E0	-9.04155E0	4.33922E-3	9.47714E-2	2.73311E1	-3.26785E1	-3.2629E1	2.68304E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.97901E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.80408E-1	-8.96621E-1	-9.04655E0	-9.04202E0	4.31538E-3	9.47237E-2	2.73231E1	-3.26614E1	-3.26289E1	2.68285E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.80599E-1	-8.96692E-1	-9.04646E0	-9.04179E0	4.1008E-3	9.51052E-2	2.72837E1	-3.26407E1	-3.26536E1	2.68188E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99941E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.80313E-1	-8.96692E-1	-9.04646E0	-9.04188E0	4.19617E-3	9.52244E-2	2.72907E1	-3.26482E1	-3.26332E1	2.68406E1	1.19766E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.99879E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.80432E-1	-8.96645E-1	-9.04672E0	-9.04145E0	4.36306E-3	9.50813E-2	2.73057E1	-3.26724E1	-3.26063E1	2.68274E1	1.19902E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.99175E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.80575E-1	-8.96668E-1	-9.04689E0	-9.04155E0	4.22001E-3	9.47475E-2	2.7251E1	-3.26733E1	-3.26106E1	2.68395E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.80599E-1	-8.96406E-1	-9.04703E0	-9.0415E0	4.22001E-3	9.48906E-2	2.72783E1	-3.26422E1	-3.26572E1	2.68331E1	1.2021E-7	2.51345E-3	2.51345E-3	6.33297E-3	3.01121E-1