[Scan]
initial_time=2016-01-18T19:35:21
final_time=2016-01-18T19:35:43
ip_count=19
run=1024
dataset=5
scan=368
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.80551E-1
ql1_imon=1.34227E-8
ql2_vset=
ql2_vmon=-8.96263E-1
ql2_imon=1.9183E-9
ql3_vset=
ql3_vmon=-9.04698E0
ql3_imon=2.17152E-10
ql4_vset=
ql4_vmon=-9.0416E0
ql4_imon=-7.80821E-12
mult1=-1.02441E-8
mult2=-2.85456E-9
rf_tmon=-3.70721E-3
rf_agc=3.36748E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.63475E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63239E0
bslens_imon=2.30431E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19841E1
lens5a_imon=2.00191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04869E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53992E1
cs_ef1b_imon=3.15992E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=1.10093E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38419E0
lens1_imon=2.7818E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64864E1
os_ef1alow_imon=2.98589E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03513E1
cs_ea2_imon=1.33012E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84126E1
cs_ef1a_imon=3.054E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.372E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11498E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15018E1
os_ea1_imon=2.37104E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63891E1
os_ef1bup_imon=3.08282E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23128E0
cs_ionrep_imon=9.3454E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93516E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01921E1
cs_anode1_imon=1.96229E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.39824E-8
tplens_vset=1.4E-1
tplens_vmon=1.65062E0
tplens_imon=-2.484E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26231E1
iondef3_imon=1.50605E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.5729E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98136E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.10321E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25026E0
ionrepsh_imon=8.40879E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33529E1
lens5b_imon=2.17931E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13709E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55206E0
os_ea2_imon=-8.80152E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00975E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.16703E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09011E0
os_ef2alow_imon=-2.44332E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26325E-1
os_ef2bup_imon=-5.11553E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11204E1
os_restr2_imon=3.44959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29414E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01753E1
cs_anode2_imon=2.09403E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73523E1
iondef1_imon=1.10313E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68337E1
iondef4_imon=1.09701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.12115E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=8.00976E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13139E0
cs_ionaccel_imon=-7.96589E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47383E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56748E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.44419E-1
window_imon=-6.73084E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82688E2
mask1_imon=2.39305E-4
mask2_vset=0.0E0
mask2_vmon=-1.86537E1
mask2_imon=-5.90748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.68889E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.46946E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.51993E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47097E0
defgridb_imon=6.05075E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.43824E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07959E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66883E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31789E1
cs_fil1_imon=7.62959E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00124E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69623E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73878E-2
os_fil2_imon=-2.32567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08434E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.09922E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2898E-1
cs_fil2_imon=-2.36933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.7475E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22763E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.16771E-1
res40_imon=-2.42461E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=146
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.8048E-1	-8.96668E-1	-9.04677E0	-9.04169E0	4.69685E-3	9.51529E-2	2.73204E1	-3.2675E1	-3.26502E1	2.68304E1	1.20154E-7	2.51611E-3	2.51611E-3	6.3074E-3	2.9944E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.80671E-1	-8.96549E-1	-9.04665E0	-9.04162E0	4.76837E-3	9.50336E-2	2.73235E1	-3.26529E1	-3.2645E1	2.68304E1	1.19902E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.80456E-1	-8.96692E-1	-9.04679E0	-9.04162E0	4.55379E-3	9.4986E-2	2.73334E1	-3.26691E1	-3.26213E1	2.68319E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.80814E-1	-8.96525E-1	-9.04679E0	-9.04136E0	4.55379E-3	9.5129E-2	2.73234E1	-3.26856E1	-3.26419E1	2.68316E1	1.20004E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.80361E-1	-8.96621E-1	-9.04663E0	-9.04121E0	4.22001E-3	9.52721E-2	2.73279E1	-3.26675E1	-3.25858E1	2.68502E1	1.20055E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.80408E-1	-8.96406E-1	-9.04672E0	-9.04167E0	4.57764E-3	9.52721E-2	2.73387E1	-3.26879E1	-3.26236E1	2.6825E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.8048E-1	-8.96621E-1	-9.04658E0	-9.04157E0	4.43459E-3	9.53197E-2	2.73303E1	-3.2641E1	-3.26242E1	2.68599E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.80599E-1	-8.96811E-1	-9.04694E0	-9.04207E0	4.50611E-3	9.51529E-2	2.7321E1	-3.26602E1	-3.26012E1	2.6834E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.80504E-1	-8.96335E-1	-9.04696E0	-9.04186E0	4.48227E-3	9.50336E-2	2.73099E1	-3.26452E1	-3.26146E1	2.68377E1	1.20174E-7	2.52647E-3	2.52647E-3	6.29098E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.80623E-1	-8.96382E-1	-9.04672E0	-9.04181E0	4.17233E-3	9.50813E-2	2.73321E1	-3.26284E1	-3.26098E1	2.6816E1	1.2026E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.02511E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.80265E-1	-8.96263E-1	-9.04665E0	-9.04164E0	4.43459E-3	9.52482E-2	2.74102E1	-3.26747E1	-3.26494E1	2.6843E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.80647E-1	-8.96215E-1	-9.04698E0	-9.04169E0	4.43459E-3	9.50098E-2	2.73057E1	-3.26704E1	-3.2622E1	2.67868E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.80527E-1	-8.96215E-1	-9.04665E0	-9.04167E0	4.55379E-3	9.53197E-2	2.73185E1	-3.26623E1	-3.26406E1	2.68341E1	1.20028E-7	2.52405E-3	2.52405E-3	6.3074E-3	2.99753E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.80575E-1	-8.96287E-1	-9.04715E0	-9.04205E0	4.673E-3	9.52244E-2	2.72979E1	-3.26849E1	-3.25996E1	2.68454E1	1.20132E-7	2.52266E-3	2.52266E-3	6.33706E-3	3.00479E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.80671E-1	-8.96192E-1	-9.04715E0	-9.04148E0	4.43459E-3	9.51529E-2	2.72541E1	-3.26318E1	-3.26208E1	2.68395E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9952E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.80408E-1	-8.9643E-1	-9.04682E0	-9.04164E0	4.45843E-3	9.52482E-2	2.7201E1	-3.25923E1	-3.27227E1	2.68496E1	1.20092E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.01104E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.80599E-1	-8.96502E-1	-9.04698E0	-9.04174E0	4.48227E-3	9.53674E-2	2.73387E1	-3.26425E1	-3.26514E1	2.68316E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.80575E-1	-8.96382E-1	-9.04684E0	-9.04193E0	4.64916E-3	9.50098E-2	2.73263E1	-3.26638E1	-3.26065E1	2.68343E1	1.19809E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.80599E-1	-8.9643E-1	-9.04682E0	-9.04214E0	4.93526E-3	9.50098E-2	2.73847E1	-3.27086E1	-3.25947E1	2.68454E1	1.19991E-7	2.52236E-3	2.52236E-3	6.3445E-3	3.00097E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.80551E-1	-8.96263E-1	-9.04698E0	-9.0416E0	4.36306E-3	9.50098E-2	2.73523E1	-3.26555E1	-3.26231E1	2.68337E1	1.19757E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1