[Scan]
initial_time=2016-01-18T19:38:14
final_time=2016-01-18T19:38:34
ip_count=19
run=1024
dataset=5
scan=374
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08761E-4
ql1_vset=
ql1_vmon=-8.80527E-1
ql1_imon=1.34321E-8
ql2_vset=
ql2_vmon=-8.9581E-1
ql2_imon=1.89983E-9
ql3_vset=
ql3_vmon=-9.04672E0
ql3_imon=1.97077E-10
ql4_vset=
ql4_vmon=-9.04176E0
ql4_imon=-1.52588E-12
mult1=-9.84875E-9
mult2=-2.6208E-9
rf_tmon=-5.30551E-3
rf_agc=3.28769E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.70833E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65571E0
bslens_imon=2.37871E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19618E1
lens5a_imon=1.98797E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53969E1
cs_ef1b_imon=3.16643E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02339E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04543E1
cs_ea1_imon=1.11273E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37892E0
lens1_imon=2.8024E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64628E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03709E1
cs_ea2_imon=1.37267E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84375E1
cs_ef1a_imon=3.03876E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.36977E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11136E1
os_restr1_imon=4.26444E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15147E1
os_ea1_imon=2.35593E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63402E1
os_ef1bup_imon=3.08158E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21647E0
cs_ionrep_imon=9.40582E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93554E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01925E1
cs_anode1_imon=1.95788E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.38785E-8
tplens_vset=1.4E-1
tplens_vmon=1.70314E0
tplens_imon=-2.39758E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26518E1
iondef3_imon=1.50665E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.56619E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02997E2
lens6_imon=2.98254E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.09725E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27627E0
ionrepsh_imon=8.39813E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33544E1
lens5b_imon=2.16966E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.13179E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53519E0
os_ea2_imon=-8.84833E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00875E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.714E1
cs_ef2a_imon=3.16565E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06948E0
os_ef2alow_imon=-2.44377E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.38725E-1
os_ef2bup_imon=-5.18394E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11143E1
os_restr2_imon=3.44434E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.30577E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.08866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.10281E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.10741E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.10832E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8114E-1
olens1_imon=7.99129E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16452E0
cs_ionaccel_imon=-8.36261E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47397E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56632E1
einzel_imon=7.83185E-6
window_vset=0.0E0
window_vmon=2.47712E-1
window_imon=-7.00031E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82671E2
mask1_imon=2.39166E-4
mask2_vset=0.0E0
mask2_vmon=-1.87084E1
mask2_imon=-6.65E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.61565E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.99347E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.6042E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60519E0
defgridb_imon=6.18045E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.45041E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07465E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66822E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31779E1
cs_fil1_imon=7.51307E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01404E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68699E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69962E-2
os_fil2_imon=-2.41225E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16767E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.33409E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32309E-1
cs_fil2_imon=-2.31494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31137E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22765E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.91173E-1
res40_imon=-2.4282E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.8017E-1	-8.96358E-1	-9.04675E0	-9.04157E0	4.31538E-3	9.48906E-2	2.73086E1	-3.26661E1	-3.2606E1	2.68296E1	1.20005E-7	2.52106E-3	2.52106E-3	6.3016E-3	3.02025E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.80122E-1	-8.96478E-1	-9.04684E0	-9.04119E0	4.36306E-3	9.47237E-2	2.73198E1	-3.26505E1	-3.26217E1	2.6802E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.80265E-1	-8.96072E-1	-9.04682E0	-9.04152E0	4.19617E-3	9.48906E-2	2.73328E1	-3.26809E1	-3.26071E1	2.68134E1	1.19978E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.00144E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.80408E-1	-8.96239E-1	-9.04703E0	-9.0415E0	4.45843E-3	9.46045E-2	2.73021E1	-3.26549E1	-3.2629E1	2.68538E1	1.19851E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.80432E-1	-8.96382E-1	-9.04682E0	-9.04188E0	4.19617E-3	9.47714E-2	2.73009E1	-3.26687E1	-3.26176E1	2.68238E1	1.19953E-7	2.52276E-3	2.52276E-3	6.29665E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-8.80504E-1	-8.96621E-1	-9.04665E0	-9.04212E0	4.26769E-3	9.50098E-2	2.73399E1	-3.26767E1	-3.26431E1	2.68412E1	1.19913E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.80718E-1	-8.96406E-1	-9.04665E0	-9.04157E0	4.31538E-3	9.51529E-2	2.73291E1	-3.26753E1	-3.25996E1	2.68233E1	1.20106E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09356E0	-8.80408E-1	-8.96287E-1	-9.04679E0	-9.04155E0	4.43459E-3	9.50098E-2	2.73198E1	-3.26649E1	-3.26124E1	2.69049E1	1.20226E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09333E0	-8.80718E-1	-8.96335E-1	-9.04675E0	-9.04179E0	4.62532E-3	9.49383E-2	2.72978E1	-3.26572E1	-3.26064E1	2.68466E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09271E0	-8.8048E-1	-8.96287E-1	-9.04691E0	-9.04157E0	4.55379E-3	9.48668E-2	2.73499E1	-3.26691E1	-3.25912E1	2.68346E1	1.20031E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.02277E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09309E0	-8.80647E-1	-8.96478E-1	-9.04689E0	-9.04195E0	4.43459E-3	9.48191E-2	2.73149E1	-3.2656E1	-3.26211E1	2.68412E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09325E0	-8.80575E-1	-8.96645E-1	-9.04658E0	-9.04224E0	4.43459E-3	9.47475E-2	2.73279E1	-3.26567E1	-3.26146E1	2.68352E1	1.20084E-7	2.52139E-3	2.52139E-3	6.3074E-3	2.99083E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-8.80694E-1	-8.96597E-1	-9.04675E0	-9.04167E0	4.3869E-3	9.52959E-2	2.73393E1	-3.26508E1	-3.26378E1	2.68394E1	1.20174E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.80694E-1	-8.96692E-1	-9.04689E0	-9.04176E0	4.33922E-3	9.47952E-2	2.73363E1	-3.26615E1	-3.2635E1	2.69121E1	1.19697E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.03545E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.80527E-1	-8.96525E-1	-9.04667E0	-9.04219E0	4.43459E-3	9.4986E-2	2.72937E1	-3.2644E1	-3.26549E1	2.68412E1	1.19913E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.80742E-1	-8.96597E-1	-9.04694E0	-9.04176E0	4.48227E-3	9.48906E-2	2.7347E1	-3.27092E1	-3.25989E1	2.68376E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9978E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.80551E-1	-8.96621E-1	-9.04691E0	-9.04155E0	4.26769E-3	9.47952E-2	2.72996E1	-3.26432E1	-3.26162E1	2.68244E1	1.20363E-7	2.50989E-3	2.50989E-3	6.33436E-3	3.01738E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.80694E-1	-8.96168E-1	-9.04684E0	-9.04188E0	4.45843E-3	9.47237E-2	2.73428E1	-3.26549E1	-3.26349E1	2.68377E1	1.19872E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.01742E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.80694E-1	-8.9612E-1	-9.0467E0	-9.04198E0	4.24385E-3	9.48429E-2	2.73039E1	-3.26272E1	-3.26372E1	2.68268E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.02511E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.80527E-1	-8.9581E-1	-9.04672E0	-9.04176E0	4.3869E-3	9.50336E-2	2.73021E1	-3.26729E1	-3.26518E1	2.68286E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.02511E-1