[Scan]
initial_time=2016-01-18T19:36:49
final_time=2016-01-18T19:37:11
ip_count=19
run=1024
dataset=5
scan=371
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08751E-4
ql1_vset=
ql1_vmon=-8.80599E-1
ql1_imon=1.33889E-8
ql2_vset=
ql2_vmon=-8.96478E-1
ql2_imon=1.91962E-9
ql3_vset=
ql3_vmon=-9.04675E0
ql3_imon=2.16258E-10
ql4_vset=
ql4_vmon=-9.04193E0
ql4_imon=3.76701E-12
mult1=-9.92918E-9
mult2=-2.85412E-9
rf_tmon=-2.3117E-3
rf_agc=3.51342E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.72403E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.39355E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19688E1
lens5a_imon=2.01227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53947E1
cs_ef1b_imon=3.1665E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02384E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=1.08832E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39359E0
lens1_imon=2.62067E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0357E1
cs_ea2_imon=1.35545E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=3.04108E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.36823E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.25706E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15077E1
os_ea1_imon=2.36339E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6411E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22566E0
cs_ionrep_imon=9.48089E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91963E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=1.96458E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.382E-8
tplens_vset=1.4E-1
tplens_vmon=1.6895E0
tplens_imon=-1.33518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26291E1
iondef3_imon=1.51443E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26921E1
iondef2_imon=1.56562E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98097E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.07635E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=8.47511E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33832E1
lens5b_imon=2.18026E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.14019E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.60058E0
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.0072E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11583E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34064E-1
os_ef2bup_imon=-5.10624E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.44581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.28558E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.08603E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73131E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68713E1
iondef4_imon=1.10359E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.12868E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.99034E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-9.11223E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47457E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.90047E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-8.42748E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82671E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-4.93163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.41525E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.52844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.27106E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33302E1
os_fil1_imon=9.4382E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07503E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66684E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.318E1
cs_fil1_imon=7.40712E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.71966E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68727E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69279E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.27768E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.02927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22754E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67701E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.80551E-1	-8.96406E-1	-9.04658E0	-9.0416E0	4.3869E-3	9.48429E-2	2.73198E1	-3.26455E1	-3.26478E1	2.68522E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02922E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.80384E-1	-8.96358E-1	-9.04667E0	-9.04136E0	4.36306E-3	9.50575E-2	2.73375E1	-3.26774E1	-3.26358E1	2.68506E1	1.20774E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.80814E-1	-8.96382E-1	-9.0467E0	-9.04157E0	4.41074E-3	9.49144E-2	2.73393E1	-3.26642E1	-3.26266E1	2.68117E1	1.19925E-7	2.51248E-3	2.51248E-3	6.32418E-3	3.01209E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.80599E-1	-8.96263E-1	-9.04675E0	-9.04136E0	4.12464E-3	9.52244E-2	2.73546E1	-3.26496E1	-3.26178E1	2.68148E1	1.20243E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.80718E-1	-8.96168E-1	-9.04696E0	-9.04174E0	4.29153E-3	9.5129E-2	2.72955E1	-3.26494E1	-3.25713E1	2.68528E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.80575E-1	-8.96096E-1	-9.04667E0	-9.04181E0	4.22001E-3	9.5439E-2	2.72829E1	-3.26561E1	-3.26032E1	2.68406E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.97963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.80814E-1	-8.96287E-1	-9.04665E0	-9.042E0	4.31538E-3	9.48906E-2	2.72909E1	-3.26708E1	-3.26349E1	2.68178E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.8079E-1	-8.96335E-1	-9.04634E0	-9.04195E0	4.52995E-3	9.49383E-2	2.73253E1	-3.26572E1	-3.26125E1	2.68274E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.80504E-1	-8.96311E-1	-9.04653E0	-9.04148E0	4.52995E-3	9.49144E-2	2.73116E1	-3.26472E1	-3.25812E1	2.68442E1	1.20031E-7	2.52139E-3	2.52139E-3	6.34661E-3	3.01209E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.80885E-1	-8.96525E-1	-9.04691E0	-9.04167E0	4.14848E-3	9.47952E-2	2.72835E1	-3.26524E1	-3.26122E1	2.6816E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.99941E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.8079E-1	-8.96168E-1	-9.04689E0	-9.04171E0	4.48227E-3	9.48429E-2	2.73147E1	-3.26488E1	-3.26104E1	2.68406E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-8.80623E-1	-8.96502E-1	-9.04684E0	-9.04164E0	4.14848E-3	9.48429E-2	2.73309E1	-3.26705E1	-3.26068E1	2.68502E1	1.20174E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.80599E-1	-8.9643E-1	-9.04655E0	-9.04195E0	4.24385E-3	9.47714E-2	2.72871E1	-3.26374E1	-3.26176E1	2.68232E1	1.19872E-7	2.52697E-3	2.52697E-3	6.3074E-3	3.01742E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.80504E-1	-8.9612E-1	-9.04698E0	-9.04188E0	4.07696E-3	9.47714E-2	2.73461E1	-3.26884E1	-3.26456E1	2.68424E1	1.19861E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-8.80766E-1	-8.96215E-1	-9.04686E0	-9.04174E0	3.95775E-3	9.47952E-2	2.73177E1	-3.26711E1	-3.26326E1	2.68304E1	1.19705E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9952E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.80742E-1	-8.96192E-1	-9.04696E0	-9.04181E0	3.93391E-3	9.47237E-2	2.73464E1	-3.26962E1	-3.25582E1	2.68358E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.80575E-1	-8.96311E-1	-9.04672E0	-9.04162E0	3.93391E-3	9.48668E-2	2.73008E1	-3.26334E1	-3.2626E1	2.68226E1	1.20414E-7	2.51739E-3	2.51739E-3	6.28056E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.80694E-1	-8.96382E-1	-9.04686E0	-9.04181E0	4.05312E-3	9.4676E-2	2.73346E1	-3.26747E1	-3.26306E1	2.68099E1	1.1983E-7	2.51538E-3	2.51538E-3	6.3074E-3	2.98831E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.80694E-1	-8.96525E-1	-9.04691E0	-9.04169E0	4.17233E-3	9.48906E-2	2.73151E1	-3.26608E1	-3.26113E1	2.68581E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.80599E-1	-8.96478E-1	-9.04675E0	-9.04193E0	4.26769E-3	9.50098E-2	2.73131E1	-3.26921E1	-3.26291E1	2.68713E1	1.20209E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.9841E-1