[Scan]
initial_time=2016-01-18T19:38:41
final_time=2016-01-18T19:39:02
ip_count=19
run=1024
dataset=5
scan=375
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.80551E-1
ql1_imon=1.34136E-8
ql2_vset=
ql2_vmon=-8.96168E-1
ql2_imon=1.84352E-9
ql3_vset=
ql3_vmon=-9.04679E0
ql3_imon=1.60992E-10
ql4_vset=
ql4_vmon=-9.04171E0
ql4_imon=-1.78814E-13
mult1=-9.18652E-9
mult2=-2.66272E-9
rf_tmon=-6.49515E-3
rf_agc=3.16032E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=1.70774E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.37553E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=2.00362E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53861E1
cs_ef1b_imon=3.18537E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02435E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04796E1
cs_ea1_imon=1.09481E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40561E0
lens1_imon=2.70358E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65101E1
os_ef1alow_imon=3.0555E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.35148E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84525E1
cs_ef1a_imon=2.98065E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.36736E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11441E1
os_restr1_imon=4.24789E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=2.35871E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63654E1
os_ef1bup_imon=3.08507E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21304E0
cs_ionrep_imon=9.47368E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01622E1
cs_anode1_imon=1.96491E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.37536E-8
tplens_vset=1.4E-1
tplens_vmon=1.69791E0
tplens_imon=-1.87592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25707E1
iondef3_imon=1.49388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26266E1
iondef2_imon=1.57571E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.05589E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=8.47872E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.19396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.13597E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53569E0
os_ea2_imon=-4.54359E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00716E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71202E1
cs_ef2a_imon=3.17601E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12068E0
os_ef2alow_imon=-2.27865E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.42543E-1
os_ef2bup_imon=-5.0781E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11098E1
os_restr2_imon=3.44735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.2845E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01871E1
cs_anode2_imon=2.09104E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73339E1
iondef1_imon=1.09769E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68226E1
iondef4_imon=1.09851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.09403E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.98341E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07088E0
cs_ionaccel_imon=-9.23837E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02012E2
cs_ionfocb_imon=1.47357E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57403E1
einzel_imon=7.84877E-6
window_vset=0.0E0
window_vmon=2.51904E-1
window_imon=-8.2653E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82778E2
mask1_imon=2.39361E-4
mask2_vset=0.0E0
mask2_vmon=-1.87136E1
mask2_imon=-4.14846E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92708E3
multa_neg_imon=6.56449E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.46715E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.0872E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46472E0
defgridb_imon=5.76419E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.40898E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08003E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66482E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31784E1
cs_fil1_imon=7.51108E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02182E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68361E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55092E-2
os_fil2_imon=-2.38805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0781E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.17327E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33685E-1
cs_fil2_imon=-2.05121E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.30572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22741E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40129E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.9681E-1
res40_imon=-2.37222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-8.80623E-1	-8.9643E-1	-9.04675E0	-9.04148E0	4.33922E-3	9.50575E-2	2.73263E1	-3.2685E1	-3.26225E1	2.6781E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.80504E-1	-8.9643E-1	-9.04648E0	-9.04193E0	3.98159E-3	9.52005E-2	2.73069E1	-3.26756E1	-3.26272E1	2.68413E1	1.20158E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.80384E-1	-8.96525E-1	-9.04682E0	-9.04169E0	4.12464E-3	9.50575E-2	2.72385E1	-3.267E1	-3.25953E1	2.69136E1	1.19872E-7	2.52585E-3	2.52585E-3	6.29624E-3	3.00144E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.80218E-1	-8.96335E-1	-9.0466E0	-9.04145E0	4.31538E-3	9.50336E-2	2.72883E1	-3.26777E1	-3.26152E1	2.68424E1	1.19941E-7	2.51603E-3	2.51603E-3	6.2863E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.80384E-1	-8.96382E-1	-9.04689E0	-9.04174E0	4.36306E-3	9.53197E-2	2.73177E1	-3.26158E1	-3.26284E1	2.6825E1	1.20174E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.80527E-1	-8.96502E-1	-9.0466E0	-9.04155E0	4.43459E-3	9.52721E-2	2.73508E1	-3.2632E1	-3.26338E1	2.68244E1	1.20004E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.80456E-1	-8.96502E-1	-9.04689E0	-9.04188E0	4.8399E-3	9.52959E-2	2.73039E1	-3.26679E1	-3.26349E1	2.68166E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.8017E-1	-8.96597E-1	-9.04691E0	-9.04167E0	4.57764E-3	9.51767E-2	2.73273E1	-3.26476E1	-3.26169E1	2.68076E1	1.20592E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.80241E-1	-8.96311E-1	-9.04665E0	-9.04179E0	4.31538E-3	9.52959E-2	2.72849E1	-3.2664E1	-3.26156E1	2.68112E1	1.20226E-7	2.51679E-3	2.51679E-3	6.33341E-3	3.00989E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.80194E-1	-8.96382E-1	-9.04663E0	-9.04138E0	4.52995E-3	9.52721E-2	2.73192E1	-3.26119E1	-3.26462E1	2.68388E1	1.2035E-7	2.51804E-3	2.51804E-3	6.33538E-3	3.00144E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.80313E-1	-8.9643E-1	-9.04698E0	-9.04188E0	4.45843E-3	9.52721E-2	2.72282E1	-3.2647E1	-3.26236E1	2.68331E1	1.20031E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.01475E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.80075E-1	-8.96382E-1	-9.04677E0	-9.04152E0	4.41074E-3	9.55343E-2	2.72684E1	-3.26536E1	-3.26338E1	2.68134E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01347E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.80122E-1	-8.96382E-1	-9.04694E0	-9.04169E0	4.55379E-3	9.49621E-2	2.73281E1	-3.26579E1	-3.26455E1	2.68442E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00563E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09294E0	-8.80361E-1	-8.96645E-1	-9.04655E0	-9.04152E0	4.88758E-3	9.4986E-2	2.73081E1	-3.26699E1	-3.26218E1	2.68496E1	1.2026E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99686E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.80361E-1	-8.96573E-1	-9.04646E0	-9.04164E0	4.93526E-3	9.49621E-2	2.72913E1	-3.26488E1	-3.26428E1	2.68076E1	1.20226E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.80456E-1	-8.96525E-1	-9.04651E0	-9.04169E0	4.74453E-3	9.46999E-2	2.73847E1	-3.26444E1	-3.26181E1	2.68256E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.80361E-1	-8.96406E-1	-9.04655E0	-9.0415E0	4.60148E-3	9.48906E-2	2.73134E1	-3.26762E1	-3.26248E1	2.68304E1	1.19913E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.80575E-1	-8.9643E-1	-9.04665E0	-9.04176E0	4.8399E-3	9.49144E-2	2.73497E1	-3.26758E1	-3.26254E1	2.68285E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.80694E-1	-8.96049E-1	-9.0466E0	-9.0414E0	4.81606E-3	9.48191E-2	2.73279E1	-3.26993E1	-3.26164E1	2.68226E1	1.19991E-7	2.51287E-3	2.51287E-3	6.31798E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.80551E-1	-8.96168E-1	-9.04679E0	-9.04171E0	4.81606E-3	9.4986E-2	2.73339E1	-3.26266E1	-3.25707E1	2.68226E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1