[Scan]
initial_time=2016-01-18T19:36:20
final_time=2016-01-18T19:36:41
ip_count=19
run=1024
dataset=5
scan=370
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09364E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.80933E-1
ql1_imon=1.34676E-8
ql2_vset=
ql2_vmon=-8.96335E-1
ql2_imon=1.89086E-9
ql3_vset=
ql3_vmon=-9.04663E0
ql3_imon=2.18081E-10
ql4_vset=
ql4_vmon=-9.04174E0
ql4_imon=-2.04921E-11
mult1=-1.0055E-8
mult2=-2.94471E-9
rf_tmon=-2.79876E-3
rf_agc=3.4542E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.65786E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.48663E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=2.0074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05012E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=3.14884E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04534E1
cs_ea1_imon=1.08007E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37728E0
lens1_imon=2.57157E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03431E1
cs_ea2_imon=1.34553E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=3.04108E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.37358E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15099E1
os_ea1_imon=2.36771E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22555E0
cs_ionrep_imon=9.48404E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.9371E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=1.96818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.38096E-8
tplens_vset=1.4E-1
tplens_vmon=1.68509E0
tplens_imon=-4.15688E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26018E1
iondef3_imon=1.50869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26868E1
iondef2_imon=1.55435E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.9818E-4
ql6_vset=1.0E-1
ql6_vmon=9.48668E-2
ql6_imon=4.01889E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28572E0
ionrepsh_imon=8.54963E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56652E0
os_ea2_imon=-5.85579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.1665E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06477E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.47279E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.4577E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.30282E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.08495E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73458E1
iondef1_imon=1.11723E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.10648E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.13061E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.9797E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-9.00411E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47608E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56693E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=2.72603E-1
window_imon=-6.12094E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86722E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.55152E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93656E3
defgrida_imon=6.85072E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.91797E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4971E0
defgridb_imon=6.01188E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33301E1
os_fil1_imon=9.42672E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07858E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66605E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31849E1
cs_fil1_imon=7.44316E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.26316E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69178E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.62314E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.29905E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.20346E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43655E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22738E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=3.01356E-1
chamber_ion_pmon=1.19891E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.52394E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.80504E-1	-8.96549E-1	-9.0467E0	-9.042E0	4.3869E-3	9.50575E-2	2.7337E1	-3.26602E1	-3.26443E1	2.68238E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09294E0	-8.80265E-1	-8.96549E-1	-9.0466E0	-9.04169E0	4.14848E-3	9.49383E-2	2.73255E1	-3.26573E1	-3.26254E1	2.68412E1	1.20092E-7	2.51919E-3	2.51919E-3	6.3074E-3	2.99845E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.80527E-1	-8.96406E-1	-9.04679E0	-9.04183E0	4.50611E-3	9.48906E-2	2.73092E1	-3.26625E1	-3.26498E1	2.68296E1	1.19819E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.9829E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.80599E-1	-8.96478E-1	-9.04686E0	-9.04138E0	4.52995E-3	9.5129E-2	2.73522E1	-3.26334E1	-3.26107E1	2.68514E1	1.20042E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.80551E-1	-8.96287E-1	-9.04672E0	-9.04171E0	4.48227E-3	9.52005E-2	2.7285E1	-3.26868E1	-3.2626E1	2.68412E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.80432E-1	-8.96335E-1	-9.04672E0	-9.04176E0	4.55379E-3	9.52244E-2	2.73309E1	-3.26374E1	-3.2635E1	2.68184E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.80742E-1	-8.96287E-1	-9.0467E0	-9.04191E0	4.12464E-3	9.5439E-2	2.73216E1	-3.26573E1	-3.25947E1	2.68227E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.80671E-1	-8.96382E-1	-9.0466E0	-9.04171E0	4.24385E-3	9.56059E-2	2.73126E1	-3.26411E1	-3.25953E1	2.68418E1	1.19902E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.80384E-1	-8.96716E-1	-9.04698E0	-9.04171E0	4.60148E-3	9.52721E-2	2.73357E1	-3.26701E1	-3.26083E1	2.6825E1	1.19991E-7	2.51603E-3	2.51603E-3	6.30212E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.80432E-1	-8.96454E-1	-9.04686E0	-9.04167E0	4.55379E-3	9.50813E-2	2.73321E1	-3.26524E1	-3.26128E1	2.6846E1	1.20031E-7	2.51804E-3	2.51804E-3	6.34099E-3	2.99083E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.80384E-1	-8.96692E-1	-9.04686E0	-9.04131E0	4.45843E-3	9.53674E-2	2.73181E1	-3.26543E1	-3.26231E1	2.68352E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.97187E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.80265E-1	-8.96549E-1	-9.04655E0	-9.04198E0	4.52995E-3	9.51767E-2	2.7326E1	-3.26381E1	-3.26024E1	2.68006E1	1.20017E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.80289E-1	-8.96311E-1	-9.04665E0	-9.04169E0	4.62532E-3	9.52482E-2	2.73153E1	-3.26422E1	-3.26266E1	2.681E1	1.20132E-7	2.52285E-3	2.52285E-3	6.31234E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.8048E-1	-8.96573E-1	-9.04691E0	-9.0416E0	4.64916E-3	9.52005E-2	2.73092E1	-3.26626E1	-3.26378E1	2.68244E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.80313E-1	-8.96811E-1	-9.04665E0	-9.04181E0	4.43459E-3	9.50336E-2	2.73243E1	-3.26747E1	-3.26272E1	2.68288E1	1.19851E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.97901E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.8048E-1	-8.96478E-1	-9.04672E0	-9.0414E0	4.72069E-3	9.52244E-2	2.73123E1	-3.26825E1	-3.26729E1	2.68316E1	1.19872E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.98819E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0934E0	-8.80551E-1	-8.96358E-1	-9.0467E0	-9.0416E0	4.57764E-3	9.4986E-2	2.73097E1	-3.26515E1	-3.26277E1	2.68308E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.8048E-1	-8.96239E-1	-9.04658E0	-9.04183E0	4.36306E-3	9.50575E-2	2.73131E1	-3.26768E1	-3.2637E1	2.68172E1	1.19979E-7	2.51886E-3	2.51886E-3	6.3074E-3	3.0223E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09348E0	-8.80909E-1	-8.96239E-1	-9.0467E0	-9.04157E0	4.57764E-3	9.50336E-2	2.72839E1	-3.26573E1	-3.26272E1	2.68418E1	1.19991E-7	2.51952E-3	2.51952E-3	6.30171E-3	3.01337E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09364E0	-8.80933E-1	-8.96335E-1	-9.04663E0	-9.04174E0	4.43459E-3	9.48668E-2	2.73458E1	-3.26868E1	-3.26018E1	2.68154E1	1.19891E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.01356E-1